Light receiving member having a multilayered light receiving layer composed of a lower layer made of aluminum-containing inorganic material and an upper layer made of non-single-crystal silicon material

ABSTRACT

There is provided an improved light receiving member for electrophotography which is made up of an aluminum support and a multilayered light receiving layer exhibiting photoconductivity formed on said aluminum support, wherein said multilayered light receiving layer consists of a lower layer in contact with said support and an upper layer, said lower layer being made of an inorganic material containing at least aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H), and having a part in which said aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) are unevenly distributed across the layer thickness, said upper layer being made of a non-single-crystal material composed of silicon atoms (Si) as the matrix and at least either of hydrogen atoms (H) or halogen atoms (X), and containing at least either of germanium atoms or tin atoms in a layer region in contact with said lower layer. The light receiving member for electrophotography exhibits outstanding electric characteristics, optical characteristics, photoconductive characteristics, durability, image characteristics, and adaptability to use environments.

FIELD OF THE INVENTION

This invention concerns a light receiving member sensitive to electromagnetic waves such as light (which herein means in a broader sense those lights such as ultraviolet rays, visible rays, infrared rays, X-rays, and γ-rays).

More particularly, it relates to an improved light receiving member having a multilayered light receiving layer composed of a lower layer made of an inorganic material containing at least aluminum atoms, silicon atoms, and hydrogen atoms, and an upper layer made of non-single-crystal silicon material, which is suitable particularly for use in which coherent lights such as laser beams are applied.

BACKGROUND OF THE INVENTION

The light receiving member used for image formation has a light receiving layer made of a photoconductive material. This material is required to have characteristic properties such as high sensitivity, high S/N ratio [ratio of light current (Ip) to dark current (Id)], absorption spectral characteristic matching the spectral characteristic of electromagnetic wave for irradiation, rapid optical response, appropriate dark resistance, and non-toxicity to the human body at the time of use. The non-toxicity at the time of use is an important requirement in the case of a light receiving member for electronic photography which is built into an electrophotographic apparatus used as an office machine.

A photoconductive material attracting attention at present from the standpoint mentioned above is amorphous silicon (A-Si for short hereinafter). The application of A-Si to the light receiving member for electrophotography is disclosed in, for example, German Laid-open Pat. Nos. 2746967 and 2855718.

FIG. 2 is a schematic sectional view showing the layer structure of the conventional light receiving member for electrophotography. There are shown an aluminum support (201) and a photosensitive layer of A-Si (202). This type of light receiving member for electrophotography is usually produced by forming the photosensitive layer 202 of A-Si on the aluminum support 201 heated to 50°˜350° C., by deposition, hot CVD process, plasma CVD process, or sputtering.

Unfortunately, this light receiving member for electrophotography has a disadvantage that the sensitive layer 202 of A-Si is liable to crack or peel off during cooling subsequent to the film forming step, because the coefficient of thermal expansion of aluminum is nearly ten times as high as that of A-Si. To solve this problem, there was proposed a photosensitive body for electrophotography which is composed of an aluminum support, an intermediate layer containing at least aluminum, and a sensitive layer of A-Si. (Japanese Patent Laid-open No. 28162/1984) The intermediate layer containing at least aluminum relieves the stress arising from the difference in the coefficient of thermal expansion between the aluminum support and the A-Si sensitive layer, thereby reducing the cracking and peeling of the A-Si sensitive layer.

The conventional light receiving member for electrophotography which has the light receiving layer made of A-Si has been improved in electrical, optical, and photoconductive characteristics (such as dark resistance, photosensitivity, and light responsivity), adaptability of use environment, stability with time, and durability. Nevertheless, it still has room for further improvement in its overall performance.

For the improvement of image characteristics, several improvements have recently been made on the optical exposure unit, development unit, and transfer unit in the electrophotographic apparatus. This, in turn, has required the light receiving member for electrophotography to be improved further in image characteristics. With the improvement of images in resolving power, the users have begun to require further improvements such as the reduction of uneveness (so-called "coarse image") in the region where the image density delicately changes, and the reduction of image defects (so-called "dots") which appear in black or white spots, especially the reduction of very small "dots" which attracted no attention in the past.

Another disadvantage of the conventional light receiving member for electrophotography is its low mechanical strength. When it comes into contact with foreign matters which have entered the electrophotographic apparatus, or when it comes into contact with the main body or tools while the electrophotographic apparatus is being serviced for maintenance, image defects occur or the A-Si film peels off on account of the mechanical shocks and pressure. These aggravate the durability of the light receiving member for electrophotography.

An additional disadvantage of the conventional light receiving member for electrophotography is that the A-Si film is susceptible to cracking and peeling on account of the stress which occurs because the A-Si film differs from the aluminum support in the coefficient of thermal expansion. This leads to low yields in production.

Under the circumstances mentioned above, it is necessary to solve the above-mentioned problems and to improve the light receiving member for electrophotography from the standpoint of its structure as well as the characteristic properties of the A-Si material per se.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a light receiving member for electrophotography which meets the above-mentioned requirements and eliminates the above-mentioned disadvantages involved in the conventional light receiving member.

According to the present invention, the improved light receiving member for electrophotography is made up of an aluminum support and a multilayered light receiving layer exhibiting photoconductivity formed on said aluminum support, wherein said multilayered light receiving layer consists of a lower layer in contact with said support and an upper layer, said lower layer being made of an inorganic material containing at least aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) ("AlSiH" for short hereinafter), and having a part in which said aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) are unevenly distributed across the layer thickness, said upper layer being made of a non-single-crystal material composed of silicon atoms (Si) as the matrix and at least either of hydrogen atoms (H) or halogen atoms (X) ("Non-Si(H,X)" for short hereinafter), and having a layer region in contact with said lower layer, said layer region containing at least either of germanium atoms (Ge) or tin atoms (Sn).

The light receiving member for electrophotography in the present invention has the multilayered structure as mentioned above. Therefore, it is free from the above-mentioned disadvantages, and it exhibits outstanding electric characteristics, optical characteristics, photoconductive characteristics, durability, image characteristics, and adaptability to ambient environments.

As mentioned above, the lower layer is made such that the aluminum atoms and silicon atoms, and especially the hydrogen atoms, are unevenly distributed across the layer thickness. This structure improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer. In addition, this structure joins the constituent elements of the aluminum support to the constituent elements of the upper layer gradually in terms of composition and constitution. This leads to the improvement of image characteristics relating to coarse image and dots. Therefore, the light receiving member permits the stable reproduction of images of high quality with a sharp half tone and a high resolving power.

The above-mentioned multilayered structure prevents the image defects and the peeling of the non-Si(H,X) film which occurs as the result of impactive mechanical pressure applied to the light receiving member for electrophotography. In addition, the multilayered structure relieves the stress arising from the difference between the aluminum support and the non-Si(H,X) film in the coefficient of thermal expansion and also prevents the occurrence of cracks and peeling in the non-Si(H,X) film. All this contributes to improved durability and increased yields in production.

According to the present invention, the upper layer has a layer region in contact with the lower layer, said layer region containing at least either of germanium atoms (Ge) or tin atoms (Sn). This layer region improves the adhesion of the upper layer to the lower layer, prevents the occurrence of defective images and the peeling of the non-Si(H,X) film, and improves the durability. In addition, this layer region efficiently absorbs lights of long wavelength which are not completely absorbed by the upper layer and the lower layer. This suppresses the interference arising from the reflection at the interface between the upper layer and the lower layer or the reflection at the surface of the support, in the case where a light of long wavelength such as semiconductor laser is used as the light source for image exposure in the electrophotographic apparatus.

According to the present invention, the lower layer of the light receiving member may further contain atoms to control the image ("atoms (Mc)" for short hereinafter). The incorporation of atoms (Mc) to control the image quality improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer and also improves the transferability of electric charge (photocarrier) in the lower layer. Thus the light receiving member permits the stable reproduction of images of high quality with a sharp half tone and a high resolving power.

According to the present invention, the lower layer of the light receiving member may further contain atoms to control the durability ("atoms (CNOc)" for short hereinafter). The incorporation of atoms (CNOc) greatly improves the resistance to impactive mechanical pressure applied to the light receiving member for electrophotography. In addition, it prevents the image defects and the peeling of the non-Si(H,X) film, relieves the stress arising from the difference between the aluminum support and the non-Si(H,X) film in the coefficient of thermal expansion, and prevents the occurrence of cracks and peeling in the non-Si(H,X) film. All this contributes to improved durability and increased yields in production.

According to the present invention, the lower layer of the light receiving member may further contain halogen atoms (X). The incorporation of halogen atoms (X) compensates for the dangling bonds of silicon atoms (Si) and aluminum atoms (Al), thereby creating a stable state in terms of constitution and structure. This, coupled with the effect produced by the distribution of silicon atoms (Si), aluminum atoms (Al), and hydrogen atoms (H) mentioned above, greatly improves the image characteristics relating to coarse image and dots.

According to the present invention, the lower layer of the light receiving member may further contain at least either of germanium atoms (Ge) or tin atoms (Sn). The incorporation of at least either of germanium atoms (Ge) or tin atoms (Sn) improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, the adhesion of the lower layer to the aluminum support, and the transferability of electric charge (photocarrier) in the lower layer. This leads to a distinct improvement in image characteristics and durability.

According to the present invention, the lower layer of the light receiving member may further contain at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms ("atoms (Me)" for short hereinafter). The incorporation of at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms permits more dispersion of the hydrogen atoms or halogen atoms contained in the lower layer (the reason for this is not yet fully elucidated) and also reduces the structure relaxation of the lower layer which occurs with lapse of time. This leads to reduced liability of cracking and peeling even after use for a long period of time. The incorporation of at least one kind of the above-mentioned metal atoms improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, the adhesion of the lower layer to the aluminum support, and the transferability of electric charge (photocarrier) in the lower layer. This leads to a distinct improvement in image characteristics and durability, which in turn leads to the stable production and quality.

In the meantime, the above-mentioned Japanese Patent Laid-open No. 28162/1984 mentions the layer containing aluminum atoms and silicon atoms unevenly across the layer thickness and also mentions the layer containing hydrogen atoms. However, it does not mention how the layer contains hydrogen atoms. Therefore, it is distinctly different from the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating the layer structure of the light receiving member for electrophotography pertaining to the present invention.

FIG. 2 is a schematic diagram illustrating the layer structure of the conventional light receiving member for electrophotography.

FIGS. 3 to 8 are diagrams illustrating the distribution of aluminum atoms (Al) contained in the lower layer, and also illustrating the distribution of atoms (Mc) to control image quality, and/or atoms (CNOc) to control durability, and/or halogen atoms (X), and/or germanium atoms (Ge), and/or tin atoms (Sn), and/or at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, which are optionally contained in the lower layer.

FIGS. 9 to 16 are diagrams illustrating the distribution of silicon atoms (Si) and hydrogen atoms (H) contained in the lower layer, and also illustrating the distribution of atoms (Mc) to control image quality, and/or atoms (CNOc) to control durability, and/or halogen atoms (X), and/or germanium atoms (Ge), and/or tin atoms (Sn), and/or at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, which are optionally contained in the lower layer.

FIGS. 17 to 36 are diagrams illustrating the distribution of atoms (M) to control conductivity, carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O), and/or germanium atoms (Ge), and/or tin atoms (Sn), and/or alkali metal atoms, and/or alkaline earth metal atoms, and/or transition metal atoms, which are contained in the upper layer.

FIG. 37 is a schematic diagram illustrating an apparatus to form the light receiving layer of the light receiving member for electrophotography by RF glow discharge method according to the present invention.

FIG. 38 is an enlarged sectional view of the aluminum support having a V-shape rugged surface on which is formed the light receiving member for electrophotography according to the present invention.

FIG. 39 is an enlarged sectional view of the aluminum support having a dimpled surface on which is formed the light receiving member for electrophotography according to the present invention.

FIG. 40 is a schematic diagram of the depositing apparatus to form the light receiving layer of the light receiving member for electrophotography by microwave glow discharge method according to the present invention.

FIG. 41 is a schematic diagram of the apparatus to form the light receiving layer of the light receiving member for electrophotography by microwave glow discharge method according to the present invention.

FIG. 42 is a schematic diagram of the apparatus to form the light receiving layer of the light receiving member for electrophotography by RF sputtering method according to the present invention.

FIGS. 43(a) to 43(d) show the distribution of the content of the atoms across the layer thickness in Example 351, Comparative Example 8, Example 358, and Example 359, respectively, of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

The light receiving member for electrophotography pertaining to the present invention will be described in more detail with reference to the drawings.

FIG. 1 is a schematic diagram showing a typical example of the layer structure suitable for the light receiving member for electrophotography pertaining to the present invention.

The light receiving member 100 for electrophotography as shown in FIG. 1 is made up the aluminum support 101 and the light receiving layer 102 of layered structure. The light receiving layer 102 is made up of the lower layer 103 of AlSiH and the upper layer 104 of non-Si(H,X). The lower layer 103 has a part in which the above-mentioned aluminum atoms and silicon atoms are unevenly distributed across the layer thickness. The upper layer 104 has a layer region in contact with said lower layer, said layer region containing at least either of germanium atoms (Ge) or tin atoms (Sn). The upper layer 104 has the free surface 105.

SUPPORT

The aluminum support 101 used in the present invention is made of an aluminum alloy. The aluminum alloy is not specifically limited in base metal and alloy components. The kind and composition of the components may be selected as desired. Therefore, the aluminum alloy used in the present invention may be selected from pure aluminum, Al-Cu alloy, Al-Mn alloy, Al-Si ally, Al-Mg alloy, Al-Mg-Si alloy, Al-Zn-Mg alloy, Al-Cu-Mg alloy (duralumin and super duralumin), Al-Cu-Si alloy (lautal), Al-Cu-Ni-Mg alloy (Y-alloy and RR alloy), and aluminum powder sintered body (SAP) which are standardized or registered as a malleable material, castable material, or die casting material in the Japanese Industrial Standards (JIS), AA Standards, BS Standards, DIN Standards, and International Alloy Registration.

The composition of the aluminum alloy used in the invention is exemplified in the following. The scope of the invention is not restricted to the examples.

Pure aluminum conforming to JIS-1100 which is composed of less than 1.0 wt% of Si and Fe, 0.05˜0.20 wt% of Cu, less than 0.05 wt% of Mn, less than 0.10 wt% of Zn, and more than 99.00 wt% of Al.

Al-Cu-Mg alloy conforming to JIS-2017 which is composed of 0.05˜0.20 wt% of Si, less than 0.7 wt% of Fe, 3.5˜4.5 wt% of Cu, 0.40˜1.0 wt% of Mn, 0.40˜0.8 wt% of Mg, less than 0.25 wt% of Zn, and less than 0.10 wt% of Cr, with the remainder being Al.

Al-Mn alloy conforming to JIS-3003 which is composed of less than 0.6 wt% of Si, less than 0.7 wt% of Fe, 0.05˜0.20 wt% of Cu, 1.0˜1.5 wt% of Mn, and less than 0.10 wt% of Zn, with the remainder being Al.

Al-Si alloy conforming to JIS-4032 which is composed of 11.0˜13.5 wt% of Si, less than 1.0 wt% of Fe, 0.50˜1.3 wt% of Cu, 0.8˜1.3 wt% of Mg, less than 0.25 wt% of Zn, less than 0.10 wt% of Cr, and 0.5˜1.3 wt% of Ni, with the remainder being Al.

Al-Mg alloy conforming to JIS-5086 which is composed of less than 0.40 wt% of Si, less than 0.50 wt% of Fe, less than 0.10 wt% of Cu, 0.20˜0.7 wt% of Mn, 3.5˜4.5 wt% of Mg, less than 0.25 wt% of Zn, 0.05˜0.25 wt% of Cr, and less than 0.15 wt% of Ti, with the remainder being Al.

An alloy composed of less than 0.50 wt% of Si, less than 0.25 wt% of Fe, 0.04˜0.20 wt% of Cu, 0.01˜1.0 wt% of Mn, 0.5˜10 wt% of Mg, 0.03˜0.25 wt% of Zn, 0.05˜0.50 wt% of Cr, 0.05˜0.20 wt% of Ti or Tr, and less than 1.0 cc of H₂ per 100 g of Al, with the remainder being Al.

An alloy composed of less than 0.12 wt% of Si, less than 0.15 wt% of Fe, less than 0.30 wt% of Mn, 0.5˜5.5 wt% of Mg, 0.01˜1.0 wt% of Zn, less than 0.20 wt% of Cr, and 0.01˜0.25 wt% of Zr, with the remainder being Al.

Al-Mg-Si alloy conforming to JIS-6063 which is composed of 0.20˜0.6 wt% of Si, less than 0.35 wt% of Fe, less than 0.10 wt% of Cu, less than 0.10 wt% of Mn, 0.45˜0.9 wt% of MgO, less than 0.10 wt% of Zn, less than 0.10 wt% of Cr, and less than 0.10 wt% of Ti, with the remainder being Al.

Al-Zn-Mg alloy conforming to JIS-7N01 which is composed of less than 0.30 wt% of Si, less than 0.35 wt% of Fe, less than 0.20 wt% of Cu, 0.20˜0.7 wt% of Mn, 1.0˜2.0 wt% of Mg, 4.0˜5.0 wt% of Zn, less than 0.30 wt% of Cr, less than 0.20 wt% of Ti, less than 0.25 wt% of Zr, and less than 0.10 wt% of V, with the remainder being Al.

In this invention, an aluminum alloy of proper composition should be selected in consideration of mechanical strength, corrosion resistance, workability, heat resistance, and dimensional accuracy which are required according to specific uses. For example, where precision working with mirror finish is required, an aluminum alloy containing magnesium and/or copper is desirable because of its free-cutting performance.

According to the present invention, the aluminum support 101 can be in the form of cylinder or flat endless belt with a smooth or irregular surface. The thickness of the support should be properly determined so that the light receiving member for electrophotography can be formed as desired. In the case where the light receiving member for electrophotography is required to be flexible, it can be made as thin as possible within limits not harmful to the performance of the support. Usually the thickness should be greater than 10 μm for the convenience of production and handling and for the reason of mechanical strength.

In the case where the image recording is accomplished by the aid of coherent light such as laser beams, the aluminum support may be provided with an irregular surface to eliminate defective images caused by interference fringes.

The irregular surface on the support may be produced by any known method disclosed in japanese Patent Laid-open Nos. 168156/1985, 178457/1985, and 225854/1985.

The support may also be provided with an irregular surface composed of a plurality of spherical dents in order to eliminate defective images caused by interference fringes which occur when coherent light such as laser beams is used.

In this case, the surface of the support has irregularities smaller than the resolving power required for the light receiving member for electrophotography, and the irregularities are composed of a plurality of dents.

The irregularities composed of a plurality of spherical dents can be formed on the surface of the support according to the known method disclosed in Japanese Patent Laid-open No. 231561/1986.

LOWER LAYER

According to the present invention, the lower layer is made of an inorganic material which is composed of at least aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H). It may further contain atoms (Mc) to control image quality, atoms (CNOc) to control durability, halogen atoms (X), germanium atoms (Ge) and/or tin atoms (Sn), and at least one kind of atoms (Me) selected from the group consisting of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms.

The lower layer contains aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) which are distributed evenly throughout the layer; but it has a part in which their distribution is uneven across the layer thickness. Their distribution should be uniform in a plane parallel to the surface of the support so that uniform characteristics are ensured in the same plane.

According to a preferred embodiment, the lower layer contains aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) which are distributed evenly and continuously throughout the layer, with the aluminum atoms (Al) being distributed such that their concentration gradually decreases across the layer thickness toward the upper layer from the support, with the silicon atoms (Si) and hydrogen atoms (H) being distributed such that their concentration gradually increases across the layer thickness toward the upper layer from the support. This distribution of atoms makes the aluminum support and the lower layer compatible with each other and also makes the lower layer and the upper layer compatible with each other.

According to the present invention, the light receiving member for electrophotography is characterized in that the lower layer contains aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) which are specifically distributed across the layer thickness as mentioned above but are evenly distributed in the plane parallel to the surface of the support.

The lower layer may further contain atoms (Mc) to control image quality, atoms (CNOc) to control durability, halogen atoms (X), germanium atoms (Ge) and/or tin atoms (Sn), and at least one kind of atoms (Me) selected from the group consisting of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, which are evenly distributed throughout the entire layer or unevenly distributed across the layer thickness in a specific part. In either cases, their distribution should be uniform in a plane parallel to the surface of the support so that uniform characteristics are ensured in the same plane.

FIGS. 3 to 8 show the typical examples of the distribution of aluminum atoms (Al) and optionally added atoms in the lower layer of the light receiving member for electrophotography in the present invention. (The aluminum atoms (Al) and the optionally added atoms are collectively referred to as "atoms (AM)" hereinafter.)

In FIGS. 3 to 8, the abscissa represents the concentration (C) of atoms (AM) and the ordinate represents the thickness of the lower layer. (The aluminum atoms (Al) and the optionally added atoms may be the same or different in their distribution across the layer thickness.)

The ordinate represents the thickness of the lower layer, with t_(B) representing the position of the end (adjacent to the support) of the lower layer, with t_(T) representing the position of the end (adjacent to the upper layer) of the lower layer. In other words, the lower layer containing atoms (AM) is formed from the t_(B) side toward the t_(T) side.

FIG. 3 shows a first typical example of the distribution of atoms (AM) across layer thickness in the lower layer. The distribution shown in FIG. 3 is such that the concentration (C) of atoms (AM) remains constant at C₃₁ between position t_(B) and position t₃₁ and linearly decreases from C₃₁ to C₃₂ between position t₃₁ and position t_(T).

The distribution shown in FIG. 4 is such that the concentration (C) of atoms (AM) linearly decreases from C₄₁ to C₄₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 5 is such that the concentration (C) of atoms (AM) gradually and continuously decreases from C₅₁ to C₅₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 6 is such that the concentration (C) of atoms (AM) remains constant at C₆₁ between position t_(B) and position t₆₁ and linearly decreases from C₆₂ to C₆₃ between position t₆₁ and position t_(T).

The distribution shown in FIG. 7 is such that the concentration (C) of atoms (AM) remains constant at C₇₁ between position t_(B) and position t₇₁ and decreases gradually and continuously from C₇₂ to C₇₃ between position t₇₁ and position t_(T).

The distribution shown in FIG. 8 is such that the concentration (C) of atoms (AM) decreases gradually and continuously from C₈₁ to C₈₂ between position t_(B) and position t_(T).

The atoms (AM) in the lower layer are distributed across the layer thickness as shown in FIGS. 3 to 8 with reference to several typical examples. In a preferred embodiment, the lower layer contains silicon atoms (Si) and hydrogen atoms (H) and atoms (AM) in a concentration of C in the part adjacent to the support, and also contains atoms (AM) in a much lower concentration at the interface t_(T). In such a case, the distribution across the layer thickness should be made such that the maximum concentration C_(max) is 10 atom% or above, preferably 30 atom% or above, and most desirably 50 atom% or above.

According to the present invention, the amount of atoms (AM) in the lower layer should be properly established so that the ojbect of the invention is effectively achieved. It is 5˜95 atoms%, preferably 10˜90 atom%, and most desirably 20˜80 atom%.

FIGS. 9 to 16 show the typical examples of the across-the-layer thickness distribution of silicon atoms (Si), hydrogen atoms (H), and the above-mentioned optional atoms contained in the lower layer of the light receiving member for electrophotography in the present invention.

In FIGS. 9 to 16, theabscissa represents the concentration (C) of silicon atoms (Si), hydrogen atoms (H), and optionally contained atoms, an the ordinate represents the thickness of the lower layer. (The silicon atoms (Si), hydrogen atoms (H), and optionally contained atoms will be collectively referred to as "atoms (SHM)" hereinafter). The silicon atoms (Si), hydrogen atoms (H), and optionally contained atoms may be the same or different in their distribution across the layer thickness. t_(B) on the ordinate represents the end of the lower layer adjcent to the support and t_(T) on the ordinate represents the end of the lower layer adjacent to the upper layer. In other words, the lower layer containing atoms (SHM) is formed from the t_(B) side toward the t_(T) side.

FIG. 9 shows a first typical example of the distribution of atoms (SHM) across the layer thickness in the lower layer. The distribution shown in FIG. 9 is such that the concentration (C) of atoms (SHM) linearly increases from C₉₁ to C₉₂ between position t_(B) and position t₉₁ and remains constant at C₉₂ between position t₉₁ and position t_(T).

The distribution shown in FIG. 10 is such that the concentration (C) of atoms (SHM) linearly increases from C₁₀₁ to C₁₀₂ between position t_(B) and position t_(B).

The distribution shown in FIG. 11 is such that the concentration (C) of atoms (SHM) gradually and continuously increases from C₁₁₁ to C₁₁₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 12 is such that the concentration (C) of atoms (SHM) linearly increases from C₁₂₁ to C₁₂₂ between position t_(B) and position t₁₂₁ and remains constant at C₁₂₃ between position t₁₂₁ and position t_(T).

The distribution shown in FIG. 13 is such that the concentration (C) of atoms (SHM) gradually and continuously increases from C₁₃₁ to C₁₃₂ between position t_(B) and position t₁₃₁ and remains constant at C₁₃₃ between position t₁₃₁ and position t_(T).

The distribution shown in FIG. 14 is such that the concentration (C) of atoms (SHM) gradually and continuously increases from C₁₄₁ to C₁₄₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 15 is such that the concentration (C) of atoms (SHM) gradually increases from substantially zero to C₁₅₁ between position t_(B) and position t₁₅₁ and remains constant at C₁₅₂ between position t₁₅₁ and position t_(T). ("Substantially zero" means that the amount is lower than the detection limit. The same shall apply hereinafter.)

The distribution shown in FIG. 16 is such that the concentration (C) of atoms (SHM) gradually increases from substantially zero to C₁₆₁ between position t_(B) and position t_(T).

The silicon atoms (Si) and hydrogen atoms (H) in the lower layer are distributed across the layer thickness as shown in FIGS. 9 to 16 with reference to several typical examples. In a preferred embodiment, the lower layer contains aluminum atoms (Al) and silicon atoms (Si) and hydrogen atoms (H) in a low concentration of C in the part adjacent to the support, and also contains silicon atoms (Si) and hydrogen atoms (H) in a much higher concentration at the interface t_(T). In such a case, the distribution across the layer thickness should be made such that the maximum concentration C_(max) of the total of silicon atoms (Si) and hydrogen atoms (H) is 10 atom% or above, preferably 30 atom% or above, and most desirably 50 atom% or above.

According to the present invention, the amount of silicon atoms (Si) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 5˜95 atom%, preferably 10˜90 atom%, and most desirably 20˜80 atom%.

According to the present invention, the amount of hydrogen atom (H) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 0.01˜70 atom%, preferably 0.1˜50 atom%, and most desirably 1˜40 atom%.

The above-mentioned atoms (Mc) optionally contained to control image quality are selected from atoms belonging to Group III of the periodic table, except aluminum atoms (Al) ("Group III atom" for short hereinafter), atoms belonging to Group V of the periodic table, except nitrogen atoms (N) ("Group V atoms" for short hereinafter), and atoms belonging to Group VI of the periodic table, except oxygen atoms (O) ("Group VI atoms" for short hereinafter).

Examples of Group III atoms include B (boron), Ga (gallim), in (indium), and Tl (thallium), with B and Ga being preferable. Examples of Group V atoms include P (phosphorus), As (arsenic), Sb (antimony), and Bi (bismuth), with P and As being preferable. Examples of Group VI atoms include S (sulfur), Se (selenium), Te (tellurium), and Po (polonium), with S and Se being preferable.

According to the present invention, the lower layer may contain atoms (Mc) to control image quality, which are Group III atoms, Group V atoms, or Group VI atoms. The atoms (Mc) improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer. They also control the conduction type and/or conductivity in the layer region of the lower layer which contains a less amount of aluminum atoms (Al).

In the lower layer, the content of atoms (Mc) to control image quality should be 1×10⁻³ ˜5×10⁴ atom-ppm, preferably 1×10⁻² ˜5×10⁴ atom-ppm, and most desirably 1×10⁻² ˜5×10³ atom-ppm.

The above-mentioned atoms (NCOc) optionally contained to control image durability are selected from carbon atoms (C), nitrogen atoms (N), and oxygen atoms (O). When contained in the lower layer, carbon atoms (C), and/or nitrogen atoms (N), and/or oxygen atoms (O) as the atoms (CNOc) to control durability improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer and/or improve the adhesion of the lower layer to the aluminum support. They also control the width of the forbidden band in the layer region of the lower layer which contains a less amount of aluminum atoms (Al).

In the lower layer, the content of atoms (NCOc) to control durability should be 1×10³ ˜5×10⁵ atom-ppm, preferably 5×10¹ ˜4×10⁵ atom-ppm, and most desirably 1×10² ˜3×10³ atom-ppm.

The above-mentioned halogen atoms (X) optionally contained in the lower layer are selected from fluorine atoms (F), chlorine atoms (Cl), bromine atoms (Br), and iodine atoms (I). When contained in the lower layer, fluorine atoms (F), and/or chlorine atoms (Cl), and/or bromine atoms (Br), and/or iodine atoms (I) as the halogen atoms (V) compensate for the unbonded hands of silicon atoms (Si) and aluminum atoms (Al) contained mainly in the lower layer and make the lower layer stable in terms of composition and structure, thereby improving the quality of the layer.

The content of halogen atoms (X) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 1˜4×10⁵ atom-ppm, preferably 10˜3×10⁵ atom-ppm, and most desirably 1×10² ˜2×10⁵ atom-ppm.

According to the present invention, the lower layer may optionally contain germanium atoms (Ge) and/or tin atoms (Sn). They improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer and/or improve the adhesion of the lower layer to the aluminum support. They also narrow the width of the forbidden band in the layer region of the lower layer which contains a less amount of aluminum atoms (Al). These effects suppress interference which occurs when a light of long wavelength such as semiconductor laser is used as the light source for image exposure in the electrophotographic apparatus.

The content of germanium atoms (Ge) and/or tin atoms (Sn) in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 1˜9×10⁵ atom-ppm, preferably 1×10² ˜8×10⁵ atom-ppm, and most desirably 5×10² ˜7×10⁵ atom-ppm.

According to the present invention, the lower layer may optionally contain, as the alkali metal atoms and/or alkaline earth metal atoms and/or transiton metal atoms, magnesium atoms (Mg) and/or copper atoms (Cu) and/or sodium atoms (Na) and/or yttrium atoms (Y) and/or manganese atoms (Mn) and/or zinc atoms (Zn). They disperse hydrogen atoms (H) and halogen atoms (X) uniformly in the lower layer and prevent the cohesion of hydrogen which is considered to cause cracking and peeling. They also improve the injection of electric charge across the aluminum support and the upper layer and/or improve the transferability of electric charge in the lower layer and/or improve the adhesion of the lower layer to the aluminum support.

The content of the above-mentioned metals in the lower layer should be properly established so that the object of the invention is effectively achieved. It is 1˜2×10⁵ atom-ppm, preferably 1×10² ˜1×10⁵ atom-ppm, and most desirably 5×10² ˜5×10⁴ atom-ppm.

According to the present invention, the lower layer composed of AlSiH is formed by the vacuum deposition film forming method, as in the upper layer which will be mentioned later, under proper conditions for the desired characteristic properties. The thin film is formed by one of the following various methods. Glow discharge method (including ac current discharge CVD, e.g., low-frequency CVD, high-frequency CVD, and microwave CVD, and dc current CVD), ECR-CVD method, sputtering method, vacuum metallizing method, ion plating method, light CVD method, "HRCVD" method (explained below), "FOCVD" method (explained below. (According to HRCVD method, an active substance (A) formed by the decomposition of a raw material gas and the other active substance (B) formed from a substance reactive to the first active substance are caused to react with each other in a space where the film formation is accomplished. According to FOCVD method, a raw material gas and a halogen-derived gas capable of oxidizing said raw material gas are caused to react in a space where the film formation is accomplished.) A proper method should be selected according to the manufacturing conditions, the capital available, the production scale, and the characteristic properties required for the light receiving member for electrophotography. Preferable among these methods are ion plating method, HRCVD method, and FOCVD method on account of their ability to control the production conditions and to introduce aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) with ease. These methods may be used in combination with one another in the same apparatus.

The glow discharge method may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced into an evacuatable deposition chamber, and glow discharge is performed, with the gases kept at a desired presssure, so that a layer of AlSiH is formed as required on the surface of the support placed in the chamber. The raw material gases may contain a gas to supply aluminum atoms (Al), a gas to supply silicon atoms (Si), a gas to supply hydrogen atoms (H), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOc) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc) (germanium atoms (Ge) and tin atoms (Sn)), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms).

The HRCVD method may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced all together or individually into an evacuatable deposition chamber, and glow discharge is performed or the gases are heated, with the gases kept at a desired pressure, during which a first active substance (A) is formed and a second active substance (B) is introduced into the deposition chamber, so that a layer of AlSiH is formed as required on the surface of the support placed in the chamber. The raw material gases may contain a gas to supply aluminum atoms (Al), a gas to supply silicon atoms (Si), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOc) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc) (germanium atoms (Ge) and tin atoms (Sn)), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms). A second active substance (B) is formed by introducing a gas to supply hydrogen into the activation chamber. Said first active substance (a) and said second active substance (B) are individually introduced into the deposition chamber.

The FOCVD method may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced into an evacuatable deposition chamber, and chemical reactions are performed, with the gases kept at a desired pressure, so that a layer of AlSiH is formed as required on the surface of the support placed in the chamber. The raw material gases may contain a gas to supply aluminum atoms (Al), a gas to supply silicon atoms (Si), a gas to supply hydrogen atoms (H), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOc) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc) (germanium atoms (Ge) and tin atoms (SN)), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms). They may be introduced into the chamber altogether or individually, and a halogen (X) gas is introduced into the chamber separately from said raw materials gas, and these gases are subjected to chemical reaction in the deposition chamber.

The sputtering method may be performed in the following manner to form the lower layer of AlSiH. The raw material gases are introduced into a sputtering deposition chamber, and a desired gas plasma environment is formed using an aluminum target and an Si target in an inert gas of Ar or He or an Ar- or He-containing gas. The raw material gases may contain a gas to supply hydrogen atoms (H), an optional gas to supply atoms (Mc) to control image quality, an optional gas to supply atoms (CNOc) to control durability, an optional gas to supply halogen atoms (X), an optional gas to supply atoms (GSc) (germanium atoms (Ge) and tin atoms (Sn)), and an optional gas to supply atoms (Me) (at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms). If necessary, a gas to supply aluminum atoms (Al) and/or a gas to supply silicon atoms (Si) are introduced into the sputtering chamber.

The ion plating method may be performed in the same manner as the sputtering method, except that vapors of aluminum and silicon are passed through the gas plasma environment. The vapors of aluminum and silicon are produced from aluminum and silicon polycrystal or single crystal placed in a boat which is heated by resistance or electron beams (EB method).

According to the present invention, the lower layer contains aluminum atoms (Al), silicon atoms (Si), hydrogen atoms (H), optional atoms (Mc) to control image quality, atoms (CNOc) to control durability, optional halogen atoms (X), optional germanium atoms (Ge), optional tin atoms (Sn), optional alkali metal atoms, optional alkaline earth metal atoms, and optional transition metal atoms (collectively referred to as atoms (ASH) hereinafter), which are distributed in different concentrations across the layer thickness. The lower layer having such a depth profile can be formed by controlling the flow rate of the feed gas to supply atoms (ASH) according to the desired rate of change in concentration. The flow rate may be changed by operating the needle valve in the gas passage manually or by means of a motor, or by adjusting the mass flow controller manually or by means of a programmable control apparatus.

In the case where the sputtering method is used, the lower layer having such a depth profile can be formed, as in the glow discharge method, by controlling the flow rate of the feed gas to supply atoms (ASH) according to the desired rate of change in concentration. Alternatively, it is possible to use a sputtering target in which the mixing ratio of Al and Si is properly changed in the direction of layer thickness of the target.

According to the present invention, the gas to supply Al includes, for example, AlCl₃, AlBr₃, AlI₃, Al(CH₃)₂ Cl, Al(CH₃)₃, Al(OCH₃)₃, Al(C₂ H₅)₃, Al(OC₂ H₅)₃, Al(i-C₄ H₉)₃, Al(i-C₃ H₇)₃, Al(C₃ H₇)₃, and Al(OC₄ H₉)₃. These gases to supply Al may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

According to the present invention, the gas to supply Si includes, for example, gaseous or gasifiable silicohydrides (silanes) such as SiH₄, Si₂ H₆, Si₃ H₈, and Si₄ H₁₀. SiH₄ and Si₂ H₆ are preferable from the standpoint of ease of handling and the efficient supply of Si. These gases to supply Si may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

According to the present invention, the gas to supply H includes, for example, silicohydrides (silanes) such as SiH₄, Si₂ H₆, Si₃ H₈, and Si₄ H₁₀.

The amount of hydrogen atoms contained in the lower layer may be controlled by regulating the flow rate of the feed gas to supply hydrogen and/or regulating the temperature of the suppoort and/or regulating the electric power for discharge.

The lower layer may contain atoms (Mc) to control image quality, such as Group III atoms, Group V atoms, and Group VI atoms. This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce Group III atoms, a raw material to introduce Group V atoms, or a raw material to introduce Group VI atoms. The raw material to introduce Group III atoms, the raw material to introduce Group V atoms, or the raw material to introduce Group VI atoms may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions. The raw material to introduce Group III atoms, especially boron atoms, include, for example, boron hydrides such as B₂ H₆, B₅ H₉, B₅ H₁₁, B₆ H₁₀, B₆ H₁₂, and B₆ H₁₄, and boron halides such as BF₃, BCl₃, and BBr₃. Additional examples include GaCl₃, Ga(CH₃)₃, InCl₃, and TlCl₃.

The raw material to introduce Group V atoms, especially phosphorus atoms, include, for example, phosphorus hydrides such as PH₃ and P₃ H₄, and phosphorus halides such as PH₄ I, PF₃, PF₅, PCl₃, PBr₃, PBr₅, and PI₃. Other examples include AsH₃, AsF₃, AsCl₃, AsBr₃, AsF₅, SbH₃, SbF₃, SbF₅, SbCl₃, SbCl₅, BiH₃, BiCl₃, and BiBr₃.

The raw material to introduce Group VI atoms includes, for example, gaseous or gasifiable substances such as H₂ S, SF₄, SF₆, SO₂, SO₂ F₂, COS, CS₂, CH₃ SH, C₂ H₅ SH, C₄ H₄ S, (CH₃)₂ S, and S(C₂ H₅)₂ S. Other examples include gaseous or gasifiable substances such as SeH₂, SeF₆, (CH₃)₂ Se, (C₂ H₅)₂ Se, TeH₂, TeF₆, (CH₃)₂ Te, and (C₂ H₅)₂ Te.

These raw materials to introduce atoms (Mc) to control image quality may be diluted with an inert gas such as H₂, He, Ar, and Ne.

According to the present invention, the lower layer may contain atoms (CNOc) to control durability, e.g., carbon atoms (C), nitrogen atom (N), and oxygen atoms (O). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer, together with a raw material to introduce carbon atoms (C), or a raw material to introduce nitrogen atoms (N), or a raw material to introduce oxygen atoms (O). Raw materials to introduce carbon atoms (C), nitrogen atoms (N), or oxygen atoms (O) may be in the gaseous form at normal temperature and under normal pressure or may be readily gasifiable under the layer forming conditions.

A raw material gas to introduce carbon atoms (C) includes saturated hydrocarbons having 1 to 4 carbon atoms, ethylene series hydrocarbons having 2 to 4 carbon atoms, and acetylene series hydrocarbons having 2 to 3 carbon atoms.

Examples of the saturated hydrocarbons include methane (CH₄), ethane (C₂ H₆), propane (C₃ H₆), n-butane (n-C₄ H₁₀), and pentane (C₅ H₁₂). Examples of the ethylene series hydrocarbons include ethylene (C₂ H₄), propylene (C₃ H₆), butene-1 (C₄ H₈), butene-2 (C₄ H₈), isobutylene (C₄ H₈), and pentene (C₅ H₁₀). Examples of the acetylene series hydrocarbons include acetylene (C₂ H₂), methylacetylene (C₃ H₄), and butyne (C₄ H₆).

The raw material gas composed of Si, C, and H includes alkyl silicides such as Si(CH₃)₄ and Si(C₂ H₅)₄.

Additional examples include halogenated hydrocarbons such as CF₄, CCl₄, and CH₄ CF₃, which introduce carbon atoms (C) as well as halogen atoms (X).

Examples of the raw material gas to introduce nitrogen atoms (N) include nitrogen and gaseous or gasifiable nitrogen compounds (e.g., nitrides and azides) which are composed of nitrogen and hydrogen, such as ammonia (NH₃), hydrazine (H₂ NNH₂), hydrogen azide (HN₃), and ammonium azide (NH₄ N₃).

Additional examples include halogenated nitrogen compounds such as nitrogen trifluoride (F₃ N) and nitrogen tetrafluoride (F₄ N₂), which introduce nitrogen (N) atoms as well as halogen atoms (X).

Examples of the raw material gas to introduce oxygen atoms (O) include oxygen (O₂), ozone (O₃), nitrogen monoxide (NO), nitrogen dioxide (NO₂), dinitrogen oxide (N₂ O), dinitrogen trioxide (N₂ O₃), trinitrogen tetraoxide (N₃ O₄), dinitrogen pentaoxide (N₂ O₅), and nitrogen trioxide (NO₃). Additional examples include lower siloxanes such as disiloxane (H₃ SiOSiH₃) and trisiloxane (H₃ SiOSiH₂ OSiH₃) which are composed of silicon atoms (Si), oxygen atoms (O), and hydrogen atoms (H).

Examples of the gas to supply halogen atoms include halogen gases and gaseous or gasifiable halides, interhalogen compounds, and halogen-substituted silane derivatives. Additional examples include gaseous or gasifiable halogen-containing silicohydrides composed of silicon atoms and halogen atoms.

The halogen compounds that can be suitably used in the present invention include halogen gases such as fluorine, chlorine, bromine, and iodine; and interhalogen compounds such as BrF, ClF, ClF₃, BrF₅, BrF₃, IF₃, IF₇, ICl, and IBr.

Examples of the halogen-containing silicon compounds, or halogen-substituted silane compounds, include silane (SiH₄) and halogenated silicon such as Si₂ F₆, SiCl₄, and SiBr₄.

In the case where the halogen-containing silicon compound is used to form the light receiving member for electrophotography by the glow discharge method or HRCVD method, it is possible to form the lower layer composed of AlSiH containing halogen atoms on the support without using a silicohydride gas to supply silicon atoms.

In the case where the lower layer containing halogen atoms is formed by the glow discharge method or HRCVD method, a silicon halide gas is used to supply silicon atoms. The silicon halide gas may be mixed with hydrogen or a hydrogen-containing silicon compound gas to facilitate the introduction of hydrogen atoms at a desired level.

The above-mentioned gases may be used individually or in combination with one another at a desired mixing ratio.

The raw materials to form the lower layer which are used in addition to the above-mentioned halogen compounds or halogen-containing silicon compounds include gaseous or gasifiable hydrogen halides such as HF, HCl, HBr, and HI; and halogen-substituted silicohydrides such as SiH₃ F, SiH₂ F₂, SiHF₃, SiH₂ I₂, SiH₂ CL₂, SiHCl₃, SiH₂ Br₂, and SiHBr₃. Among these substances, the hydrogen-containing halides are a preferred halogen-supply gas because they supply the lower layer with halogen atoms as well as hydrogen atoms which are very effective for the control of electric or photoelectric characteristics.

The introduction of hydrogen atoms into the lower layer may also be accomplished in another method by inducing discharge in the deposition chamber containing a silicohydride such as SiH₄, Si₂ H₆, Si₃ H₈, and Si₄ H₁₀ and a silicon compound to supply silicon atoms (Si).

The amount of hydrogen atoms (H) and/or halogen atoms (X) to be introduced into the lower layer may be controlled by regulating the temperature of the support, the electric power for discharge, and the amount of raw materials for hydrogen atoms and halogen atoms to be introduced into the deposition chamber.

The lower layer may contain germanium atoms (Ge) or tin atoms (Sn). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce germanium atoms (Ge) or tin atoms (Sn) in a gaseous form. The raw material to supply germanium atoms (Ge) or the raw material to supply tin atoms (Sn) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply germanium atoms (Ge) include gaseous or gasifiable germanium hydrides such as GeH₄, Ge₂ H₆, Ge₃ H₈, and Ge₄ H₁₀. Among them, GeH₄, Ge₂ H₆, and Ge₃ H₈ are preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of germanium atoms (Ge).

Other effective raw materials to form the lower layer include gaseous or gasifiable germanium hydride-halides such as GeHF₃, GeH₂ F₂, GeH₃ F, GeHCl₃, GeH₂ Cl₂, GeH₃ Cl, GeHBr₃, GeH₂ Br₂, GeH₃ Br, GeHI₃, GeH₂ I₂, and GeH₃ I, and germanium halides such as GeF₄, GeCl₄, GeBr₄, GeI₄, GeF₂, GeCl₂, GeBr₂, and GeI₂.

The substance that can be used as a gas to supply tin atoms (Sn) include gaseous or gasifiable tin hydrides such as SnH₄, Sn₂ H₆, Sn₃ H₈, and Sn₄ H₁₀. Among them, SnH₄, Sn₂ H₆, and Sn₃ H₈ are preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of tin atoms (Sn).

Other effective raw materials to form the lower layer include gaseous or gasifiable tin hydride-halides such as SnHF₃, SnH₂ F₂, SnH₃ F, SnHCl₃, SnH₂ Cl₂, SnH₃ Cl, SnHBr₃, SnH₂ Br₂, SnH₃ Br, SnHI₃, SnH₂ I₂, and SnH₃ I, and tin halides such as SnF₄, SnCl₄, SnBr₄, SnI₄, SnF₂, SnCl₂, SnBr₂, and SnI₂.

The gas to supply GSc may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

The lower layer may contain magnesium atoms (Mg). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce magnesium atoms (Mg) in a gaseous form. The raw material to supply magnesium atoms (Mg) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply magnesium atoms (Mg) include organometallic compounds containing magnesium atoms (Mg). Bis(cyclopentadienyl)magnesium (II) complex salt (Mg(C₅ H₅)₂ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of magnesium atoms (Mg).

The gas to supply magnesium atoms (Mg) may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

The lower layer may contain copper atoms (Cu). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce copper atoms (Cu) in a gaseous form. The raw material to supply copper atoms (Cu) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply copper atoms (Cu) include organometallic compounds containing copper atoms (Cu). Copper (II) bisdimethylglyoximate Cu(C₄ H₇ N₂ O₂)₂ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of copper atoms (Cu).

The gas to supply copper atoms (Cu) may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

The lower layer may contain sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn). This is accomplished by introducing into the deposition chamber the raw materials to form the lower layer together with a raw material to introduce sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn). The raw material to supply sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply sodium atoms (Na) includes sodium amine (NaNH₂) and organometallic compounds containing sodium atoms (Na). Among them, sodium amine (NaNH₂) is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of sodium atoms (Na).

The substance that can be used as a gas to supply yttrium atoms (Y) includes organometallic compounds containing yttrium atoms (Y). Triisopropanol yttrium Y(Oi-C₃ H₇)₃ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of yttrium atoms (Y).

The substance that can be used as a gas to supply manganese atoms (Mn) includes organometallic compounds containing manganese atoms (Mn). Monomethylpentacarbonylmanganese Mn(CH₃)(CO)₅ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of manganese atoms (Mn).

The substance that can be used as a gas to supply zinc atoms (Zn) includes organometallic compounds containing zinc atoms (Zn). Diethyl zinc Zn(C₂ H₅)₂ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of zinc atoms (Zn).

The gas to supply sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn) may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

According to the present invention, the lower layer should have a thickness of 0.03˜5 μm, preferably 0.01˜1 μm, and most desirably 0.05˜0.5 μm, from the standpoint of the desired electrophotographic characteristics and economic effects.

According to the present invention, the lower layer has an interface region which is in contact with the aluminum support and contains less than 95% of the aluminum atoms contained in the aluminum support. If the interface region contains more than 95% of the aluminum atoms contained in the aluminum support, it merely functions as the support. The lower layer also has an interface which is in contact with the upper layer and contains more than 5% of the aluminum atoms contained in the lower layer. If the interface region contains less than 5% of the aluminum atoms contained in the lower layer, it merely functions as the upper layer.

In order to form the lower layer of AlSiH which has the characteristic properties to achieve the object of the present invention, it is necessary to properly establish the gas pressure in the deposition chamber and the temperature of the support.

The gas pressure in the deposition chamber should be properly selected according to the desired layer. It is usually 1×10⁻⁵ ˜10 Torr, preferably 1×10⁻⁴ ˜3 Torr, and most desirably 1×10⁻⁴ ˜1 Torr.

The temperature (Ts) of the support should be properly selected according to the desired layer. It is usually 50°˜600° C., and preferably 100°˜400° C.

In order to form the lower layer of AlSiH by the glow discharge method according to the present invention, it is necessary to properly establish the discharge electric power to be supplied to the deposition chamber according to the desired layer. It is usually 5×10⁻⁵ ˜10 W/cm³, preferably 5×10⁻⁴ ˜5 W/cm³, and most desirably 1×10⁻³ ˜2×10⁻¹ W/cm³.

The gas pressure of the deposition chamber, the temperature of the support, and the discharge electric power to be supplied to the deposition chamber mentioned above should be established interdependently so that the lower layer having the desired characteristics properties can be formed.

UPPER LAYER

According to the present invention, the upper layer is made of non-Si(H,X) so that it has the desired photoconductive characteristics.

According to the present invention, the upper layer has a layer region which is in contact with the lower layer, said layer region containing germanium atoms and/or tin atoms, and optionally atoms (M) to control conductivity and/or carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O). The upper layer has another layer region which may contain at least one kind of atoms (M) to control conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium atoms (Ge), and tin atoms (Sn). The upper layer should preferably have a layer region near the free surface which contains at least one kind of carbon atoms (C), nitrogen atoms (N), and oxygen atoms (O).

The germanium atoms (Ge) and/or tin atoms (Sn) and/or optional atoms (M) to control conductivity and/or carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O) contained in the layer region in contact with the lower layer may be uniformly distributed in the layer region or may be distributed unevenly across the layer thickness. In either cases, it is necessary that they should be uniformly distributed in the plane parallel to the surface of the support to to ensure the uniform characteristics within the plane.

In the case where the upper layer has a layer region other than that in contact with the lower layer, said layer region containing at least one kind of atoms (M) to control conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium atoms (Ge), and tin atoms (Sn), the layer region may contain atoms (M) to control conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium atoms (Ge), and tin atoms (Sn) in such a manner that they are uniformly distributed in the layer region or they are distributed unevenly across the layer thickness. In either cases, it is necessary that they should be uniformly distributed in the plane parallel to the surface of the support to to ensure the uniform characteristics within the plane.

According to the present invention, the upper layer may contain at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms. They may be contained in the entire upper layer or in a portion of the upper layer, and they may be distributed uniformly throughout the upper layer or unevenly across the layer thickness. In either cases, it is necessary that they should be uniformly distributed in the plane parallel to the surface of the support. This is important to ensure the uniform characteristics within the plane.

The upper layer may have a layer region (abbreviated as layer region (M) hereinafter) containing atoms (M) to control conductivity (abbreviated as atoms (M) hereinafter), a layer region (abbreviated as layer region (CNO) hereinafter) containing carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O) (abbreviated as atoms (CNO) hereinafter), a layer region containing at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, and a layer region (abbreviated as layer region (GS_(B)) hereinafter) containing germanium atoms (Ge) and/or tin atoms (Sn) (abbreviated as atoms (GS) hereinafter), said layer region being in contact with lower layer. These layer regions may substantially overlap one another, or they possess in common a portion of the obverse of the layer region (GS_(B)) or exist in the layer region (GS_(B)).

The layer region ("layer region (GS_(T))" for short hereinafter) containing atoms (GS), the layer region (M), the layer region (CNO), and the layer region containing at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms (excepting the layer region (GS_(B)) may be substantially the same layer region, may possess a portion of each layer region, or may possess substantially no portion of each layer region. (The layer region (GS_(B)) and the layer region (GS_(T)) will be collectively referred to as "layer region (GS)" hereinafter).

FIGS. 17 to 36 show the typical example of the across-the-layer distribution of atoms (M) contained in layer region (M), the typical example of the across-the-layer distribution of atoms (CNO) contained in layer region (CNO), the typical example of the across-the-layer distribution of atoms (GS) contained in layer region (GS), and the typical example of the across-the-layer distribution of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms contained in the layer region containing at least one kind of alkali metal atoms, alkaline earth metal atoms, and transition metal atoms, in the upper layer of the light receiving member for electrophotography according to the present invention. (These layer regions will be collectively referred to as "layer region (Y)" and these atoms, "atoms (Y)", hereinafter.)

Accordingly, FIGS. 17 to 36 show the typical examples of the across-the-layer distribution of atoms (Y) contained in layer region (Y). If layer region (M), layer region (CNO), layer region (GS), and a layer region containing at least one kind of alkali metal, alkaline earth metal, and transition metal are substantially the same, as mentioned above, the number of layer region (Y) in the upper layer is single; otherwise, it is plural.

In FIGS. 17 to 36, the abscissa represents the concentration (C) of atoms (Y) and the ordinate represents the thickness of layer region (Y), with t_(B) representing the position of the end of layer region (Y) adjoining the lower layer, t_(T) representing the position of the end of layer region (Y) adjoining the free surface. In other words, layer region (Y) containing atoms (Y) is formed from the t_(B) side to the t_(T) side.

FIG. 17 shows a first typical example of the distribution of atoms (Y) across layer thickness in layer region (Y).

The distribution shown in FIG. 17 is such that the concentration (C) of atoms (Y) gradually and continuously increases from C₁₇₁ to C₁₇₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 18 is such that the concentration (C) of atoms (Y) linearly increases from C₁₈₁ to C₁₈₂ between position t_(B) and position t₁₈₁ and then remains constant at C₁₈₃ between position t₁₈₁ and position t_(T).

The distribution shown in FIG. 19 is such that the concentration (C) of atoms (Y) remains constant at C₁₉₁ between position t_(B) and position t₁₉₁, increases gradually and continuously from C₁₉₁ to C₁₉₂ between position t₁₉₁ to position t₁₉₂, and remains constant at C₁₉₃ between position t₁₉₂ and position t_(T).

The distribution shown in FIG. 20 is such that the concentration (C) of atoms (Y) remains constant at C₂₀₁ between position t_(B) and position t₂₀₁, remains constant at C₂₀₂ between position t₂₀₁ and position t₂₀₂, and remains constant at C₂₀₃ between position t₂₀₂ and position t_(T).

The distribution shown in FIG. 21 is such that the concentration (C) of atoms (Y) remains constant at C₁₂₁ between position t_(B) and position t_(T).

The distribution shown in FIG. 22 is such that the concentration (C) of atoms (Y) remains constant at C₂₂₁ between position t_(B) and position t₂₂₁, and decreases gradually and continuously from C₂₂₂ to C₂₂₃ between position t₂₂₁ and t_(T).

The distribution shown in FIG. 23 is such that the concentration (C) of atoms (Y) decreases gradually and continuously from C₂₃₁ to C₂₃₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 24 is such that the concentration (C) of atoms (Y) remains constant at C₂₄₁ between position t_(B) and position t₂₄₁, and decreases gradually and continuously from C₂₄₂ to substantially zero between position t₂₄₁ and position t_(T). ("Substantially zero" means that the amount is lower than the detection limit. The same shall apply hereinafter.)

The distribution shown in FIG. 25 is such that the concentration (C) of atoms (Y) decreases gradually and continuously from C₂₅₁ to substantially zero between position t_(B) and position t_(T).

The distribution shown in FIG. 26 is such that the concentration (C) of atoms (Y) remains constant at C₂₆₁ between position t_(B) and position t₂₆₁, and decreases linearly from C₂₆₁ to C₂₆₂ between position t₂₆₁ and t_(T).

The distribution shown in FIG. 27 is such that the concentration (C) of atoms (Y) decreases linearly from C₂₇₁ to substantially zero between position t_(B) and position t_(T).

The distribution shown in FIG. 28 is such that the concentration (C) of atoms (Y) remains constant at C₂₈₁ between position t_(B) and position t₂₈₁ and decreases linearly from C₂₈₁ to C₂₈₂ between position t₂₈₁ and position t_(T).

The distribution shown in FIG. 29 is such that the concentration (C) of atoms (Y) decreases gradually and continuously from C₂₉₁ to C₂₉₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 30 is such that the concentration (C) of atoms (Y) remains constant at C₃₀₁ between position t_(B) and position t₃₀₁ and decreases linearly from C₃₀₂ to C₃₀₃ between position t₃₀₁ and position t_(T).

The distribution shown in FIG. 31 is such that the concentration (C) of atoms (Y) increases gradually and continuously from C₃₁₁ to C₃₁₂ between position t_(B) and position t₃₁₁ and remains constant at C₃₁₃ between position t₃₁₁ and position t_(T).

The distribution shown in FIG. 32 is such that the concentration (C) of atoms (Y) remains gradually and continuously from C₃₂₁ to C₃₂₂ between position t_(B) and position t_(T).

The distribution shown in FIG. 33 is such that the concentration (C) of atoms (Y) increases gradually from substantially zero to C₃₃₁ between position t_(B) and position t₃₃₁ and remains constant at C₃₃₂ between position t₃₃₁ and position t_(T).

The distribution shown in FIG. 34 is such that the concentration (C) of atoms (Y) increases gradually from substantially zero to C₃₄₁ between position t_(B) and position t_(T).

The distribution shown in FIG. 35 is such that the concentration (C) of atoms (Y) increases linearly from C₃₅₁ to C₃₅₂ between position t_(B) and position t₃₅₁ and remains constant at C₃₅₂ between position t₃₅₁ and position t_(T).

The distribution shown in FIG. 36 is such that the concentration (C) of atoms (Y) increases linearly from C₃₆₁ to C₃₆₂ between position t_(B) and position t_(T).

The above-mentioned atoms (M) to control conductivity include so-called impurities in the field of semiconductor. According to the present invention, they are selected from atoms belonging to Group III of the periodic table, which impart the p-type conductivity (abbreviated as "Group III atoms" hereinafter); atoms belonging to Group V of the periodic table excluding nitrogen atoms (N), which impart the n-type conductivity (abbreviated as "Group V atoms" hereinafter); and atoms belonging to Group VI of the periodic table excluding oxygen atoms (O) (abbreviated as "Group VI atoms" hereinafter).

Example of Group III atoms include B (boron), Al (aluminum), Ga (gallium), In (indium), and Tl (thallium), with B, Al, and Ga being preferable. Examples of Group V atoms include P (phosphorus), As (arsenic), Sb (antimony), and Bi (bismuth), with P and As being preferable. Examples of Group VI atoms include S (sulfur), Se (selenium), Te (tellurium), and Po (polonium), with S and Se being preferable.

According to the present invention, the layer region (M) may contain atoms (M) to control conductivity, which are Group III atoms, Group V atoms, or Group VI atoms. The atoms (M) control the conduction type and/or conductivity, and/or improve the injection of electric charge across the layer region (M) and the other layer region than the layer region (M) in the upper layer.

In the layer region (M), the content of atoms to control conductivity should be 1×10⁻³ ˜5×10⁴ atom-ppm, preferably 1×10⁻² ˜1×10⁴ atom-ppm, and most desirably 1×10⁻¹ ˜5×10³ atom-ppm. In the case where the layer region (M) contains carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O) in an amount less than 1×10³ atom-ppm, the layer region (M) should preferably contain atoms (M) to control conductivity in an amount of 1×10⁻³ ˜1×10³ atom-ppm. In the case where the layer region (M) contains carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O) in an amount more than 1×10³ atom-ppm, the layer region (M) should preferably contain atoms (M) to control conductivity in an amount of 1×10⁻¹ ˜5×10⁴ atom-ppm.

According to the present invention, the layer region (M) may contain carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O). They increase dark resistance and/or increase hardness and/or control spectral sensitivity and/or improve the adhesion between the layer region (CNO) and the other layer region than the layer region (CNO) in the upper layer.

The layer region (CNO) should contain carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O) in an amount of 1˜9×10⁵ atom-ppm, preferably 1×10¹ ˜5×10⁵ atom-ppm, and most desirably 1×10² ˜3×10⁵ atom-ppm. If it is necessary to increase dark resistance and/or increase hardness, the content should be 1×10³ ˜9×10⁵ atom-ppm; and if it is necessary to control spectral sensitivity, the content should be 1×10² ˜5×10⁵ atom-ppm.

According to the present invention, the germanium atoms (Ge) and/or tin atoms (Sn) contained in the layer region (GS) produce the effect of controlling principally the spectral sensitivity, especially improving the sensitivity for long-wavelength light in the case where long-wavelength light such as semiconductor laser is used as the light source for image exposure in the electrophotographic apparatus, and/or preventing the occurrence of interference, and/or improving th adhesion of the layer region (GS_(B)) to the lower layer, and/or improving the adhesion of the layer region (GS) to the other layer region than the layer region (GS) in the upper layer. The amount of germanium atoms (Ge) and/or tin atoms (Sn) contained in the layer region (GS) should be 1˜9.5×10⁵ atom-ppm, preferably 1×10² ˜8×10⁵ atom-ppm, and most desirably 5×10² ˜7×10⁵ atom-ppm.

According to the present invention, the hydrogen atoms (H) and/or halogen atoms (X) contained in the upper layer compensate for the unbonded hands of silicon atoms (Si), thereby improving the quality of the layer. The amount of hydrogen atoms (H) or the total amount of hydrogen atoms (H) and halogen atoms (X) contained in the upper layer should preferably be 1×10³ ˜7×10⁵ atom-ppm. The amount of halogen atoms (X) should preferably be 1˜4×10⁵ atom-ppm. In the case where the content of carbon atoms (C) and/or nitrogen atoms (N) and/or oxygen atoms (O) in the upper layer is less that 3×10⁵ atom-ppm, the amount of hydrogen atoms (H) or the total amount of hydrogen atoms (H) and halogen atoms (X) should preferably be 1×10³ ˜4×10⁵ atom-ppm. Moreover, in the case where the upper layer is made of poly-Si(H,X), the amount of hydrogen atoms (H) or the total amount of hydrogen atoms (H) and halogen atoms (X) in the upper layer should preferably be 1×10³ ˜2×10⁵ atom-ppm. In the case where the upper layer is made of A-Si(H,X), it should preferably be 1×10⁴ ˜7×10⁵ atom-ppm.

According to the present invention, the amount of at least one kind of of atoms selected from alkali metal atoms, alkaline earth metals, and transition metal atoms contained in the upper layer should be 1×10⁻³ ˜1×10⁴ atom-ppm, preferably 1×10⁻² ˜1×10³ atom-ppm, and most desirably 5×10⁻² ˜1×10² atom-ppm.

According to the present invention, the upper layer composed of non-Si (H, X) is formed by the vacuum deposition film forming method, as in the lower layer which was mentioned earlier. The preferred methods include glow discharge method, sputtering method, ion plating method, HRCVD method, and FOCVD method. These methods may be used in combination with one another in the same apparatus.

The glow discharge method may be performed in the following manner to form the upper layer of non-Si(H,X). The raw material gases are introduced into an evacuatable deposition chamber, and glow discharge is performed, with the gases kept at a desired pressure, so that a layer of non-Si(H,X) is formed as required on the lower layer which has previously been formed on the surface of the support placed in the chamber. The raw material gases are composed mainly of a gas to supply silicon atoms (Si), a gas to supply hydrogen atoms (H), and/or a gas to supply halogen atoms (X). They may also optionally contain a gas to supply atoms (M) to control conductivity and/or a gas to supply carbon atoms (C) and/or a gas to supply nitrogen atoms (N) and/or a gas to supply oxygen atoms (O) and/or a gas to supply germanium atoms (Ge) and/or a gas to supply tin atoms (Sn) and/or a gas to supply at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms.

The HRCVD method may be performed in the following manner to form the upper layer of non-Si (H, X). The raw material gases are introduced all together or individually into an activation space in an evacuatable deposition chamber, and glow discharge is performed or the gases are heated, with the gases kept at a desired pressure, during which an active substance (A) is formed. Simultaneously, a gas to supply hydrogen atoms (H) is introduced into another activation space to form an active substance (B) in the same manner. The active substance (A) and active substance (B) are introduced individually into the deposition chamber, so that a layer of non-Si(H,X) is formed on the lower layer which has previously been formed on the surface of the support placed in the chamber. The raw material gases are composed mainly of a gas to supply silicon atoms (Si) and a gas to supply halogen atoms (X). They may also optionally contain a gas to supply atoms (M) to control conductivity and/or a gas to supply carbon atoms (C) and/or a gas to supply nitrogen atoms (N) and/or a gas to supply oxygen atoms (O) and/or a gas to supply germanium atoms (Ge) and/or a gas to supply tin atoms (Sn) and/or a gas to supply at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms.

The FOCVD method may be performed in the following manner to form the upper layer of non-Si (H, X). The raw material gases are introduced all together or individually into an evacuatable deposition chamber and a halogen (X) gas is introduced separately into the deposition chamber. With the gases kept at a desired pressure, chemical reactions are carried out so that a layer of non-Si(H,X) is formed on the lower layer which has previously been formed on the surface of the support placed in the chamber. The raw material gases are composed mainly of a gas to supply silicon atoms (Si) and a gas to supply hydrogen atoms (H). They may also optionally contain a gas to supply atoms (M) to control conductivity and/or a gas to supply carbon atoms (C) and/or a gas to supply nitrogen atoms (N) and/or a gas to supply oxygen atoms (O) and/or a gas to supply germanium atoms (Ge) and/or a gas to supply tin atoms (Sn) and/or a gas to supply at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms.

The sputtering method or ion plating method may be performed to form the upper layer of non-Si (H, X) according to the known method as disclosed in, for example, Japanese Patent Laid-open No. 59342/1986.

According to the present invention, the upper layer contains atoms (M) to control conductivity, carbon atoms (C), nitrogen atoms (N), oxygen atoms (O), germanium atoms (Ge), tin atoms (Sn), and at least one kind of atoms seleced from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms (collectively referred to as "atoms (Z)" hereinafter), which are distributed in different concentrations across the layer thickness. The upper layer having such a depeth profile can be formed by controlling the flow rate of the feed gas to supply atoms (Z) into the deposition chamber according to the desired curve of changes in the case of glow discharge method, HRCVD method, and FOCVD method. The flow rate may be changed by operating the needle valve in the gas passage manually or by means of a motor, or by adjusting the mass flow controller manually or by means of a programmable control apparatus.

According to the present invention, the gas to supply Si includes, for example, gaseous or gasifiable silicohydrides (silanes) such as SiH₄, Si₂ H₆, Si₃ H₈, and Si₄ H₁₀. SiH₄ and Si₂ H₆ are preferable from the standpoint of ease of handling and the efficiency of Si supply. These gases to supply Si may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

Examples of the gas used in the invention to supply halogen atoms include halogen gases and gaseous or gasifiable halides, interhalogen compounds, and halogen-substituted silane derivatives. Additional examples include gaseous or gasifiable halogen-containing silicohydrides composed of silicon atoms (Si) and halogen atoms (X).

The halogen compounds that can be suitably used in the present invention include halogen gases such as fluorine, chlorine, bromine, and iodine; and interhalogen compounds such as BrF, ClF, ClF₃, BrF₅, BrF₃, IF₃, IF₇, ICl, and IBr.

Examples of the halogen-containing silicon compounds, or halogen-substituted silane compounds, include halogenated silicon such as SiF₄, SiF₂ F₆, SiCl₄, and SiBr₄.

In the case where the halogen-containing silicon compound is used to form the light receiving member for electrophotography by the glow discharge method or HRCVD method, it is possible to form the upper layer composed of non-Si(H,X) containing halogen atoms on the lower layer without using a silicohydride gas to supply silicon atoms.

In the case where the upper layer containing halogen atoms is formed by the glow discharge method or HRCVD method, a silicon halide gas is used to supply silicon atoms. The silicon halide gas may be mixed with hydrogen or a hydrogen-containing silicon compound gas to facilitate the introduction of hydrogen atoms (H) at a desired level.

The above-mentioned gases may be used individually or in combination with one another at a desired mixing ratio.

The raw materials to form the upper layer which are used in addition to the above-mentioned halogen compounds or halogen-containing silicon compounds include gaseous or gasifiable hydrogen halides such as HF, HCl, HBr, and HI; and halogen-substituted silicohydrides such as SiH₃ F, SiH₂ F₂, SiHF₃, SiH₂ I₂, SiH₂ Cl₂, SiHCl₃, SiH₂ Br₂, and SiHBr₃. Among these substances, the hydrogen-containing halides are a preferred halogen-supply gas because they supply the upper layer with halogen atoms (X) as well as hydrogen atoms (H) which are very effective for the control of electric or photoelectric characteristics.

The introduction of hydrogen atoms (H) into the upper layer may also be accomplished in another method by inducing discharge in the deposition chamber containing a silicohydride such as SiH₄, Si₂ H₆, Si₃ H₈, and Si₄ H₁₀ and a silicon compound to supply silicon atoms (Si).

The amount of hydrogen atoms (H) and/or halogen atoms (X) to be introduced into the upper layer may be controlled by regulating the temperature of the support, the electric power for discharge, and the amount of raw materials for hydrogen atoms (H) and halogen atoms (X) to be introduced into the deposition chamber.

The upper layer may contain atoms (M) to control conductivity, such as Group III atoms, Group V atoms, and Group VI atoms. This is accomplished by introducing into the deposition chamber the raw materials to form the upper layer together with a raw material to introduce Group III atoms, a raw material to introduce Group V atoms, or a raw material to introduce Group VI atoms. The raw material to introduce Group III atoms, the raw material to introduce Group V atoms, or the raw material to introduce Group VI atoms may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions. The raw material to introduce Group III atoms, especially boron atoms, include, for example, boron hydrides such as B₂ H₆, B₄ H₁₀, B₅ H₉, B₅ H₁₁, B₆ H₁₀, B₆ H₁₂, and B₆ H₁₄, and boron halides such as BF₃, BCl₃, and BBr₃. Additional examples include AlCl₃, GaCl₃, Ga(CH₃)₃, InCl₃, and TlCl₃.

The raw material to introduce Group V atoms, especially phosphorus atoms, include, for example, phosphorus hydrides such as PH₃ and P₃ H₄, and phosphorus halides such as PH₄ I, PF₃, PF₅, PCl₃, PCl₅, PBr₃, PBr₅, and PI₃. Other examples include AsH₃, AsF₃, AsCl₃, AsBr₃, AsF₅, SbH₃, SbF₃, SbF₅, SbCl₃, SbCl₅, BiH₃, BiCl₃, and BiBr₃.

The raw material to introduce Group VI atoms includes, for example, gaseous or gasifiable substances such as H₂ S, SF₄, SF₆, SO₂, SO₂ F₂, COS, CS₂, CH₃ SH, C₂ H₅ SH, C₄ H₄ S, (CH₃)₂ S, and S(C₂ H₅)₂ S. Other examples include gaseous or gasifiable substances such as SeH₂, SeF₆, (CH₃)₂ Se, (C₂ H₅)₂ Se, TeH₂, TeF₆, (CH₃)₂ Te, and (C₂ H₅)₂ Te.

These raw materials to introduce atoms (M) to control conductivity may be diluted with an inert gas such as H₂, He, Ar, and Ne.

According to the present invention, the upper layer may contain carbon atoms (C) or nitrogen atom (N) or oxygen atoms (O). This is accomplished by introducing into the deposition chamber the raw materials to form the upper layer, together with a raw material to introduce carbon atoms (C), or a raw material to introduce nitrogen atoms (N), or a raw material to introduce oxygen atoms (O). Raw materials to introduce carbon atoms (C), nitrogen atoms (N), or oxygen atoms (O) may be in the gaseous form at normal temperature and under normal pressure or may be readily gasifiable under the layer forming conditions.

A raw material gas to introduce carbon atoms (C) includes saturated hydrocarbons having 1 to 4 carbon atoms, ethylene series hydrocarbons having 2 to 4 carbon atoms, and acetylene series hydrocarbons having 2 to 3 carbon atoms.

Examples of the saturated hydrocarbons include methane (CH₄), ethane (C₂ H₆), propane (C₃ H₆), n-butane (n-C₄ H₁₀), and pentane (C₅ H₁₂). Examples of the ethylene series hydrocarbons include ethylene (C₂ H₄), propylene (C₃ H₆), butene-1 (C₄ H₈), butene-2 (C₄ H₈), isobutylene (C₄ H₈), and pentene (C₅ H₁₀). Examples of the acetylene series hydrocarbons include acetylene (C₂ H₂), methylacetylene (C₃ H₄), and butyne (C₄ H₆).

Additional examples include halogenated hydrocarbons such as CF₄, CCl₄, and CH₃ CF₃, which introduce carbon atoms (C) as well as halogen atoms (X).

Examples of the raw material gas to introduce nitrogen atoms (N) include nitrogen and gaseous or gasifiable nitrogen compounds (e.g., nitrides and azides) which are composed of nitrogen and hydrogen, such as ammonia (NH₃), hydrazine (H₂ NNH₂), hydrogen azide (HN₃), and ammonium azide (NH₄ N₃). Additional examples include halogenated nitrogen compounds such as nitrogen trifluoride (F₃ N) and nitrogen tetrafluoride (F₄ N₂), which introduce nitrogen atoms (N) as well as halogen atoms (X).

Examples of the raw material goes to introduce oxygen atoms (O) include oxygen (O₂), ozone (O₃), nitrogen monoxide (NO), nitrogen dioxide (NO₂), dinitrogen oxide (N₂ O), dinitrogen trioxide (N₂ O), trinitrogen tetroxide (N₃ O₄), dinitrogen pentoxide (N₂ O₅), and nitrogen trioxide (NO₃). Additional examples include lower siloxanes such as disiloxane (H₃ SiOSiH₃) and trisiloxane (H₃ SiOSiH₂ OSiH₃) which are composed of silicon atoms (Si), oxygen atoms (O), and hydrogen atoms (H).

The upper layer may contain germanium atoms (Ge) or tin atoms (Sn). This is accomplished by introducing into the deposition chamber the raw materials to form the upper layer together with a raw material to introduce germanium atoms (Ge) or tin atoms (Sn) in a gaseous form. The raw material to supply germanium atoms (Ge) or the raw material to supply tin atoms (Sn) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply germanium atoms (Ge) include gaseous or gasifiable germanium hydrides such as GeH₄, Ge₂ H₆, Ge₃ H₈, and Ge₄ H₁₀. Among them, GeH₄, Ge₂ H₆, and Ge₃ H₈ are preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of germanium atoms (Ge).

Other effective raw materials to form the upper layer include gaseous or gasifiable germanium hydride-halides such as GeHF₃, GeH₂ F₂, GeH₃ F, GeHCl₃, GeH₂ Cl₂, GeH₃ Cl, GeHBr₃, GeH₂ Br₂, GeH₃ Br, GeHI₃, GeH₂ I₂, and GeH₃ I, and germanium halides such as GeF₄, GeCl₄, GeBr₄, GeI₄, GeF₂, GeCl₂, GeBr₂, and GeI₂.

The substance that can be used as a gas to supply tin atoms (Sn) include gaseous or gasifiable tin hydrides such as SnH₄, Sn₂ H₆, Sn₃ H₈, and Sn₄ H₁₀. Among them, SnH₄, Sn₂ H₆, and Sn₃ H₈ are preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of tin atoms (Sn).

Other effective raw materials to form the upper layer include gaseous or gasifiable tin hydride-halides such as SnHF₃, SnH₂ F₂, SnH₃ F, SnHCl₃, SnH₂ Cl₂, SnH₃ Cl, SnHBr₃, SnH₂ Br₂, SnH₃ Br, SnHI₃, SnH₂ I₂, and SnH₃ I, and tin halides such as SnF₄, SnCl₄, SnBr₄, SnI₄, SnF₂, SnCl₂, SnBr₂, and SnI₂.

The upper layer may contain magnesium atoms (Mg). This is accomplished by introducing into the deposition chamber the raw materials to form the upper layer together with a raw material to introduce magnesium atoms (Mg) in a gaseous form. The raw material to supply magnesium atoms (Mg) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply magnesium atoms (Mg) include organometallic compounds containing magnesium atoms (Mg). Bis(cyclopentadienyl)magnesium (II) complex salt (Mg(C₅ H₅)₂ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of magnesium atoms (Mg).

The gas to supply magnesium atoms (Mg) may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

The upper layer may contain copper atoms (Cu). This is accomplished by introducing into the deposition chamber the raw materials to form the upper layer together with a raw material to introduce copper atoms (Cu) in a gaseous form. The raw material to supply copper atoms (Cu) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply copper atoms (Cu) include organometallic compounds containing copper atoms (Cu). Copper (II) bisdimethylglyoximate Cu(C₄ H₇ N₂ O₂)₂ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of copper atoms (Cu).

The gas to supply copper atoms (Cu) may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

The upper layer may contain sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn). This is accomplished by introducing into the deposition chamber the raw materials to form the upper layer together with a raw material to introduce sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn). The raw material to supply sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn) may be gaseous at normal temperature and under normal pressure or gasifiable under the layer forming conditions.

The substance that can be used as a gas to supply sodium atoms (Na) includes sodium amine (NaNH₂) and organometallic compounds containing sodium atoms (Na). Among them, sodium amine (NaNH₂) is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of sodium atoms (Na).

The substance that can be used as a gas to supply yttrium atoms (Y) includes organometallic compounds containing yttrium atoms (Y). Triisopropanol yttrium Y(Oi-C₃ H₇)₃ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of yttrium atoms (Y).

The substance that can be used as a gas to supply manganese atoms (Mn) includes organometallic compounds containing manganese atoms (Mn). Monomethylpentacarbonylmanganese Mn(CH₃) (CO)₅ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of manganese atoms (Mn).

The substance that can be used as a gas to supply zinc atoms (Zn) includes organometallic compounds containing zinc atoms (Zn). Diethyl zinc Zn(C₂ H₅)₂ is preferable from the standpoint of easy handling at the time of layer forming and the efficient supply of zinc atoms (Zn).

The gas to supply sodium atoms (Na) or yttrium atoms (Y) or manganese atoms (Mn) or zinc atoms (Zn) may be diluted with an inert gas such as H₂, He, Ar, and Ne, if necessary.

According to the present invention, the upper layer should have a thickness of 1˜130 μm, preferably 3˜100 μm, and most desirably 5˜60 μm, from the standpoint of the desired electrophotographic characteristics and economic effects.

In order to form the upper layer of non-Si(H,X) which has the characteristic properties to achieve the object of the present invention, it is necessary to properly establish the gas pressure in the deposition chamber and the temperature of the support.

The gas pressure in the deposition chamber should be properly selected according to the desired layer. It is usually 1×10⁻⁵ ˜10 Torr, preferably 1×10⁻⁴ ˜3 Torr, and most desirably 1×10⁻⁴ ˜1 Torr.

In the case where the upper layer is made of A-Si(H,X) as non-Si(H,X), the support temperature (Ts) should be properly selected according to the desired layer. It is usually 50°˜400° C., and preferably 100°˜300° C. In the case where the upper layer is made of poly-Si(H,X) as non-Si(H,X), the upper layer may be formed in various manners as exemplified below.

According to one method, the support temperature is established at 400°˜600° C. and a film is deposited on the support by the plasma CVD method.

According to another method, an amorphous film is formed on the support by the plasma CVD method while keeping the support temperature at 250° C., and the amorphous film is made "poly" by annealing. The annealing is accomplished by heating the support at 400°˜600° C. for about 5˜30 minutes, or irradiating the support with laser beams for about 5˜30 minutes.

In order to form the upper layer of non-Si(H,X) by the glow discharge method according to the present invention, it is necessary to properly establish the discharge electric power to be supplied to the deposition chamber according to the desired layer. It is usually 5×10⁻⁵ ˜10 W/cm³, preferably 5×10⁻⁴ ˜5 W/cm³, and most desirably 1×10⁻³ ˜2×10⁻¹ W/cm³.

The gas pressure of the deposition chamber, the temperature of the support, and the discharge electric power to be supplied to the deposition chamber mentioned above should be established interdependently so that the upper layer having the desired characteristic properties can be formed.

EFFECT OF THE INVENTION

The light receiving member for electrophotography pertaining to the present invention has a specific layer construction as mentioned above. Therefore, it is completely free of the problems involved in the conventional light receiving member for electrophotography which is made of A-Si. It exhibits outstanding electric characteristics, optical characteristics, photoconductive characteristics, image characteristics, durability, and adaptability to use environments.

According to the present invention, the lower layer contains aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) in such a manner that their distribution is uneven across the layer thickness. This improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, and also improves the structural continuity of the constituting elements in the aluminum support and the upper layer. This in turn leads to the improvement of image characteristics such as dots and coarse image and the reproduction of high-quality images having a sharp half tone and high resolution.

The above-mentioned layer structure prevents the occurrence of defective images caused by impactive mechanical pressure applied for a short time to the light receiving member for electrophotography and also prevents the peeling of the non-Si(H,X) film, improving the durability. In addition, the layer structure relieves the stress resulting from the difference of the aluminum support and the non-Si(H,X) film in the coefficient of thermal expansion, preventing the occurrence of cracking and peeling in the non-Si(H,X) film. This leads to improved yields in production.

According to the present invention, the upper layer has a layer region in contact with the lower layer, said layer region containing either germanium atoms or tin atoms. This improves the adhesion of the upper layer to the lower layer and prevents occurrence of defective images and the peeling of the film of non-Si(H,X), which leads to the improvement of durability. In addition, it effectively absorbs lights of long wavelengths (such as semiconductor laser) which are not absorbed during their passage through the surface layer of the upper layer to the lower layer. Thus it prevents the occurrence of interference resulting from reflection at the interface between the upper layer and the lower layer and/or at the surface of the support. This leads to a distinct improvement of image quality.

According to the present invention, the lower layer contains aluminum atoms (Al), silicon atoms (Si), hydrogen atoms (H), and atoms (Mc) to control image quality. This improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, and also improves the transferability of electric charge (photocarrier) in the lower layer. This in turn leads to the improvement of image characteristics such as coarse image and the reproduction of high-quality images having a sharp half tone and high resolution.

According to the present invention, the lower layer also contains halogen atoms which compensate for the dangling bonds of silicon atoms and aluminum atoms, thereby providing a structurally stable state. This, in combination with the effect produced by the unevenly distributed silicon atoms, aluminum atoms, and hydrogen atoms, greatly improves the image characteristics such as coarse image and dots.

According to the present invention, the lower layer also contains at least either of germanium atoms (Ge) and tin atoms (Sn). This improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, the adhesion, and the transferability of electric charge in the lower layer. This in turn leads to the remarkable improvement in the characteristics and durability of a light receiving member.

According to the present invention, the lower layer also contains at least one kind of atoms selected from alkali metal atoms, alkaline earth metal atoms, and transition metal atoms. This contributes to the dispersion of hydrogen atoms and halogen atoms contained in the lower layer, and also prevents the peeling of film which occurs after use for a long time as the result of aggregation of hydrogen atoms and/or halogen atoms. This also improves the injection of electric charge (photocarrier) across the aluminum support and the upper layer, the adhesion, and the transferability of electric charge in the lower layer. This in turn leads to the remarkable improvement in image characteristics and durability and also to stable production of the light receiving member having a stable quality.

PREFERRED EMBODIMENT OF THE INVENTION

The invention will be described in more detail with reference to the following examples, which are not intended to limit the scope of the invention.

EXAMPLE 1

A light receiving member for electrophotography pertaining to the present invention was produced by the high-frequency ("RF" for short hereinafter) glow discharge decomposition method.

FIG. 37 shows the apparatus for producing the light receiving member for electrophotography by the RF glow discharge decomposition method, said apparatus being composed of the raw material gas supply unit 1020 and the deposition unit 1000.

In FIG. 37, there are shown gas cylinders 1071, 1072, 1073, 1074, 1075, 1076, and 1077, and a closed vessel 1078. They contain raw material gases to form the layers according to the invention. The cylinder 1071 contains SiH₄ gas (99.99% pure); the cylinder 1072 contains H₂ gas (99.9999% pure); the cylinder 1073 contains CH₄ gas (99.999% pure); the cylinder 1074 contains GeH₄ gas (99.999% pure); the cylinder 1075 contains B₂ H₆ gas (99.999% pure) diluted with H₂ gas ("B₂ H₆ /H₂ " for short hereinafter); the cylinder 1076 contains NO gas (99.9% pure); the cylinder 1077 contains He gas (99.999% pure); and the closed vessel 1078 contains AlCl₃ (99.99% pure).

In FIG. 37, there is shown the cylindrical aluminum support 1005, 108 mm in outside diameter, having the mirror-finished surface.

With the valves 1051˜1057 of the cylinders 1071˜1077, the inlet valves 1031˜1037, and the leak valve 1015 of the deposition chamber 1001 closed, and with the outlet valves 1041˜1047 and the auxiliary valve 1018 open, the main valve 1016 was opened and the deposition chamber 1001 and the gas piping were evacuated by a vacuum pump (not shown).

When the vacuum gauge 1017 registered 1×10⁻³ Torr, the auxiliary valve 1018 and the outlet valves 1041˜1047 were closed.

After that, the valves 1051˜1057 were opened to introduce SiH₄ gas from the cylinder 1071, H₂ gas from the cylinder 1072, CH₄ gas from the cylinder 1073, GeH₄ gas from the cylinder 1074, B₂ H₆ /H₂ gas from the cylinder 1075, NO gas from the cylinder 1076, and He gas from the cylinder 1077. The pressure of each gas was maintained at 2 kg/cm² by means of the pressure regulators 1061˜1067.

Then, the inlet valves 1031˜1037 were slowly opened to introduce the respective gases into the mass flow controller 1021˜1027. Since He gas from the cylinder 1077 passes through the closed vessel containing AlCl₃ 1078, the AlCl₃ gas diluted with He gas ("AlCl₃ /He" for short hereinafter) is introduced into the mass flow controller 1027.

The cylindrical aluminum support 1005 placed in the deposition chamber 1001 was heated to 250° C. by the heater 1014.

Now that the preparation for film forming was completed as mentioned above, the lower layer and upper layer were formed on the cylindrical aluminum support 1005.

The lower layer was formed as follows: The outlet valves 1041, 1042, and 1047, and the auxiliary valve 1018 were opened slowly to introduce SiH₄ gas, H₂ gas, and AlCl₃ /He gas into the deposition chamber 1001 through the gas discharge hole 1009 on the gas introduction pipe 1008. The mass flow controllers 1021, 1022, and 1027 were adjusted so that the flow rate of SiH₄ gas was 50 SCCM, the flow rate of H₂ gas was 10 SCCM, and the flow rate of AlCl₃ /He gas was 120 SCCM. The pressure in the deposition chamber 1001 was maintained t 0.4 Torr as indicated by the vacuum gauge 1017 by adjusting the opening of the main valve 1016. Then, the output of the RF power source (not shown) was set to 5 mW/cm³, and RF power was applied to the deposition chamber 1001 through the high-frequency matching box 1012 in order to bring about RF glow discharge, thereby forming the lower layer on the aluminum support. While the lower layer was being formed, the mass flow controllers 1021, 1022, and 1027 were controlled so that the flow rate of SiH₄ gas remained constant at 50 SCCM, the flow rate of H₂ gas increased from 10 SCCM to 200 SCCM at a constant ratio, and the flow rate of AlCl₃ /He decreased from 120 SCCM to 40 SCCM at a constant ratio. When the lower layer became 0.05 μm thick, the RF glow discharge was suspended, and the outlet valves 1041, 1042, and 1047 and the auxiliary valve 1018 were closed to stop the gases from flowing into the deposition chamber 1001. The formation of the lower layer was completed.

The first layer region of the upper layer was formed as follows: The outlet valves 1041, 1042, and 1044 and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas, H₂ gas, and GeJ₄ gas into the deposition chamber 1001 through the gas discharge hole 1009 on the gas introduction pipe 1008. The mass flow controllers 1021, 1022, and 1024 were ajusted so that the flow rate of SiH₄ gas was 100 SCCM, the flow rate of H₂ gas was 100 SCCM, and the flow rate of GeH₄ gas was 50 SCCM. The pressure in the deposition chamber 1001 was maintained at 0.4 Torr as indicated by the vacuum gauge 1017 by adjusting the opening of the main valve 1016. Then, the output of the RF power source (not shown) was set to 10 mW/cm³, and RF power was applied to the deposition chamber 1001 through the high-frequency matching box 1012 in order to bring about RF glow discharge, thereby forming the first layer region of the upper layer on the lower layer. While the first layer region of the upper layer was being made, the mass flow controllers 1021, 1022, and 1024 were adjusted so that the flow rate of SiH₄ gas was 100 SCCM, the flow rate of H₂ gas was constant at 100 SCCM, and the flow rate of GeH₄ gas was constant at 50 SCCM for 0.7 μm at the lower layer side and the flow rate of GeH₄ decreased from 50 SCCM to 0 SCCM at a constant ratio for 0.3 μm at the obverse side. When the first layer region of the upper layer became 1 μm thick, the RF glow discharge was suspended, and the outlet valves 1041, 1042, and 1044 and the auxiliary valve 1018 were closed to stop the gases from flowing into the deposition chamber 1001. The formation of the first layer region of the upper layer was completed.

The second layer region of the upper layer was formed as follows: The outlet valves 1041, 1042, 1045 and 1046 and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas, H₂ gas, B₂ H₆ /H₂ gas, and NO gas into the deposition chamber 1001 through the gas discharge hole 1009 on the gas introduction pipe 1008. The mass flow controllers 1021, 1022, 1025, and 1026 were adjusted so that the flow rate of SiH₄ gas was 100 SCCM, the flow rate of H₂ gas was 100 SCCM, the flow rate of B₂ H₆ /H₂ gas was 800 ppm for SiH₄ gas, and the flow rate of NO gas was 10 SCCM. The pressure in the deposition chamber 1001 was maintained at 0.4 Torr as indicated by the vacuum gauge 1017 by adjusting the opening of the main valve 1016. Then, the output of the RF power source (not shown) was set to 10 mW/cm³, and RF power was applied to the deposition chamber 1001 through the high-frequency matching box 1012 in order to bring about RF glow discharge, thereby forming the second layer region on the first layer region of the upper layer. While the second layer region of the upper layer was being made, the mass flow controllers 1021, 1022, 1025, and 1026 were adjusted so that the flow rate of SiH₄ gas was 100 SCCM, the flow rate of H₂ gas was at 100 SCCM, the flow rate of B₂ H₆ /H₂ gas was constant at 800 ppm for SiH₄ gas, and the flow rate of NO gas was constant at 10 SCCM for 2 μm at the lower layer side and the flow rate of NO gas decreased from 10 SCCM to 0 SCCM at a constant ratio for 1 μm at the obverse side. When the second layer region of the upper layer became 3 μm thick, the RF glow discharge was suspended, and the outlet valves 1041, 1042, 1045, and 1043 and the auxiliary valve 1018 were closed to stop the gases from flowing into the deposition chamber 1001. The formation of the second layer region of the upper layer was completed.

The third layer region of the upper layer was formed as follows: The outlet valves 1041 and 1042 and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas and H₂ gas into the deposition chamber 1001 through the gas discharge hole 1009 on the gas introduction pipe 1008. The mass flow controllers 1021 and 1022 were adjusted so that the flow rate of SiH₄ gas was 300 SCCM and the flow rate of H₂ gas was 300 SCCM. The pressure in the deposition chamber 1001 was maintained at 0.5 Torr as indicated by the vacuum gauge 1017 by adjusting the opening of the main valve 1016. then, the output of the RF power source (not shown) was set to 15 mW/cm³, and RF power was applied to the deposition chamber 1001 through the high-frequency matching box 1012 in order to bring about RF glow discharge, thereby forming the third layer region of the upper layer on the second layer region of the upper layer. When the third layer region of the upper layer became 20 μ m thick, the RF glow discharge was suspended, and the outlet valves 1041 and 1042 and the auxiliary valve 1018 were closed to stop the gases from flowing into the deposition chamber 1001. The formation of the third layer region of the upper layer was completed.

The fourth layer region of the upper layer was formed as follows: The outlet valves 1041 and 1043 and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas and CH₄ gas into the deposition chamber 1001 through the gas discharge hole 1009 on the gas introduction pipe 1008. The mass flow controllers 1021 and 1023 were adjusted so that the flow rate of SiH₄ gas was 50 SCCM and the flow rate of CH₄ gas was 500 SCCM. The pressure in the deposition chamber 1001 was maintained at 0.4 Torr as indicated by the vacuum gauge 1017 by adjusting the opening of the main valve 1016. Then, the output of the RF power source (not shown) was set to 10 mW/cm³, and RF power was applied to the deposition chamber 1001 through the high-frequency matching box 1012 in order to bring about RF glow discharge, thereby forming the fourth layer region of the upper layer on the third layer region of the upper layer. When the fourth layer region of the upper layer became 0.5 μ m thick, the RF glow discharge was suspended, and the outlet valves 1041 and 1043 and the auxiliary valve 1018 were closed to stop the gases from flowing into the deposition chamber 1001. The formation of the fourth layer region of the upper layer was completed.

Table 1 shows the conditions under which the light receiving member for electrophotography was prepared as mentioned above.

It goes without saying that all the valves were kept closed completely except those for the gases necessary to form the individual layers. Before the switching of the gas, the system was completely evacuated, with the outlet valves 1041˜1047 closed and the main valve and the auxiliary valve 1018 open, to prevent the gases from remaining in the deposition chamber 1001 and the piping leading from the outlet valves 1041˜1047 to the deposition chamber 1001.

While the layer was being formed, the cylindrical aluminum support 1005 was turned at a prescribed speed by a drive unit (not shown) to ensure uniform deposition.

COMPARATIVE EXAMPLE 1

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that H₂ gas was not used when the lower layer was formed. Table 2 shows the conditions under which the light receiving member for electrophotography was prepared.

The light receiving members for electrophotography prepared in Example 1 and Comparative Example 1 were evaluated for electrophotographic characteristics under various conditions by running on an experimental electrophotographic apparatus which is a remodeled version of Canon's duplicating machine NP-7550.

The light receiving member for electrophotography produced in Example 1 provided images of very high quality which are free of interference fringes, especially in the case where the light source is long wavelength light such as semiconductor laser.

The light receiving member for electrophotography produced in Example 1 gave less than three-quarters the number of dots (especially those smaller than 0.1 mm in diameter) in the case of the light receiving member for electrophotography produced in Comparative Example 1. In addition, the degree of coarseness was evaluated by measuring the dispersion of the image density at 100 points in a circular region 0.05 mm in diameter. The light receiving member for electrophotography produced in Example 1 gave less than two-thirds the dispersion in the case of the light receiving member for electrophotography produced in Comparative Example . It was also visually recognized that the one in Example 1 was superior to the one in Comparative Example 1.

The light receiving member for electrophotography was also tested for whether it gives defective images or it suffers the peeling of the light receiving layer when it is subjected to an impactive mechanical pressure for a comparatively short time. This test was carried out by dropping stainless steel balls 3.5 mm in diameter onto the surface of the light receiving member for electrophotography from a height of 30 cm. The probability that cracking occurs in the light receiving layer was measured. The light receiving member for electrophotography in Example 1 gave a probability smaller than three-fifths that of the light receiving member for electrophotography in Comparative Example 1.

As mentioned above, the light receiving member for electrophotography in Example 1 was superior to the light receiving member for electrophotography in Comparative Example 1.

EXAMPLE 2

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the flow rate of AlCl₃ /He gas for the lower layer was changed in a different manner. The conditions for production are shown in Table 3. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 3

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the CH₄ gas was not used for the upper layer. The conditions for production are shown in Table 4. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 4

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the H₂ gas was replaced by He gas (99.9999% pure), and SiH₄ gas (99.999% pure) (not shown) and N₂ gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 5. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 5

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the H₂ gas was replaced by Ar gas (99.9999% pure) and the CH₄ gas was replaced by NH₃ gas (99.999% pure) (not shown) for the upper layer. The conditions for production are shown in Table 6. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 6

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that PH₃ /H₂ gas (99.999% pure) was additionally used for the upper layer. The conditions for production are shown in Table 7. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 7

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the NO gas cylinder was replaced by an SiF₄ gas (99.999% pure) cylinder and SiF₄ gas and PH₃ /H₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 8. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 8

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that PH₃ /H₂ gas (not shown) and N₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 9. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 9

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cylinder, the CH₄ gas was replaced by C₂ H₂ gas, and AlCl₃ /He gas was additionally used for the upper layer. The conditions for production are shown in Table 10. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 10

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the B₂ H₆ gas was replaced by PH₃ /H₂ gas for the upper layer. The conditions for production are shown in Table 11. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 11

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the CH₄ gas was replaced by NH₃ gas, and SiH₄ gas (99.999% pure) was additionally used for the upper layer. The conditions for production are shown in Table 12. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 12

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the NO gas cylinder was replaced by an SiH₄ gas cylinder, and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 13. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 13

A light receiving member for electrophotography was produced in the same manner as in Example 9 except that PH₃ /H₂ gas and Si₂ H₆ gas (99.99% pure) were additionally used for the upper layer. The conditions for production are shown in Table 14. According to the evaluation carried out in the same manner as in Example 9, it has improved performance for dots, coarseness, and layer peeling as in Example 9.

EXAMPLE 14

A light receiving member for electrophotography was produced in the same manner as in Example 11 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 15. According to the evaluation carried out in the same manner as in Example 11, it has improved performance for dots, coarseness, and layer peeling as in Example 11.

EXAMPLE 15

A light receiving member for electrophotography was produced in the same manner as in Example 1 under the conditions shown in Table 16. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 16

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 80 mm. The conditions for production are shown in Table 17. According to the evaluation carried out in the same manner as in Example 1, except that a remodeled version of Canon's duplicating machine NP-9030 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 17

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 60 mm. The conditions for production are shown in Table 18. According to the evaluation carried out in the same manner as in Example 1, except that a remodeled version of Canon's duplicating machine NP-150Z was used, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 18

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 30 mm. The conditions for production are shown in Table 19. According to the evaluation carried out in the same manner as in Example 1, except that a remodeled version of Canon's duplicating machine FC-5 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 19

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 15 mm. The conditions for production are shown in Table 20. According to the evaluation carried out in the same manner as in Example 1, except that an experimentally constructed electrophotographic apparatus was used, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 20

A light receiving member for electrophotography was produced in the same manner as in Example 16 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support lathed by a diamond point tool, which has a cross section as shown in FIG. 38, in which a=25 μm and b=0.8 μm. According to the evaluation carried out in the same manner as in Example 16, it has improved performance for dots, coarseness, and layer peeling as in Example 16.

EXAMPLE 21

A light receiving member for electrophotography was produced in the same manner as in Example 16 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm. According to the evaluation carried out in the same manner as in Example 16, it has improved performance for dots, coarseness, and layer peeling as in Example 16.

EXAMPLE 22

A light receiving member for electrophotography was produced in the same manner as in Example 9 under the conditions shown in Table 21, except that the cylindrical aluminum support was kept at 500° C. and the upper layer was composed of poly-Si(H,X). According to the evaluation carried out in the same manner as in Example 9, it has improved performance for dots, coarseness, and layer peeling as in Example 9.

EXAMPLE 23

A light receiving member for electrophotography pertaining to the present invention was produced by the microwave glow discharge decomposition method.

FIG. 41 shows the apparatus for producing the light receiving member for electrophotography by the microwave glow discharge decomposition method. This apparatus differs from the apparatus for the RF glow discharge decomposition method as shown in FIG. 37 in that the deposition unit 1000 is replaced by the deposition unit 1100 for the microwave glow discharge decomposition method as shown in FIG. 40.

In FIG. 40, there is shown the cylindrical aluminum support 1107, 108 mm in outside diameter, having the mirror-finished surface.

As in Example 1, the deposition chamber 1101 and the gas piping were evacuated until the pressure in the deposition chamber 1101 reached 5×10⁻⁶ Torr. Subsequently, the gases were introduced into the mass flow controllers 1021˜1027 as in Example 1, except that the NO gas cylinder was replaced by an SiF₄ gas cylinder.

The cylindrical aluminum support 1107 placed in the deposition chamber 1001 was heated to 250° C. by a heater (not shown).

Now that the preparation for film forming was completed as mentioned above, the lower layer and upper layer were formed on the cylindrical aluminum support 1107.

The lower layer was formed as follows: The outlet valves 1041, 1042, and 1047, and the auxiliary valve 1018 were opened slowly to introduce SiH₄ gas, H₂ gas, and AlCl₃ /He gas into the plasma generation region 1109 through the gas discharge hole (not shown) on the gas introduction pipe 1110. The mass flow controllers 1021, 1022, and 1027 were adjusted so that the flow rate of SiH₄ gas was 150 SCCM, the flow rate of H₂ gas was 20 SCCM, and the flow rate of AlCl₃ /He gas was 400 SCCM. The pressure in the deposition chamber 1101 was maintained at 0.6 mTorr as indicated by the vacuum gauge (not shown) by adjusting the opening of the main valve (not shown). Then, the output of the microwave power source (not shown) was set to 0.5 W/cm³, and microwave power was applied to the plasma generation region 1109 through the waveguide 1103 and the dielectric window 1102 in order to bring about microwave glow discharge, thereby forming the lower layer on the aluminum support 1107. While the lower layer was being formed, the mass flow controllers 1021, 1022, and 1027 were adjusted so that the flow rate of SiH₄ gas remained constant at 150 SCCM, the flow rate of H₂ gas increased from 20 SCCM to 500 SCCM at a constant ratio, and the flow rate of AlCl₃ /He decreased from 400 SCCM to 80 SCCM at a constant ratio for the support side (0.01 μm) and the flow rate of AlCl₃ /He decreased from 80 SCCM to 50 SCCM at a constant ratio for the upper layer side (0.01 μm). When the lower layer became 0.02 μm thick, the microwave glow discharge was suspended, and the outlet valves 1041, 1042, and 1047 and the auxiliary valve 1018 were closed to stop the gases from flowing into the plasma generation region 1109. The formation of the lower layer was completed.

The first layer region of the upper layer was formed as follows: The outlet valves 1041, 1042, 1044, 1045, and 1046, and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas, H₂ gas, GeH₄ gas, B₂ H₆ /H₂ gas, and SiF₄ gas into the plasma generation space 1109 through the gas discharge hole (not shown) on the gas introduction pipe 1110. The mass flow controllers 1021, 1022, 1024, 1025, and 1026 were adjusted so that the flow rate of SiH₄ gas was 500 SCCM, the flow rate of H₂ gas was 300 SCCM, the flow rate of GeH₄ gas was 100 SCCM, the flow rate of B₂ H₆ /H₂ gas was 1000 ppm for SiF₄ gas, and the flow rate of SiF₄ gas was 20 SCCM. The pressure in the deposition chamber 1101 was maintained at 0.4 mTorr. Then, the output of the microwave power source (not shown) was set to 0.5 W/cm³, and microwave power was applied to bring about microwave glow discharge in the plasma generation chamber 1109, as in the case of the lower layer, thereby forming the first layer region (1 μm thick) of the upper layer on the lower layer.

The second layer region of the upper layer was formed as follows: The outlet valves 1041, 1042, 1045, and 1046 and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas, H₂ gas, B₂ H₆ /H₂ gas, and SiF₄ gas into the plasma generation space 1109 through the gas discharge hole (not shown) on the gas introduction pipe 1110. The mass flow controllers 1021, 1022, 1025, and 1026 were adjusted so that the flow rate of SiH₄ gas was 500 SCCM, the flow rate of H₂ gas was 300 SCCM, the flow rate of B₂ H₆ /H₂ gas was 1000 ppm for SiH₄ gas, and the flow rate of SiF₄ gas was 20 SCCM. The pressure in the deposition chamber 1101 was maintained at 0.4 mTorr. Then, the output of the microwave power source (not shown) was set to 0.5 W/cm³, and microwave power was applied to bring about microwave glow discharge in the plasma generation region 1109, thereby forming the second layer region (3 μm thick) on the first layer region of the upper layer.

The third layer region of the upper layer was formed as follows: The outlet valves 1041, 1042, and 1046 and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas, H₂ gas, and SiF₄ gas into the plasma generation space 1109 through the gas discharge hole (not shown) on the as introduction pipe 1110. The mass flow controllers 1021, 1022, and 1026 were adjusted so that the flow rate of SiH₄ gas was 700 SCCM, the flow rate of H₂ gas was 500 SCCM, and the flow rate of SiF₄ gas was 30 SCCM. The pressure in the deposition chamber 1101 was maintained at 0.5 mTorr. Then, the output of the microwave power source (not shown) was set to 0.5 W/cm³, and microwave power was applied to bring about microwave glow discharge in the plasma generation region 1109, thereby forming the third layer region (20 μm thick) on the second layer region of the upper layer.

The fourth layer region of the upper layer was formed as follows: The outlet valves 1041 and 1043 and the auxiliary valve 1018 were slowly opened to introduce SiH₄ gas and CH₄ gas into the plasma generation space 1109 through the gas discharge hole (not shown) on the gas introduction pipe 1110. The mass flow controllers 1021 and 1023 were adjusted so that the flow rate of SiH₄ gas was 150 SCCM and the flow rate of CH₄ gas was 500 SCCM. The pressure in the deposition chamber 1101 was maintained at 0.3 mTorr. Then, the output of the microwave power source (not shown) was set to 0.5 W/cm³, and microwave power was applied to bring about microwave glow discharge in the plasma generation region 1109, thereby forming the fourth layer region (1 μm thick) on the third layer region of the upper layer.

Table 22 shows the conditions under which the light receiving member for electrophotography was prepared as mentioned above.

According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 24

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cylinder, and the CH₄ gas was replaced by C₂ H₂ gas for the upper layer. The conditions for production are shown in Table 23. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 25

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown) for the upper layer. The conditions for production are shown in Table 24. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 26

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the NO gas cylinder was replaced by a NH₃ gas cylinder, the CH₄ gas was replaced by NH₃ gas, and SnH₄ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 25. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 27

A light receiving member for electrophotography was produced in the same manner as in Example 6 except that SiF₄ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 26. According to the evaluation carried out in the same manner as in Example 6, it has improved performance for dots, coarseness, and layer peeling as in Example 6.

EXAMPLE 28

A light receiving member for electrophotography was produced in the same manner as in Example 9 under the conditions shown in Table 27. According to the evaluation carried out in the same manner as in Example 9, it has improved performance for dots, coarseness, and layer peeling as in Example 9.

EXAMPLE 29

A light receiving member for electrophotography was produced in the same manner as in Example 11 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 28. According to the evaluation carried out in the same manner as in Example 11, it has improved performance for dots, coarseness, and layer peeling as in Example 11.

EXAMPLE 30

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm, and that the H₂ gas was replaced by He gas (not shown) and N₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 29. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 31

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that AlCl₃ /He gas and SiF₄ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 30. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 32

A light receiving member for electrophotography was produced in the same manner as in Example 6 except that AlCl₃ /He gas, NO gas, and SiF₄ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 31. According to the evaluation carried out in the same manner as in Example 6, it has improved performance for dots, coarseness, and layer peeling as in Example 6.

EXAMPLE 33

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and the CH₄ gas was replaced by C₂ H₂ gas for the upper layer. The conditions for production are shown in Table 32. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 34

A light receiving member for electrophotography was produced in the same manner as in Example 1 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and the CH₄ gas was replaced by C₂ H₂ gas and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown) for the upper layer. The conditions for production are shown in Table 33. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

EXAMPLE 35

A light receiving member for electrophotography was produced in the same manner as in Example 6 except that AlCl₃ /He gas, SiF₄ gas (not shown), and H₂ S/He gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 34. According to the evaluation carried out in the same manner as in Example 6, it has improved performance for dots, coarseness, and layer peeling as in Example 6.

EXAMPLE 36

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that B₂ H₆ gas was additionally used when the lower layer was formed. The conditions for production are shown in Table 35.

COMPARATIVE EXAMPLE 2

A light receiving member for electrophotography was prepared in the same manner as in Example 36, except that B₂ H₆ /H₂ gas and H₂ gas were not used when the lower layer was formed. The conditions for production are shown in Table 36.

The light receiving members for electrophotography prepared in Example 36 and Comparative Example 2 were evaluated for electrophotographic characteristics under various conditions by running them on an experimental electrophotographic apparatus which is a remodeled version a Canon's duplicating machine NP-7550.

The light receiving member for electrophotography produced in Example 36 provided images of very high quality which are free of interference fringes, especially in the case where the light source is long wavelength light such as semiconductor laser.

The light receiving member for electrophotography produced in Example 36 gave less than three-quarters the number of dots (especially those smaller than 0.1 mm in diameter) in the case of the light receiving member for electrophotography produced in Comparative Example 2. In addition, the degree of coarseness was evaluated by measuring the dispersion of the image density at 100 points in a circular region 0.05 mm in diameter. The light receiving member for electrophotography produced in Example 36 gave less than a half the dispersion in the case of the light receiving member for electrophotography produced in Comparative Example 2. It was also visually recognized that the one in Example 36 was superior to the one in Comparative Example 2.

The light receiving member for electrophotography was also tested for whether it gives defective images or it suffers the peeling of the light receiving layer when it is subjected to an impactive mechanical pressure for a comparatively short time. This test was carried out by dropping stainless steel balls 3.5 mm in diameter onto the surface of the light receiving member for electrophotography from a height of 30 cm. The probability that cracking occurs in the light receiving layer was measured. The light receiving member for electrophotography in Example 36 gave a probability smaller than three-fifths that of the light receiving member for electrophotography in Comparative Example 2.

As mentioned above, the light receiving member for electrophotography in Example 36 was superior to the light receiving member for electrophotography in Comparative Example 2.

EXAMPLE 37

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the flow rate of AlCl₃ /He gas for the lower layer was changed in a different manner. The conditions for production are shown in Table 37. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 38

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that H₂ S/He gas (not shown) was used for the lower layer and the CH₄ gas was not used for the upper layer. The conditions for production are shown in Table 36. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 39

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the H₂ gas was replaced by He gas (99.9999% pure) (not shown) and SiF₄ gas (99.999% pure) and N₂ gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 39. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 40

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the H₂ gas was replaced by Ar gas (99.9999% pure) (not shown) and the CH₄ gas was replaced by NH₃ gas (99.999% pure) for the upper layer. The conditions for production are shown in Table 40. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 41

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that PH₃ /H₂ gas (99.999% pure) was additionally used for the upper layer. The conditions for production are shown in Table 41. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 42

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the NO gas cylinder was replaced by an SiF₄ gas cylinder, and the B₂ H₆ gas was replaced by PH₃ /H₂ gas (note shown) for the lower layer and SiF₄ gas and PH₃ /H₂ gas (note shown) were additionally used for the upper layer. The conditions for production are shown in Table 42. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 43

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that H₂ S/He gas was additionally used for the lower layer and PH₃ /H₂ gas (not shown) and N₂ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 43. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 44

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cyliner, and the CH₄ gas was replaced by C₂ H₂ gas and AlCl₃ /He gas was additionally used for the upper layer. The conditions for production are shown in Table 44. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 45

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the B₂ H₆ gas was replaced by PH₃ /H₂ gas (not shown) and H₂ S/He gas was additionally used for the lower layer. The conditions for production are shown in Table 45. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 46

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the CH₄ gas was replaced by NH₃ gas (not shown) and SnH₄ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 46. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 47

A light receiving member for electrophotography was produced in the same manner as in Example 41 except that the NO gas cylinder was replaced by an SiF₄ gas cylinder, and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 47. According to the evaluation carried out in the same manner as in Example 41, it has improved performance for dots, coarseness, and layer peeling as in Example 41.

EXAMPLE 48

A light receiving member for electrophotography was produced in the same manner as in Example 44 except that the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown) and H₂ S/He gas was additionally used for the lower layer, and PH₃ /H₂ gas (not shown) and Si₂ H₆ gas (99.99% pure) were additionally used for the upper layer. The conditions for production are shown in Table 48. According to the evaluation carried out in the same manner as in Example 44, it has improved performance for dots, coarseness, and layer peeling as in Example 44.

EXAMPLE 49

A light receiving member for electrophotography was produced in the same manner as in Example 46 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 49. According to the evaluation carried out in the same manner as in Example 46, it has improved performance for dots, coarseness, and layer peeling as in Example 46.

EXAMPLE 50

A light receiving member for electrophotography was produced in the same manner as in Example 36 under the conditions shown in Table 50. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 51

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 80 mm. The conditions for production are shown in Table 51. According to the evaluation carried out in the same manner as in Example 36, except that a remodeled version of Canon's duplicating machine NP-9030 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 52

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 60 mm. The conditions for production are shown in Table 52. According to the evaluation carried out in the same manner as in Example 36, except that a remodeled version of Canon's duplicating machine NP-150Z was used, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 53

A light receiving member for electrophotography was produced in the same manner as in Example 24 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 30 mm. The conditions for production are shown in Table 53. According to the evaluation carried out in the same manner as in Example 36, except that a remodeled version of Canon's duplicating machine FC-5 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 54

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 15 mm. The conditions for production are shown in Table 54. According to the evaluation carried out in the same manner as in Example 36, except that an experimentally constructed electrophotographic apparatus was used, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 55

A light receiving member for electrophotography was produced in the same manner as in Example 51 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support lathed by a diamond point tool, which has a cross section as shown in FIG. 38, in which a=25 μm and b=0.8 μm. According to the evaluation carried out in the same manner as in Example 51, it has improved performance for dots, coarseness, and layer peeling as in Example 51.

EXAMPLE 56

A light receiving member for electrophotography was produced in the same manner as in Example 51 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm. According to the evaluation carried out in the same manner as in Example 51, it has improved performance for dots, coarseness, and layer peeling as in Example 51.

EXAMPLE 57

A light receiving member for electrophotography was produced in the same manner as in Example 44 except that the cylindrical aluminum support was kept at 500° C. and the upper layer was composed of poly-Si(H,X). The conditions for production are shown in Table 55. According to the evaluation carried out in the same manner as in Example 44, it has improved performance for dots, coarseness, and layer peeling as in Example 44.

EXAMPLE 58

A light receiving member for electrophotography was prepared by the microwave glow discharge decomposition method in the same manner as in Example 23, except that H₂ S gas and B₂ H₆ gas were additionally used when the lower layer was formed. The conditions for production are shown in Table 56. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 59

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cylinder, and the CH₄ gas replaced by C₂ H₂ gas and AlCl₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 57. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 60

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the B₂ H₆ gas was replaced by PH₃ /H₃ gas (not shown), and H₂ S/He gas was additionally used for the lower layer. The conditions for production are shown in Table 58. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 61

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the CH₄ gas was replaced by NH₃ gas, and SnH₄ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 59. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 62

A light receiving member for electrophotography was produced in the same manner as in Example 41 except that the NO gas cylinder was replaced by a SiF₄ gas cylinder, and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas for the lower layer and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 60. According to the evaluation carried out in the same manner as in Example 41, it has improved performance for dots, coarseness, and layer peeling as in Example 41.

EXAMPLE 63

A light receiving member for electrophotography was produced in the same manner as in Example 44 except that H₂ S/He gas was additionally used for the lower layer. The conditions for production are shown in Table 61. According to the evaluation carried out in the same manner as in Example 44, it has improved performance for dots, coarseness, and layer peeling as in Example 44.

EXAMPLE 64

A light receiving member for electrophotography was produced in the same manner as in Example 46 except that the B₂ H₆ gas was replaced by PH₃ /H₂ gas for the lower layer and PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 62. According to the evaluation carried out in the same manner as in Example 46, it has improved performance for dots, coarseness, and layer peeling as in Example 46.

EXAMPLE 65

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm, and that the H₂ gas was replaced by He gas (not shown) and N₂ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 63. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 66

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that AlCl₃ /He gas, SiF₄ gas (not shown), and PH₃ /H₂ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 64. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 67

A light receiving member for electrophotography was produced in the same manenr as in Example 41 except that NO gas, AlCl₃ /He gas, and SiF₄ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 65. According to the evaluation carried out in the same manner as in Example 41, it has improved performance for dots, coarseness, and layer peeling as in Example 41.

EXAMPLE 68

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and C₂ H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 66. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 69

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown) and C₂ H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 67. According to the evaluation carried out in the same manner as in Example 36, it has improved performance for dots, coarseness, and layer peeling as in Example 36.

EXAMPLE 70

A light receiving member for electrophotography was produced in the same manner as in Example 41 except that AlCl₃ /He gas, SiF₄ gas (not shown), and H₂ S/He gas were additionally used for the upper layer. The conditions for production are shown in Table 68. According to the evaluation carried out in the same manner as in Example 41, it has improved performance for dots, coarseness, and layer peeling as in Example 41.

EXAMPLE 71

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that NO gas was additionally used when the lower layer was formed. The conditions for production are shown in Table 69.

COMPARATIVE EXAMPLE 3

A light receiving member for electrophotography was prepared in the same manner as in Example 71, except that H₂ gas and NO gas were not used when the lower layer was formed. The conditions for production are shown in Table 70.

The light receiving members for electrophotography prepared in Example 71 and Comparative Example 3 were evaluated for electrophotographic characteristics under various conditions by running them on an experimental electrophotographic apparatus which is a remodeled version of Canon's duplicating machine NP-7550.

The light receiving member for electrophotography produced in Example 71 provided images of very high quality which are free of interference fringes, especially in the case where the light source is long wavelength light such as semiconductor laser.

The light receiving member for electrophotography produced in Example 71 gave less than three-quarters the number of dots (especially those smaller than 0.1 mm in diameter) in the case of the light receiving member for electrophotography produced in Comparative Example 3. In addition, the degree of coarseness was evaluated by measuring the dispersion of the image density at 100 points in a circular region 0.05 mm in diameter. The light receiving member for electrophotography produced in Example 71 gave less than a half the dispersion in the case of the light receiving member for electrophotography produced in Comparative Example 3. It was also visually recognized that the one in Example 71 was superior to the one in Comparative Example 3.

The light receiving member for electrophotography was also tested for whether it gives defective images or it suffers the peeling of the light receiving layer when it is subjected to an impactive mechanical pressure for a comparatively short time. This test was carried out by dropping stainless steel balls 3.5 mm in diameter onto the surface of the light receiving member for electrophotography from a height of 30 cm. The probability that cracking occurs in the light receiving layer was measured. The light receiving member for electrophotography in Example 71 gave a probability smaller than three-fifths that of the light receiving member for electrophotography in Comparative Example 3.

As mentioned above, the light receiving member for electrophotography in Example 71 was superior to the light receiving member for electrophotography in Comparative Example 3.

EXAMPLE 72

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that B₂ H₆ /H₂ gas was added and the flow rate of AlCl₃ /He gas was changed in a different manner for the lower layer. The conditions for production are shown in Table 71. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 73

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the CH₄ gas was not used for the upper layer. The conditions for production are shown in Table 72. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 74

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the H₂ gas was replaced by He gas (99.9999% pure) (not shown) and SiF₄ gas (99.999% pure) and N₂ gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 73. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 75

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the H₂ gas was replaced by Ar gas (99.9999% pure) (not shown) and the CH₄ gas was replaced by NH₃ gas (99.999% pure) (not shown) for the upper layer. The conditions for production are shown in Table 74. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 76

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the NO gas was replaced by CH₄ gas for the lower layer and PH₃ /H₂ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 75. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 77

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the NO gas cylinder was replaced by an SiF₄ gas cylinder, and the NO gas was replaced by CH₄ gas for the lower layer and SiF₄ gas and PH₃ /H₂ gas (note shown) were additionally used for the upper layer. The conditions for production are shown in Table 76. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 78

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that PH₃ /H₂ gas (not shown) and N₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 77. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 79

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cylinder, and AlCl₃ /He gas was additionally used for the upper layer. The conditions for production are shown in Table 78. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 80

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the B₂ H₆ gas was replaced by PH₃ /H₂ gas (not shown) for the lower layer. The conditions for production are shown in Table 79. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 81

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the CH₄ gas was replaced by NH₃ gas (not shown) and SnH₄ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 80. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 82

A light receiving member for electrophotography was produced in the same manner as in Example 76 except that the NO gas cylinder was replaced by an SiF₄ gas cylinder, and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 81. According to the evaluation carried out in the same manner as in Example 76, it has improved performance for dots, coarseness, and layer peeling as in Example 76.

EXAMPLE 83

A light receiving member for electrophotography was produced in the same manner as in Example 79 except that C₂ H₂ gas was used for the lower layer and PH₃ /H₂ gas (not shown) and Si₂ H₆ gas (99.99% pure) was additionally used for the upper layer. The conditions for production are shown in Table 82. According to the evaluation carried out in the same manner as in Example 79, it has improved performance for dots, coarseness, and layer peeling as in Example 79.

EXAMPLE 84

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 83. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 85

A light receiving member for electrophotography was produced in the same manner as in Example 71 under the conditions shown in Table 84. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 86

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 80 mm. The conditions for production are shown in Table 85. According to the evaluation carried out in the same manner as in Example 71, except that a remodeled version of Canon's duplicating machine NP-9030 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 87

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 60 mm. The conditions for production are shown in Table 86. According to the evaluation carried out in the same manner as in Example 71, except that a remodeled version of Canon's duplicating machine NP-150Z was used, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 88

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 30 mm. The conditions for production are shown in Table 87. According to the evaluation carried out in the same manner as in Example 71, except that a remodeled version of Canon's duplicating machine FC-5 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 89

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 15 mm. The conditions for production are shown in Table 88. According to the evaluation carried out in the same manner as in Example 71, except that an experimentally constructed electrophotographic apparatus was used, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 90

A light receiving member for electrophotography was produced in the same manner as in Example 86 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support lathed by a diamond point tool, which has a cross section as shown in FIG. 38, in which a=25 μm and b=0.8 μm. According to the evaluation carried out in the same manner as in Example 86, it has improved performance for dots, coarseness, and layer peeling as in Example 86.

EXAMPLE 91

A light receiving member for electrophotography was produced in the same manner as in Example 86 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm. According to the evaluation carried out in the same manner as in Example 86, it has improved performance for dots, coarseness, and layer peeling as in Example 86.

EXAMPLE 92

A light receiving member for electrophotography was produced in the same manner as in Example 79 except that the NO gas was replaced by C₂ H₂ gas and the cylindrical aluminum support was kept at 500° C. and the upper layer was composed of poly-Si(H,X). The conditions for production are shown in Table 89. According to the evaluation carried out in the same manner as in Example 79, it has improved performance for dots, coarseness, and layer peeling as in Example 79.

EXAMPLE 93

A light receiving member for electrophotography was prepared by the microwave glow discharge decomposition method in the same manner as in Example 23, except that NO gas and B₂ H₆ gas were additionally used when the lower layer was formed. The conditions for production are shown in Table 90. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 94

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cylinder. The conditions for production are shown in Table 91. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 95

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the B₂ H₆ /H₂ gas was replaced by PH₃ /H₃ gas (not shown) for the upper layer. The conditions for production are shown in Table 92. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 96

A light receiving member for electrophotography was produced in the same manner as in Example 36 except that the NO gas cylinder was replaced by an NH₃ gas cylinder, and the CH₄ gas was replaced by NH₃ gas and SnH₄ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 93. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 97

A light receiving member for electrophotography was produced in the same manner as in Example 76 except that SiF₄ (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 94. According to the evaluation carried out in the same manner as in Example 76, it has improved performance for dots, coarseness, and layer peeling as in Example 76.

EXAMPLE 98

A light receiving member for electrophotography was produced in the same manner as in Example 79 under the conditions shown in Table 95. According to the evaluation carried out in the same manner as in Example 79, it has improved performance for dots, coarseness, and layer peeling as in Example 79.

EXAMPLE 99

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 96. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 100

A light receiving member for electrophotography was produced in the same manner as in Example 79 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm, and that the H₂ gas was replaced by He gas (not shown) and N₂ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 97. According to the evaluation carried out in the same manner as in Example 79, it has improved performance for dots, coarseness, and layer peeling as in Example 79.

EXAMPLE 101

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that AlCl₃ /He gas and SiF₄ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 98. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 102

A light receiving member for electrophotography was produced in the same manner as in Example 76 except that AlCl₃ /He gas, NO gas, and SiF₄ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 99. According to the evaluation carried out in the same manner as in Example 76, it has improved performance for dots, coarseness, and layer peeling as in Example 76.

EXAMPLE 103

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder. The conditions for production are shown in Table 100. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 104

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown). The conditions for production are shown in Table 101. According to the evaluation carried out in the same manner as in Example 71, it has improved performance for dots, coarseness, and layer peeling as in Example 71.

EXAMPLE 105

A light receiving member for electrophotography was produced in the same manner as in Example 76 except that AlCl₃ /He gas, SiF₄ gas (not shown), and H₂ S/He gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 102. According to the evaluation carried out in the same manner as in Example 76, it has improved performance for dots, coarseness, and layer peeling as in Example 76.

EXAMPLE 106

A light receiving member for electrophotography was produced in the same manner as in Example 79 except that C₂ H₂ gas supplied from a gas cylinder (not shown) and SiF₄ gas were additionally used. The conditions for production are shown in Table 103. According to the evaluation carried out in the same manner as in Example 79, it has improved performance for dots, coarseness, and layer peeling as in Example 79.

EXAMPLE 107

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 104. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 108

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 105. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 109

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 106. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 110

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 104. According to the evaluation carried out in the same manner as in Example 107, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 111

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 108. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 112

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 109. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 113

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 110. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 114

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 111. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 115

A light receiving member for electrophotography was produced in the same manner as in Example 106 except that PH₃ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 112. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 116

A light receiving member for electrophotography was produced in the same manner as in Example 115 under the conditions shown in Table 113. According to the evaluation carried out in the same manner as in Example 115, it has improved performance for dots, coarseness, and layer peeling as in Example 115.

EXAMPLE 117

A light receiving member for electrophotography was produced in the same manner as in Example 106 except that H₂ S gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 114. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 118

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 115. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 119

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 116. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 120

A light receiving member for electrophotography was produced in the same manner as in Example 106 except that NH₃ gas and H₂ S gas supplied from gas cylinders (not shown) were additionally used. The conditions for production are shown in Table 117. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 121

A light receiving member for electrophotography was produced in the same manner as in Example 106 except that N₂ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 118. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 122

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 119. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 123

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 120. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 124

A light receiving member for electrophotography was produced in the same manner as in Example 115 under the conditions shown in Table 121. According to the evaluation carried out in the same manner as in Example 115, it has improved performance for dots, coarseness, and layer peeling as in Example 115.

EXAMPLE 125

A light receiving member for electrophotography was produced in the same manner as in Example 106 under the conditions shown in Table 122. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 126

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that SiF₄ gas and NO gas was additionally used when the lower layer was formed. The conditions for production are shown in Table 123.

COMPARATIVE EXAMPLE 4

A light receiving member for electrophotography was prepared in the same manner as in Example 126, except that H₂ gas, NO gas, and SiF₄ gas were not used when the lower layer was formed. The conditions for production are shown in Table 124.

The light receiving members for electrophotography prepared in Example 126 and Comparative Example 4 were evaluated for electrophotographic characteristics under various conditions by running them on an experimental electrophotographic apparatus which is a remodeled version of Canon's duplicating machine NP-7550.

The light receiving member for electrophotography produced in Example 126 provided images of very high quality which are free of interference fringes, especially in the case where the light source is long wavelength light such as semiconductor laser.

The light receiving member for electrophotography produced in Example 126 gave less than a half the number of dots (especially those smaller than 0.1 mm in diameter) in the case of the light receiving member for electrophotography produced in Comparative Example 4. In addition, the degree of coarseness was evaluated by measuring the dispersion of the image density at 100 points in a circular region 0.05 mm in diameter. The light receiving member for electrophotography produced in Example 126 gave less than a half the dispersion in the case of the light receiving member for electrophotography produced in Comparative Example 4. It was also visually recognized that the one in Example 126 was superior to the one in Comparative Example 4.

The light receiving member for electrophotography was also tested for whether it gives defective images or it suffers the peeling of the light receiving layer when it is subjected to an impactive mechanical pressure for a comparatively short time. This test was carried out by dropping stainless steel balls 3.5 mm in diameter onto the surface of the light receiving member for electrophotography from a height of 30 cm. The probability that cracking occurs in the light receiving layer was measured. The light receiving member for electrophotography in Example 126 gave a probability smaller than two-fifths that of the light receiving member for electrophotography in Comparative Example 4.

As mentioned above, the light receiving member for electrophotography in Example 126 was superior to the light receiving member for electrophotography in Comparative Example 4.

EXAMPLE 127

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the NO gas was not used and the flow rate of AlCl₃ /He gas was changed in a different manner for the lower layer, and B₂ H₆ /H₂ gas was added for the lower layer. The conditions for production are shown in Table 125. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 128

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the CH₄ gas was not used for the upper layer. The conditions for production are shown in Table 126. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 129

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the H₂ gas was replaced by He gas (99.999% pure) (not shown) and SiF₄ gas, AlCl₃ /He gas, and N₂ gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 127. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 130

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the H₂ gas was replaced by Ar as (99.9999% pure) (not shown) and the CH₄ gas was replaced by NH₃ gas (99.999% pure) (not shown) and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 128. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 131

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the NO gas was replaced by CH₄ gas for the lower layer and PH₃ /H₂ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 129. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 132

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that SiF₄ gas and PH₃ /H₂ gas (note shown) were additionally used for the upper layer. The conditions for production are shown in Table 130. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 133

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that PH₃ /H₂ gas (not shown) and N₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 131. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 134

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cylinder, and AlCl₃ /He gas was additionally used for the upper layer. The conditions for production are shown in Table 132. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 135

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the B₂ H₆ gas was replaced by PH₃ /H₂ gas (not shown) and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 133. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 136

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the CH₄ gas was replaced by NH₃ gas (not shown) and SnH₄ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 134. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 137

A light receiving member for electrophotography was produced in the same manner as in Example 131 except that SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 135. According to the evaluation carried out in the same manner as in Example 131, it has improved performance for dots, coarseness, and layer peeling as in Example 131.

EXAMPLE 138

A light receiving member for electrophotography was produced in the same manner as in Example 134 except that C₂ H₂ gas and Si₂ F₆ gas (99.99% pure) was used for the lower layer, and PH₃ /H₂ gas (not shown) and Si₂ H₆ gas (99.99% pure) were additionally used for the upper layer. The conditions for productio are shown in Table 136. According to the evaluation carried out in the same manner as in Example 134, it has improved performance for dots, coarseness, and layer peeling as in Example 134.

EXAMPLE 139

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that Si₂ F₆ gas was used for all the layers, and PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 137. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 140

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that GeH₄ was additionally used for the upper layer. The conditions for production are shown in Table 138. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 141

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 80 mm. The conditions for production are shown in Table 139. According to the evaluation carried out in the same manner as in Example 126, except that a remodeled version of Canon's duplicating machine NP-9030 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 142

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 60 mm. The conditions for production are shown in Table 140. According to the evaluation carried out in the same manner as in Example 126, except that a remodeled version of Canon's duplicating machine NP-150Z was used, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 143

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 30 mm. The conditions for production are shown in Table 141. According to the evaluation carried out in the same manner as in Example 126, except that a remodeled version of Canon's duplicating machine FC-5 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 144

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 15 mm. The conditions for production are shown in Table 142. According to the evaluation carried out in the same manner as in Example 126, except that an experimentally constructed electrophotographic apparatus was used, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 145

A light receiving member for electrophotography was produced in the same manner as in Example 141 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support lathed by a diamond point tool, which has a cross section as shown in FIG. 38, in which a=25 μm and b=0.8 μm. According to the evaluation carried out in the same manner as in Example 141, it has improved performance for dots, coarseness, and layer peeling as in Example 141.

EXAMPLE 146

A light receiving member for electrophotography was produced in the same manner as in Example 141 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm. According to the evaluation carried out in the same manner as in Example 141, it has improved performance for dots, coarseness, and layer peeling as in Example 141.

EXAMPLE 147

A light receiving member for electrophotography was produced in the same manner as in Example 143 except that the NO gas was replaced by C₂ H₂ gas and the cylindrical aluminum support was kept at 500° C. and the upper layer was composed of poly-Si(H,X). The conditions for production are shown in Table 143. According to the evaluation carried out in the same manner as in Example 134, it has improved performance for dots, coarseness, and layer peeling as in Example 134.

EXAMPLE 148

A light receiving member for electrophotography was prepared by the microwave glow discharge decomposition method in the same manner as in Example 23, except that SiF₄ gas, NO gas, and B₂ H₆ gas were additionally used when the lower layer was formed. The conditions for production are shown in Table 144. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 149

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999% pure) cylinder. The conditions for production are shown in Table 145. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 150

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that SiF₄ gas used for all the layers, and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₃ gas (not shown) for the upper layer. The conditions for production are shown in Table 146. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 151

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the NO gas cylinder was replaced by an NH₃ gas cylinder, and the CH₄ gas was replaced by NH₃ gas and SnH₄ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 147. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 152

A light receiving member for electrophotography was produced in the same manner as in Example 131 under the conditions shown in Table 148. According to the evaluation carried out in the same manner as in Example 131, it has improved performance for dots, coarseness, and layer peeling as in Example 131.

EXAMPLE 153

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that Si₂ H₆ gas was additionally used for the upper layer. The conditions for production are shown in Table 149. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 154

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 150. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 155

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm, and that the H₂ gas was replaced by He gas (not shown) and N₂ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 151. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 156

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that AlCl₃ /He gas was additionally used for the upper layer. The conditions for production are shown in Table 152. According to the evaluation carried out in the same manner as in Example 126, it has improve performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 157

A light receiving member for electrophotography was produced in the same manner as in Example 131 except that AlCl₃ /He gas, NO gas, and SiF₄ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 153. According to the evaluation carried out in the same manner as in Example 131, it has improved performance for dots, coarseness, and layer peeling as in Example 131.

EXAMPLE 158

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder. The conditions for production are shown in Table 154. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 159

A light receiving member for electrophotography was produced in the same manner as in Example 126 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown). The conditions for production are shown in Table 155. According to the evaluation carried out in the same manner as in Example 126, it has improved performance for dots, coarseness, and layer peeling as in Example 126.

EXAMPLE 160

A light receiving member for electrophotography was produced in the same manner as in Example 131 except that AlCl₃ /He gas, SiF₄ gas, and H₂ S/He gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 156. According to the evaluation carried out in the same manner as in Example 131, it has improved performance for dots, coarseness, and layer peeling as in Example 131.

EXAMPLE 161

A light receiving member for electrophotography was produced in the same manner as in Example 134 except that C₂ H₂ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 157. According to the evaluation carried out in the same manner as in Example 134, it has improved performance for dots, coarseness, and layer peeling as in Example 134.

EXAMPLE 162

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 158. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 163

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 159. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 164

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 160. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 165

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 161. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 166

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 162. According to the evaluation caarried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 167

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 163. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 168

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 164. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 169

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 165. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 170

A light receiving member for electrophotography was produced in the same manner as in Example 161 except that PH₃ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 166. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 171

A light receiving member for electrophotography was produced in the same manner as in Example 170 under the conditions shwon in Table 167. According to the evaluation carried out in the same manner as in Example 170, it has improved performance for dots, coarseness, and layer peeling as in Example 170.

EXAMPLE 172

A light receiving member for electrophotography was produced in the same manner as in Example 161 except that H₂ S gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 168. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 173

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 169. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 174

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 170. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 175

A light receiving member for electrophotography was produced in the same manner as in Example 161 except that NH₃ gas and H₂ S gas supplied from gas cylinders (not shown) were additionally used. The conditions for production are shown in Table 171. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 176

A light receiving member for electrophotography was produced in the same manner as in Example 161 except that N₂ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 172. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 177

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 173. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarsenes, and layer peeling as in Example 161.

EXAMPLE 178

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 174. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 179

A light receiving member for electrophotography was produced in the same manner as in Example 170 under the conditions shown in Table 175. According to the evaluation carried out in the same manner as in Example 170, it has improved performance for dots, coarseness, and layer peeling as in Example 170.

EXAMPLE 180

A light receiving member for electrophotography was produced in the same manner as in Example 161 under the conditions shown in Table 176. According to the evaluation carried out in the same manner as in Example 161, it has improved performance for dots, coarseness, and layer peeling as in Example 161.

EXAMPLE 181

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that GeH₄ gas was additionally used when the lower layer was formed. The conditions for production are shown in Table 177.

COMPARATIVE EXAMPLE 5

A light receiving member for electrophotography was prepared in the same manner as in Example 181, except that GeH₂ gas and H₂ gas were not used when the lower layer was formed. Table 178 shows the conditions under which the light receiving member for electrophotography was prepared.

The light receiving members for electrophotography prepared in Example 181 and Comparative Example 5 were evaluated for electrophotographic characteristics under various conditions by running them on an experimental electrophotographic apparatus which is a remodeled version of Canon's duplicating machine NP-7550.

The light receiving member for electrophotography produced in Example 181 provided images of very high quality which are free of interference fringes, especially in the case where the light source is long wavelength light such as semiconductor laser.

The light receiving member for electrophotography produced in Example 181 gave less than two-fifths the number of dots (especially those smaller than 0.1 mm in diameter) in the case of the light receiving member for electrophotography produced in Comparative Example 5. In addition, the degree of coarseness was evaluated by measuring the dispersion of the image density at 100 points in a circular region 0.05 mm in diameter. The light receiving member for electrophotography produced in Example 181 gave less than one-third the dispersion in the case of the light receiving member for electrophotography produced in Comparative Example 5. It was also visually recognized that the one in Example 181 was superior to the one in Comparative Example 5.

The light receiving member for electrophotography was also tested for whether it gives defective images or it suffers the peeling of the light receiving layer when it is subjected to an impactive mechanical pressure for a comparatively short time. This test was carried out by dropping stainless steel balls 3.5 mm in diameter onto the surface of the light receiving member for electrophotography from a height of 30 cm. The probability that cracking occurs in the light receiving layer was measured. The light receiving member for electrophotography in Example 181 gave a probability smaller than one-third that of the light receiving member for electrophotography in Comparative Example 5.

The lower layer of the light receiving member for electrophotography obtained in Example 181 was analyzed by SIMS. It was found that silicon atoms, hydrogen atoms, and aluminum atoms are unevenly distributed in the layer thickness as intended.

As mentioned above, the light receiving member for electrophotography in Example 181 was superior to the light receiving member for electrophotography in Comparative Example 5.

EXAMPLE 182

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that B₂ H₆ /H₂ gas was used and the flow rate of AlCl₃ /He gas for the lower layer was changed in a different manner for the lower layer, and B₂ H₆ /H₂ gas added. The conditions for production are shown in Table 179. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 183

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the CH₄ gas was not used for the upper layer. The conditions for production are shown in Table 180. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 184

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that SiH₄ gas (99.999% pure) (not shown) and N₂ gas (99.999% pure) were for the upper layer. The conditions for production are shown in Table 181. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 185

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the H₂ gas was replaced by Ar gas (99.9999% pure) (not shown) and the CH₄ gas was replaced by NH₃ gas (99.999% pure) (not shown) and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 182. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 186

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the NO gas was replaced by CH₄ gas for the lower layer, and the H₂ gas cylinder was replaced by an He gas cylinder (99.999% pure) and Ph₃ /H₂ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 183. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 187

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that SiF₄ gas and PH₃ /H₂ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 184. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 188

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that PH₃ /H₂ gas (not shown) and N₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 185. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 189

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the CH₄ gas was replaced by GeF₄ gas (99.999% pure), and the CH₄ gas was replaced by C₂ H₂ gas (99.9999% pure) for the upper layer. The conditions for production are shown in Table 186. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 190

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the B₂ H₆ gas was replaced by PH₃ /H₂ gas (not shown) and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 187. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 191

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the CH₄ gas was replaced by NH₃ gas (not shown), and SnH₄ gas (99.999% pure) was additionally used for the upper layer. The conditions for production are shown in Table 188 According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 192

A light receiving member for electrophotography was produced in the same manner as in Example 186 except that SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 189. According to the evaluation carried out in the same manner as in Example 186, it has improved performance for dots, coarseness, and layer peeling as in Example 186.

EXAMPLE 193

A light receiving member for electrophotography was produced in the same manner as in Example 189 except that C₂ H₂ gas was used for the lower layer, and PH₃ /H₂ gas (not shown), Si₂ F₆ gas (99.99% pure), and Si₂ H₆ gas (99.99% pure) were additionally used for the upper layer. The conditions for production are shown in Table 190. According to the evaluation carried out in the same manner as in Example 189, it has improved performance for dots, coarseness, and layer peeling as in Example 189.

EXAMPLE 194

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that Si₂ F₆ gas was used for all the layers and PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 191. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 195

A light receiving member for electrophotography was produced in the same manner as in Example 181 under the conditions shown in Table 192 According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 196

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 80 mm. The conditions for production are shown in Table 193. According to the evaluation carried out in the same manner as in Example 181, except that a remodeled version of Canon's duplicating machine NP-9030 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 197

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 60 mm. The conditions for production are shown in Table 194. According to the evaluation carried out in the same manner as in Example 181, except that a remodeled version of Canon's duplicating machine NP-150Z was used, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 198

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 30 mm. The conditions for production are shown in Table 195. According to the evaluation carried out in the same manner as in Example 181, except that a remodeled version of Canon's duplicating machine FC-5 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 199

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 15 mm. The conditions for production are shown in Table 196. According to the evaluation carried out in the same manner as in Example 181, except that an experimentally constructed electrophotographic apparatus was used, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 200

A light receiving member for electrophotography was produced in the same manner as in Example 196 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support lathed by a diamond point tool, which has a cross section as shown in FIG. 38, in which a=25 μm and b=0.8 μm. According to the evaluation carried out in the same manner as in Example 196, it has improved performance for dots, coarseness, and layer peeling as in Example 196.

EXAMPLE 201

A light receiving member for electrophotography was produced in the same manner as in Example 196 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm. According to the evaluation carried out in the same manner as in Example 196, it has improved performance for dots, coarseness, and layer peeling as in Example 196.

EXAMPLE 202

A light receiving member for electrophotography was produced in the same manner as in Example 189 under the conditions shown in Table 197, except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas clyinder, the cylindrical aluminum support was kept at 500° C., and the upper layer was composed of poly-Si(H,X). According to the evaluation carried out in the same manner as in Example 189, it has improved performance for dots, coarseness, and layer peeling as in Example 189.

EXAMPLE 203

A light receiving member for electrophotography was prepared by the microwave glow discharge decomposition method in the same manner as in Example 23, except that Ge₄ gas, B₂ H₆ gas, NO gas, and SiF₄ gas were additionally used when the lower layer was formed. The conditions for production are shown in Table 198. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 204

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the GeH₄ gas cylinder was replaced by a GeF₄ gas cylinder and the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder. The conditions for production are shown in Table 199. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 205

A light receiving member for electrophotography was produced in the same manner as in Example 189 except that SiF₄ gas was used for all the layers and the B₂ H₆ gas was replaced by PH₃ /H₂ gas (not shown) for the upper layer. The conditions for production are shown in Table 200. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 206

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the CH₄ gas cylinder was replaced by an NH₃ gas cylinder (not shown) and SnH₄ gas (not shown) was additionally used. The conditions for production are shown in Table 201. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 207

A light receiving member for electrophotography was produced in the same manner as in Example 186 under the conditions shown in Table 202. According to the evaluation carried out in the same manner as in Example 186, it has improved performance for dots, coarseness, and layer peeling as in Example 186.

EXAMPLE 208

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that Si₂ H₆ gas was additionally used for the upper layer. The conditions for production are shown in Table 203. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 209

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 204. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 210

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm, and that the H₂ gas was replaced by He gas (not shown) and N₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 205. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 211

A light receiving member for electrophotography was produced in the same manner as in Example 186 except that AlCl₃ /He gas, NO gas, and SiF₄ gas were additionally used for the upper layer. The conditions for production are shown in Table 206. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 212

A light receiving member for electrophotography was produced in the same manner as in Example 186 except that AlCl₃ /He gas, NO gas, and SiF₄ gas were additionally used for the upper layer. The conditions for production are shown in Table 207. According to the evaluation carried out in the same manner as in Example 186, it has improved performance for dots, coarseness, and layer peeling as in Example 186.

EXAMPLE 213

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder. The conditions for production are shown in Table 208. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 214

A light receiving member for electrophotography was produced in the same manner as in Example 181 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown). The conditions for production are shown in Table 209. According to the evaluation carried out in the same manner as in Example 181, it has improved performance for dots, coarseness, and layer peeling as in Example 181.

EXAMPLE 215

A light receiving member for electrophotography was produced in the same manner as in Example 186 except that AlCl₃ /He gas, SiF₄ gas, and H₂ S/He gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 210. According to the evaluation carried out in the same manner as in Example 186, it has improved performance for dots, coarseness, and layer peeling as in Example 186.

EXAMPLE 216

A light receiving member for electrophotography was produced in the same manner as in Example 189 except that C₂ H₂ gas supplied from a gas cylinder (not shown) was used. The conditions for production are shown in Table 211. According to the evaluation carried out in the same manner as in Example 189, it has improved performance for dots, coarseness, and layer peeling as in Example 189.

EXAMPLE 217

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 212. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 218

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 213. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 219

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 214. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 220

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 215. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 221

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 216. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 222

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 217. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 223

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 218. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 224

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 219. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 225

A light receiving member for electrophotography was produced in the same manner as in Example 216 except that PH₃ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 220. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 226

A light receiving member for electrophotography was produced in the same manner as in Example 225 under the conditions shown in Table 221. According to the evaluation carried out in the same manner as in Example 225, it has improved performance for dots, coarseness, and layer peeling as in Example 225.

EXAMPLE 227

A light receiving member for electrophotography was produced in the same manner as in Example 216 except that H₂ S gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 222. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 228

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 223. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 229

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 224. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 230

A light receiving member for electrophotography was produced in the same manner as in Example 216 except that NH₃ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 225. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 231

A light receiving member for electrophotography was produced in the same manner as in Example 216 except that N₂ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 226. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 232

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 227. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 233

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 228. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 234

A light receiving member for electrophotography was produced in the same manner as in Example 225 under the conditions shown in Table 229. According to the evaluation carried out in the same manner as in Example 225, it has improved performance for dots, coarseness, and layer peeling as in Example 225.

EXAMPLE 235

A light receiving member for electrophotography was produced in the same manner as in Example 216 under the conditions shown in Table 230. According to the evaluation carried out in the same manner as in Example 216, it has improved performance for dots, coarseness, and layer peeling as in Example 216.

EXAMPLE 236

A light receiving member for electrophotography was produced in the same manner as in Example 184 under the conditions shown in Table 231. According to the evaluation carried out in the same manner as in Example 184, it has improved performance for dots, coarseness, and layer peeling as in Example 184.

EXAMPLE 237

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that Mg(C₅ H₅)₂ /He gas was additionally used when the lower layer was formed. The conditions for production are shown in Table 232.

COMPARATIVE EXAMPLE 6

A light receiving member for electrophotography was prepared in the same manner as in Example 237, except that H₂ gas and Mg(C₅ H₅)₂ /He gas were not used when the lower layer was formed. The conditions for production are shown in Table 233.

The light receiving members for electrophotography prepared in Example 237 and Comparative Example 6 were evaluated for electrophotographic characteristics under various conditions by running them on an experimental electrophotographic apparatus which is a remodeled version of Canon's duplicating machine NP-7550.

The light receiving member for electrophotography produced in Example 237 provided images of very high quality which are free of interference fringes, especially in the case where the light source is long wavelength light such as semiconductor laser.

The light receiving member for electrophotography produced in Example 237 gave less than one-third the number of dots (especially those smaller than 0.1 mm in diameter) in the case of the light receiving member for electrophotography produced in Comparative Example 6. In addition, the degree of coarseness was evaluated by measuring the dispersion of the image density at 100 points in a circular region 0.05 mm in diameter. The light receiving member for electrophotography produced in Example 237 gave less than a quarter the dispersion in the case of the light receiving member for electrophotography produced in Comparative Example 6. It was also visually recognized that the one in Example 237 was superior to the one in Comparative Example 6.

The light receiving member for electrophotography was also tested for whether it gives defective images or it suffers the peeling of the light receiving layer when it is subjected to an impactive mechanical pressure for a comparatively short time. This test was carried out by dropping stainless steel balls 3.5 mm in diameter onto the surface of the light receiving member for electrophotography from a height of 30 cm. The probability that cracking occurs in the light receiving layer was measured. The light receiving member for electrophotography in Example 237 gave a probability smaller than a quarter that of the light receiving member for electrophotography in Comparative Example 6.

The lower layer of the light receiving member for electrophotography obtained in Example 237 was analyzed by SIMS. It was found that silicon atoms, hydrogen atoms, and aluminum atoms are unevenly distributed in the layer thickness as intended.

As mentioned above, the light receiving member for electrophotography in Example 237 was superior to the light receiving member for electrophotography in Comparative Example 6.

EXAMPLE 238

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the flow rate of B₂ H₆ /H₂ gas, NO gas, and AlCl₃ /He gas for the lower layer was changed in a different manner. The conditions for production are shown in Table 234. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 239

A light receiving member for electrophotography was produced in the same manner as in Example 235 except that the CH₄ gas was not used for the upper layer. The conditions for production are shown in Table 235. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 240

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that CH₄ gas, GeH₄ gas, B₂ H₆ /H₂ gas, NO gas, and SiF₄ gas (99.999% pure) (not shown) were additionally used for the lower layer, and AlCl₃ /He gas, SiF₄ gas (not shown), Mg(C₅ H₅)₂ /He gas (not shown), and N₂ gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 236. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 241

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the H₂ gas was replaced by Ar gas (99.9999% pure) (not shown), the CH₄ gas was replaced by NH₃ gas (99.999% pure) (not shown), and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 237. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 242

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that GeH₄ gas, CH₄ gas, and B₂ H₆ /H₂ gas were additionally used for the lower layer, and PH₃ /H₂ gas (99.999% pure) (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 238. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 243

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the NO gas cylinder was replaced by an SiF₄ gas cylinder, and SiF₄ gas and PH₃ /H₂ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 239. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 244

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that PH₃ /H₂ gas (not shown) and N₂ gas (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 240. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 245

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the GeH₄ gas cylinder was replaced by a GeF₄ gas (99.999% pure) cylinder and the CH₄ gas cylinder was replaced by a C₂ H₂ gas (99.9999%) cylinder. The conditions for production are shown in Table 241. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 246

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the B₂ H₆ gas cylinder was replaced by a PH₃ /H₂ gas cylinder and SiF₄ gas supplied from a cylinder (not shown) was additionally used. The conditions for production are shown in Table 242. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 247

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the CH₄ gas cylinder was replaced by an NH₃ gas (99.999% pure) cylinder and SnH₄ gas (99.999% pure) supplied from a cylinder (not shown ) was additionally used. The conditions for production are shown in Table 243. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 248

A light receiving member for electrophotography was produced in the same manner as in Example 242 except that the NO gas cylinder was replaced by an SiF₄ gas cylinder, and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 244. According to the evaluation carried out in the same manner as in Example 242, it has improved performance for dots, coarseness, and layer peeling as in Example 242.

EXAMPLE 249

A light receiving member for electrophotography was produced in the same manner as in Example 245 except that the CH₄ gas was replaced by C₂ H₂ gas and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas (not shown) for the lower layer, and the GeF₄ gas was replaced by GeH₄ gas, and Si₂ H₆ gas (99.99% pure) (not shown), Si₂ F₆ gas (99.99% pure), and PH₃ /H₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 245. According to the evaluation carried out in the same manner as in Example 245, it has improved performance for dots, coarseness, and layer peeling as in Example 245.

EXAMPLE 250

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that Si₂ F₆ gas was used for all the layers; NO gas was additionally used for the lower layer; and the CH₄ gas was replaced by NH₃ gas (not shown) and PH₃ /H₂ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 246. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 251

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that B₂ H₆ /H₂ gas was additionally used for the lower layer. The conditions for production are shown in Table 247. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 252

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 80 mm. The conditions for production are shown in Table 248. According to the evaluation carried out in the same manner as in Example 237, except that a remodeled version of Canon's duplicating machine NP-9030 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 253

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 60 mm. The conditions for production are shown in Table 249. According to the evaluation carried out in the same manner as in Example 237, except that a remodeled version of Canon's duplicating machine NP-150Z was used, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 254

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 30 mm. The conditions for production are shown in Table 250. According to the evaluation carried out in the same manner as in Example 237, except that a remodeled version of Canon's duplicating machine FC-5 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 255

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 15 mm. The conditions for production are shown in Table 251. According to the evaluation carried out in the same manner as in Example 237, except that an experimentally constructed electrophotographic apparatus was used, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 256

A light receiving member for electrophotography was produced in the same manner as in Example 252 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support lathed by a diamond point tool, which has a cross section as shown in FIG. 38, in which a=25 μm and b=0.8 μm. According to the evaluation carried out in the same manner as in Example 252, it has improved performance for dots, coarseness, and layer peeling as in Example 252.

EXAMPLE 257

A light receiving member for electrophotography was produced in the same manner as an Example 252 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm. According to the evaluation carried out in the same manner as in Example 252, it has improved performance for dots, coarseness, and layer peeling as in Example 252.

EXAMPLE 258

A light receiving member for electrophotography was produced in the same manner as in Example 245 except that the cylindrical aluminum support was kept at 500° C. and the upper layer was composed of poly-Si(H,X). The conditions for production are shown in Table 252. According to the evaluation carried out in the same manner as in Example 245, it has improved performance for dots, coarseness, and layer peeling as in Example 245.

EXAMPLE 259

A light receiving member for electrophotography was prepared by the microwave glow discharge decomposition method in the same manner as in Example 23, except that SiF₄ gas, NO gas, Mg(C₅ H₅)₂ /He gas, GeH₄ gas, and B₂ H₆ gas were additionally used when the lower layer was formed. The conditions for production are shown in Table 253. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

The lower layer of the light receiving member for electrophotography obtained in Example 259 was analyzed by SIMS. It was found that silicon atoms, hydrogen atoms, and aluminum atoms are unevenly distributed in the layer thickness as intended.

EXAMPLE 260

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder and the GeH₄ gas cylinder was replaced by a GeF₄ gas cylinder. The conditions for production are shown in Table 254. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 261

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the B₂ H₆ /H₂ gas cylinder was replaced by a a PH₃ /H₃ gas cylinder, CH₄ gas was additionally used for the lower layer, and SiF₄ gas was used for all the layers. The conditions for production are shown in Table 255. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 262

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the CH₄ gas cylinder was replaced by an NH₃ gas cylinder and SnH₄ gas (not shown) was additionally used. The conditions for production are shown in Table 256. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 263

A light receiving member for electrophotography was produced in the same manner as in Example 242 except that SiF₄ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 257. According to the evaluation carried out in the same manner as in Example 242, it has improved performance for dots, coarseness, and layer peeling as in Example 242.

EXAMPLE 264

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that Si₂ H₆ gas was additionally used for the upper layer. The conditions for production are shown in Table 258. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 265

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 259. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 266

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm, and that the H₂ gas was replaced by He gas (not shown) and N₂ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 260. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 267

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that SiF₄ gas supplied from a gas cylinder (not shown) was used for all the layers; GeH₄ gas, CH₄ gas, NO gas, and B₂ H₆ /H₂ gas were additionally used for the lower layer; and AlCl₃ /He gas and Mg(C₅ H₅)₂ /He gas were additionally used for the upper layer. The conditions for production are shown in Table 261. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 268

A light receiving member for electrophotography was produced in the same manner as in Example 248 except that NO gas was additionally used for the upper layer. The conditions for production are shown in Table 262. According to the evaluation carried out in the same manner as in Example 248, it has improved performance for dots, coarseness, and layer peeling as in Example 248.

EXAMPLE 269

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and the CH₄ gas was replaced by C₂ H₂ gas for the upper layer. The conditions for production are shown in Table 263. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 270

A light receiving member for electrophotography was produced in the same manner as in Example 237 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and the B₂ H₆ /H₂ gas was replaced by PH₃ /H₂ gas. The conditions for production are shown in Table 264. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 271

A light receiving member for electrophotography was produced in the same manner as in Example 267 except that H₂ S gas (99.999% pure) supplied from a gas cylinder (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 265. According to the evaluation carried out in the same manner as in Example 267, it has improved performance for dots, coarseness, and layer peeling as in Example 267.

EXAMPLE 272

A light receiving member for electrophotography was produced in the same manner as in Example 245 except that C₂ H₂ gas and SiF₄ gas supplied from gas cylinders (not shown) were additionally used. The conditions for production are shown in Table 266. According to the evaluation carried out in the same manner as in Example 245, it has improved performance for dots, coarseness, and layer peeling as in Example 245.

EXAMPLE 273

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 267. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 274

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 268. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarsenes, and layer peeling as in Example 272.

EXAMPLE 275

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 269. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 276

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 270. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 277

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 271. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 278

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 272. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 279

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 273. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 280

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 274. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 281

A light receiving member for electrophotography was produced in the same manner as in Example 272 except that PH₃ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 275. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 282

A light receiving member for electrophotography was produced in the same manner as in Example 281 under the conditions shown in Table 276. According to the evaluation carried out in the same manner as in Example 281, it has improved performance for dots, coarseness, and layer peeling as in Example 281.

EXAMPLE 283

A light receiving member for electrophotography was produced in the same manner as in Example 272 except that H₂ S gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 277. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 284

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 278. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 285

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 279. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 286

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 280. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 287

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the condition shown in Table 281. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 288

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 282. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 289

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 283. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 290

A light receiving member for electrophotography was produced in the same manner as in Example 281 under the conditions shown in Table 284. According to the evaluation carried out in the same manner as in Example 281, it has improved performance for dots, coarseness, and layer peeling as in Example 281.

EXAMPLE 291

A light receiving member for electrophotography was produced in the same manner as in Example 272 under the conditions shown in Table 285. According to the evaluation carried out in the same manner as in Example 272, it has improved performance for dots, coarseness, and layer peeling as in Example 272.

EXAMPLE 292

A light receiving member for electrophotography was produced in the same manner as in Example 237 under the condition shown in Table 286. According to the evaluation carried out in the same manner as in Example 237, it has improved performance for dots, coarseness, and layer peeling as in Example 237.

EXAMPLE 293

A light receiving member for electrophotography pertaining to the present invention was produced by the RF sputtering method for the lower layer and by the RF glow discharge decomposition method for the upper layer.

FIG. 42 shows the apparatus for producing the light receiving member for electrophotography by the RF sputtering method, said apparatus being composed of the raw material gas supply unit 1500 and the deposition unit 1501.

In FIG. 42, there is shown a target 1405 composed of Si, Al, and Mg to constitute the lower layer. The atoms of these elements are distributed according to a certain pattern across the thickness.

In FIG. 42, there are shown gas cylinders 1408, 1409, and 1410. They contain raw material gases to form the lower layer. The cylinder 1408 contains SiH₄ gas (99.99% pure); the cylinder 1409 contains H₂ gas (99.9999% pure); and the cylinder 1410 contains Ar gas (99.999% pure).

In FIG. 42, there is shown the cylindrical aluminum support 1402, 108 mm in outside diameter, having the mirror-finished surface.

The deposition chamber 1401 and the gas piping were evacuated in the same manner as in Example 1 until the pressure in the deposition chamber reached 1×10⁻⁶ Torr.

The gases were introduced into the mass flow controllers 1412˜1414 in the same manner as in Example 1.

The cylindrical aluminum support 1402 placed in the deposition chamber 1401 was heated to 330° C. by a heater (not shown).

Now that the preparation for film forming was completed as mentioned above, the lower layer was formed on the cylindrical aluminum support 1402.

The lower layer was formed as follows: The outlet valves 1420, 1421, 1422, and the auxiliary valve 1432 were opened slowly to introduce SiH₄ gas, H₂ gas, and Ar gas into the deposition chamber 1401. The mass flow controllers 1412, 1413, and 1414 were adjusted so that the flow rate of SiH₄ gas was 30 SCCM, the flow rate of H₂ gas was 5 SCCM, and the flow rate of Ar gas was 100 SCCM. The pressure in the deposition chamber 1401 was maintained at 0.01 Torr as indicated by the vacuum gauge 1435 by adjusting the opening of the main valve 1407. Then, the output of the RF power source (not shown) was set to 1 mW/cm³, and RF power was applied to the target 1405 and the aluminum support 1402 through the high-frequency matching box 1433 in order to form the lower layer on the aluminum support. While the lower layer was being formed, the mass flow controllers 1412, 1413, and 1414 were adjusted so that the flow rate of SiH₄ gas remained at 30 SCCM, the flow rate of H₂ gas increased from 5 SCCM to 100 SCCM at a constant ratio, and the flow rate of Ar gas remained constant at 100 SCCM. When the lower layer became 0.05 μm thick, the RF glow discharge was suspended, and the outlet valves 1420, 1421, and 1422 and the auxiliary valve 1432 were closed to stop the gases from flowing into the deposition chamber 1401. The formation of the lower layer was completed.

While the lower layer was being formed, the cylindrical aluminum support 1402 was turned at a prescribed speed by a drive unit (not shown) to ensure uniform deposition.

The upper layer was formed using the apparatus as shown in FIG. 37 in the same manner as in Example 237 under the conditions shown in Table 287. The thus formed light receiving member for electrophotography was evaluated in the same manner as in Example 237. It was found to have improved performance for dots, coarseness, and layer peeling as in Example 237.

The lower layer of the light receiving member for electrophotography obtained in Example 293 was analyzed by SIMS. It was found that silicon atoms, hydrogen atoms, and aluminum atoms are unevenly distributed in the layer thickness as intended.

EXAMPLE 294

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that Cu(C₄ H₇ N₂ O₂)₂ /He gas was additionally used when the lower layer was formed. The conditions for production are shown in Table 288.

COMPARATIVE EXAMPLE 7

A light receiving member for electrophotography was prepared in the same manner as in Example 294, except that H₂ gas and Cu(C₄ H₇ N₂ O₂)₂ /He gas were not used when the lower layer was formed. The conditions for production are shown in Table 289.

The light receiving members for electrophotography prepared in Example 294 and Comparative Example 7 were evaluated for electrophotographic characteristics under various conditions by running them on an experimental electrophotographic apparatus which is a remodeled version of Canon's duplicating machine NP-7550.

The light receiving member for electrophotography produced in Example 71 provided images of very high quality which are free of interference fringes, especially in the case where the light source is long wavelength light such as semiconductor laser.

The light receving member for electrophotography produced in Example 249 gave less than one-fourth the number of dots (especially those smaller than 0.1 mm in diameter) in the case of the light receiving member for electrophotography produced in Comparative Example 7. In addition, the degree of coarseness was evaluated by measuring the dispersion of the image density at 100 points in a circular region 0.05 mm in diameter. The light receiving member for electrophotography produced in Example 294 gave less than one-fifth the dispersion in the case of the light receiving number for electrophotography produced in Comparative Example 3. It was also visually recognized that the one in Example 294 was superior to the one in Comparative Example 7.

The light receiving member for electrophotography was also tested for whether it gives defective images or it suffers the peeling of the light receiving layer when it is subjected to an impactive mechanical pressure for a comparatively short time. This test was carried out by dropping stainless steel balls 3.5 mm in diameter onto the surface of the light receiving member for electrophotography from a height of 30 cm. The probability that cracking occurs in the light receiving layer was measured. The light receiving member for electrophotography in Example 297 gave a probability smaller than three-fifths that of the light receiving member for electrophotography in Comparative Example 7.

As mentioned above, the light receiving member for electrophotography in Example 294 was superior to the light receiving member for electrophotography in Comparative Example 7.

EXAMPLE 295

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that B₂ H₆ /H₂ gas, GeH₄ gas, and NO gas were used and the flow rate of AlCl₃ /He gas was changed in a different manner for the lower layer. The conditions for production are shown in Table 290. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 296

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that Mg(C₅ H₅)₂ gas diluted with He gas "(Mg (C₅ H₅)₂ /He" for short hereinafter) (Mg(C₅ H₅) gas is supplied from a closed vessel which is not shown) was used for the lower layer, and He gas supplied from a gas cylinder (not shown) was used and CH₄ gas was not used for the upper layer. The conditions for production are shown in Table 291. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 297

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that Mg(C₅ H₅)₂ /He gas supplied from a closed vessel (not shown), CH₄ gas, GeH₄ gas, B₂ H₆ H₂ gas, NO gas, and SiF₄ gas (99.999% pure) supplied from a gas cylinder (not shown) were additionally used for the lower layer, and AlCl₃ /He gas, SiF₄ gas, and N₂ gas (99.999% pure) were additionally used for the upper layer. The conditions for production are shown in Table 292. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 298

A light receiving member for electrophotography was produced in the same manner as in Example 294 excet that the H₂ gas cylinder was replaced by an Ar gas (99.9999% pure) cylinder, the CH₄ gas cylinder was replaced by an NH₃ gas (99.999% pure) cylinder, and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 293. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 299

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that CH₄ gas and B₂ H₆ /H₂ gas were additionally used for the lower layer and PH₃ /H₂ gas (99.999% pure) supplied from a gas cylinder (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 294. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 300

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the NO gas cylinder was replaced by an SiF₄ gas cylinder, and PH₃ /H₂ gas (note shown) was additionally used for the upper layer. The conditions for production are shown in Table 295. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 301

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that PH₃ /H₂ gas supplied from a gas cylinder (not shown) and N₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 296. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 302

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the GeH₄ gas cylinder was replaced by a GeF₄ gas (99.999% pure) cylinder for the lower layer, and CH₄ gas and B₂ H₆ /H₂ gas were additionally used for the upper layer. The conditions for production are shown in Table 297. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 303

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that Mg(C₅ H₅)₂ /He gas supplied from a closed vessel (not shown) was used, the B₂ H₆ gas cylinder was was replaced by a PH₃ H₂ gas cylinder, and SiF₄ gas supplied from a gas cylinder (not shown) was additionally used for the lower layer. The conditions for production are shown in Table 298. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 304

A light receiving member for electophotography was produced in the same manner as in Example 294 except that the CH₄ gas cylinder was replaced by an NH₃ gas (99.999% pure) cylinder, and NH₃ gas and SnH₄ gas (99.999% pure) supplied from a gas cylinder (not shown) were additionally used for the upper layer. The conditions for production are shown in Table 299. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 305

A light receiving member for electrophotography was produced in the same manner as in Example 299 except that CH₄ gas and GeH₄ gas were used for the lower layer and SiF₄ gas was additionally used for the upper layer. The conditions for production are shown in Table 300. According to the evaluation carried out in the same manner as in Example 299, it has improved performance for dots, coarseness, and layer peeling as in Example 299.

EXAMPLE 306

A light receiving member for electrophotography was produced in the same manner as in Example 302 except that the CH₄ gas was replaced by C₂ H₂ gas and PH₃ /H₂ gas from a gas cylinder (not shown) was used for the lower layer, and Si₂ F₆ gas (99.99% pure) supplied from a gas cylinder (not shown) and Si₂ H₆ gas (99.99% pure) were additionally used for the upper layer. The conditions for production are shown in Table 301. According to the evaluation carried out in the same manner as in Example 302, it has improved performance for dots, coarseness, and layer peeling as in Example 302.

EXAMPLE 307

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that Si₂ F₆ gas supplied from a gas cylinder (not shown) and NH₃ gas were additionally used. The conditions for production are shown in Table 302. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 308

A light receiving member for electrophotography was produced in the same manner as in Example 294 under the conditions shown in Table 303. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 309

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 80 mm. The conditions for production are shown in Table 304. According to the evaluation carried out in the same manner as in Example 294, except that a remodeled version of Canon's duplicating machine NP-9030 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 310

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 60 mm. The conditions for production are shown in Table 305. According to the evaluation carried out in the same manner as in Example 71, except that a remodeled version of Canon's duplicating machine NP-150Z was used, it has improved performance for dots, coarseness, and layer peeling as in Example 290.

EXAMPLE 311

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 30 mm. The conditions for production are shown in Table 306. According to the evaluation carried out in the same manner as in Example 294, except that a remodeled version of Canon's duplicating machine FC-5 was used, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 312

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that the cylindrical aluminum support was replaced by the one having an outside diameter of 15 mm. The conditions for production are shown in Table 307. According to the evaluation carried out in the same manner as in Example 294, except that an experimentally constructed electrophotographic apparatus was used, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 313

A light receiving member for electrophotography was produced in the same manner as in Example 309 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support lathed by a diamond point tool, which has a cross section as shown in FIG. 38, in which =25 μm and b=0.8 μm. According to the evaluation carried out in the same manner as in Example 309, it has improved performance for dots, coarseness, and layer peeling as in Example 309.

EXAMPLE 314

A light receiving member for electrophotography was produced in the same manner as in Example 309 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm. According to the evaluation carried out in the same manner as in Example 309, it has improved performance for dots, coarseness, and layer peeling as in Example 309.

EXAMPLE 315

A light receiving member for electrophotography was produced in the same manner as in Example 302 except that the CH₄ gas was replaced by C₂ H₂ gas and the cylindrical aluminum support was kept at 500° C. and the upper layer was composed of poly-Si(H,X). The conditions for production are shown in Table 308. According to the evaluation carried out in the same manner as in Example 302, it has improved performance for dots, coarseness, and layer peeling as in Example 302.

EXAMPLE 316

A light receiving member for electrophotography was prepared by the microwave glow discharge decomposition method in the same manner as in Example 23, except that Cu(C₄ H₇ N₂ O₂)₂ /He gas, SiF₄ gas, NO gas, GeH₄ gas, and B₂ H₆ gas were additionally used when the lower layer was formed. The conditions for production are shown in Table 309. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

The lower layer of the light receiving member for electrophotography obtained in Example 294 was analyzed by SIMS. It was found that silicon atoms, hydrogen atoms, and aluminum atoms are unevenly distributed in the layer thickness as intended.

EXAMPLE 317

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder and the GeH₄ gas cylinder was replaced by GeF₄ gas cylinder. The conditions for production are shown in Table 310. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 318

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the B₂ H₆ /H₂ gas cylinder was replaced by a PH₃ /H₃ gas cylinder, CH₄ gas was additionally used for the lower layer, and SiF₄ gas was used for all the layers. The conditions for production are shown in Table 311. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 319

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the CH₄ gas cylinder was replaced by an NH₃ gas cylinder, SnH₄ gas supplied from a gas cylinder (not shown) was used, and Mg(C₅ H₅)₂ /He gas supplied from a closed vessel (not shown) was used. The conditions for production are shown in Table 312. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 320

A light receiving member for electrophotography was produced in the same manner as in Example 299 except that B₂ H₆ /H₂ gas cylinder was replaced by a PH₃ /H₂ gas cylinder and SiF₄ gas was used. The conditions for production are shown in Table 313. According to the evaluation carried out in the same manner as in Example 299, it has improved performance for dots, coarseness, and layer peeling as in Example 299.

EXAMPLE 321

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and Si₂ H₆ gas was additionally used for the upper layer. The conditions for production are shown in Table 314. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 322

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the CH₄ gas cylinder was replaced by an NH₃ gas cylinder and the GeH₄ gas cylinder was replaced by a GeF₄ gas cylinder, and PH₃ /H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 315. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 323

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the cylindrical aluminum support was replaced by a mirror-finished cylindrical aluminum support dimpled by falling bearing balls, which has a cross section as shown in FIG. 39, in which c=50 μm and d=1 μm, and that the H₂ gas was replaced by He gas (not shown) and N₂ gas (not shown) was additionally used for the upper layer. The conditions for production are shown in Table 316. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 324

A light receiving member for electrophotography was produced in the same manner as in Example 71 except that SiH₄ gas, H₂ gas, SiF₄ gas, GeH₄ gas, CH₄ gas, B₂ H₆ /H₂ gas, NO gas, AlCl₃ /He gas, and Cu(C₄ H₇ N₂ O₂)₂ /He gas were used for all the layers, and PH₃ /H₂ gas supplied from a gas cylinder (not shown) was used for the upper layer. The conditions for production are shown in Table 317. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 325

A light receiving member for electrophotography was produced in the same manner as in Example 324 under the conditions shown in Table 318. According to the evaluation carried out in the same manner as in Example 324, it has improved performance for dots, coarseness, and layer peeling as in Example 324.

EXAMPLE 326

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder, and C₂ H₂ gas was additionally used for the upper layer. The conditions for production are shown in Table 319. Acccording to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 327

A light receiving member for electrophotography was produced in the same manner as in Example 294 except that the CH₄ gas cylinder was replaced by a C₂ H₂ gas cylinder and B₂ H₆ /H₂ gas cylinder was replaced by a PH₃ /H₂ gas cylinder. The conditions for production are shown in Table 320. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 328

A light receiving member for electrophotography was produced in the same manner as in Example 324 except that the H₂ S gas (99.999% pure) supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 321. According to the evaluation carried out in the same manner as in Example 324, it has improved performance for dots, coarseness, and layer peeling as in Example 324.

EXAMPLE 329

A light receiving member for electrophotography was produced in the same manner as in Example 324 except that C₂ H₂ gas supplied from a gas cylinder (not shown) was used. The conditions for production are shown in Table 322. According to the evaluation carried out in the same manner as in Example 324, it has improved performance for dots, coarseness, and layer peeling as in Example 324.

EXAMPLE 330

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 323. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 331

A light receiving member for electrophotography was produced in the same manner as in Example 329 except that Mg(C₅ H₅)₂ /He gas supplied from a closed vessel (not shown) was additionally used. The conditions for production are shown in Table 324. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 332

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 325. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 333

A light receiving member for electrophotography was produced in the same manner as in Example 331 under the conditions shown in Table 326. According to the evaluation carried out in the same manner as in Example 331, it has improved performance for dots, coarseness, and layer peeling as in Example 331.

EXAMPLE 334

A light receiving member for electrophotography was produced in the same manner as in Example 329 except that GeF₄ gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 327. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 335

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 328. According to the evaluation carried out in the same manner as in Example 106, it has improved performance for dots, coarseness, and layer peeling as in Example 106.

EXAMPLE 336

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 329. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 337

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 330. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 338

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 331. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 339

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 332. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 340

A light receiving member for electrophotography was produced in the same manner as in Example 329 except that H₂ S gas supplied from a gas cylinder (not shown) was additionally used. The conditions for production are shown in Table 333. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 341

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 334. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 342

A light receiving member for electrophotography was produced in the same manner as in Example 331 under the conditions shown in Table 335. According to the evaluation carried out in the same manner as in Example 331, it has improved performance for dots, coarseness, and layer peeling as in Example 331.

EXAMPLE 343

A light receiving member for electrophotography was produced in the same manner as in Example 329 except that NH₃ gas and H₂ S gas were additionally used. The conditions for production are shown in Table 336. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 344

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 337. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 345

A light receiving member for electrophotography was produced in the same manner as in Example 329 except that SnH₄ gas was additionally used. The conditions for production are shown in Table 338. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 346

A light receiving member for electrophotography was produced in the same manner as in Example 331 under the conditions shown in Table 339. According to the evaluation carried out in the same manner as in Example 331, it has improved performance for dots, coarseness, and layer peeling as in Example 331.

EXAMPLE 347

A light receiving member for electrophotography was produced in the same manner as in Example 331 except that Mg(C₅ H₅)₂ /He gas was additionally used. The conditions for production are shown in Table 340. According to the evaluation carried out in the same manner as in Example 331, it has improved performance for dots, coarseness, and layer peeling as in Example 331.

EXAMPLE 348

A light receiving member for electrophotography was produced in the same manner as in Example 329 under the conditions shown in Table 341. According to the evaluation carried out in the same manner as in Example 329, it has improved performance for dots, coarseness, and layer peeling as in Example 329.

EXAMPLE 349

A light receiving member for electrophotography was produced in the same manner as in Example 294 under the conditions shown in Table 342. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

EXAMPLE 350

A light receiving member for electrophotography was prepared in the same manner as Example 293, except that the target composed of Si, Al, and Mg was replaced by the one composed of Si, Al, and Cu for the lower layer. The conditions for production are shown in Table 343.

The upper layer of the light receiving member for electrophotography was prepared by the glow discharge decomposition method using the apparatus shown in FIG. 37 under the conditions shown in Table 343. According to the evaluation carried out in the same manner as in Example 294, it has improved performance for dots, coarseness, and layer peeling as in Example 294.

The lower layer of the light receiving member for electrophotography obtained in Example 350 was analyzed by SIMS. It was found that silicon atoms, hydrogen atoms, and aluminum atoms are unevenly distributed in the layer thickness as intended.

EXAMPLE 351

A light receiving member for electrophotography was prepared in the same manner as in Example 1, except that NaNH₂ /He gas was additionally used when the lower layer was formed. The conditions for production are shown in Table 344.

COMPARATIVE EXAMPLE 8

A light receiving member for electrophotography was prepared in the same manner as in Example 351, except that H₂ gas was not used when the lower layer was formed.

The lower layer of the light receiving member for electrophotography prepared in Example 351 and Comparative Example 8 was analyzed by SIMS (secondary ion mass spectrometer, Model IMS-3F, made by Cameca) to see the distribution of atoms in the layer thickness direction. The results are shown in FIGS. 43(a) and 43(b). In FIG. 43, the abscissa represents the time measured, which corresponds to the position in the layer thickness, and the ordinate represents the content of each atom in terms of relative values.

FIG. 43(a) shows the distribution of atoms in the layer thickness direction in Example 351. It is noted that aluminum atoms are distributed more in the part adjacent to the support and silicon atoms and hydrogen atoms are distributed more in the part adjacent to the upper layer.

FIG. 43(b) shows the distribution of atoms in the layer thickness direction in Comparative Example 8. It is noted that aluminum atoms are distributed more in the part adjacent to the support, silicon atoms are distributed more in the part adjacent to the upper layer, and hydrogen atoms are uniformly distributed throughout the layer.

The light receiving members for electrophotography prepared in Example 351 and Comparative Example 8 were evaluated for electrophotographic characteristics under various conditions by running them on an experimental electrophotographic apparatus which is a remodeled version of Canon's duplicating machine NP-7550.

The light receiving member for electrophotography was turned 1000 times, with all the chargers not in operation and the magnet roller as the cleaning roller coated with a positive toner. Images were reproduced from a black original by the ordinary electrophotographic process, and the number of dots which appeared on the images was counted. It was found that the number of dots in Example 351 was less than one-third that in Comparative Example 8.

The light receiving member for electrophotography was turned 20 times, with the grid of the separate charger intentionally fouled with massed paper powder so that anomalous discharge is liable to occur. After the removal of the massed paper powder, images were reproduced from a black original, and the number of dots that appeared in the images was counted. It was found that the number of dots in Example 351 was less than two-thirds that in Comparative Example 8.

The light receiving member for electrophotography was turned 500,000 times, with a roll made of high-density polyethylene (about 32 mm in diameter and 5 mm thick) pressed against it under a pressure of about 2 kg. The number of occurrence of the peeling of the light receiving layer was examined visually. It was found that the number of occurrence of peeling in Example 351 was less than a half that in Comparative Example 8.

As mentioned above, the light receiving members for electrophotography in Example 351 was superior in general to that in Comparative Example 8.

EXAMPLE 352

A light receiving member for electrophotography was prepared in the same manner as in Example 345, except that the flow rate of Al(CH₃)₃ /He gas was changed as shown in Table 345. The conditions for production are shown in Table 344.

COMPARATIVE EXAMPLE 9

A light receiving member for electrophotography was prepared in the same manner as in Example 351, except that the flow rate of Al(CH₃)₃ /He gas was changed as shown in Table 345. The conditions for production are shown in Table 344.

The light receiving members for electrophotography prepared in Example 352 and Comparative Example 9 were examined for the occurrence of layer peeling, with a roll made of high-density polyethylene pressed against them as in Example 351. The results are shown in Table 345. (The number of occurrence of layer peeling in Example 351 is regarded as 1.) In addition, the content of aluminum atoms in the upper part of the lower layer was determined by SIMS. The results are shown in Table 345.

As Table 345 shows, the layer peeling is less liable to occur in the upper region in the lower layer where the content of aluminum atoms is more than 20 atom%.

EXAMPLE 353

A light receiving member for electrophotography was prepared in the same manner as in Example 351, except that the temperature of the support was changed at a constant rate from 350° C. to 250° C. while the lower layer was being formed and the NaNH₂ was replaced by Y(Oi-C₃ H₇)₃, under the conditions shown in Table 344. According to the evaluation carried out in the same manner as in Example 351, it has improved performance for dots and layer peeling as in Example 351.

EXAMPLE 354

A light receiving member for electrophotography was prepared in the same manner as in Example 351, except that the RF power was changed at a constant rate from 50 mW/cm³ to 5 mW/cm³ while the lower layer was being formed and the NaNH₂ was replaced by Mn(CH₃)(CO)₅, under the conditions shown in Table 344. According to the evaluation carried out in the same manner as in Example 351, it has improved performance for dots and layer peeling as in Example 351.

EXAMPLE 355

A light receiving member for electrophotography was prepared in the same manner as in Example 351, except that the NaNH₂ was replaced by Zn(C₂ H₅)₂, under the conditions shown in Table 344. According to the evaluation carried out in the same manner as in Example 351, it has improved performance for dots and layer peeling as in Example 351.

EXAMPLE 356

A light receiving member for electrophotography was prepared in the same manner as in Example 351, except that the aluminum support was replaced by the one having an outside diameter of 30 mm and both the gas flow rate and RF power shown in Table 344 were reduced to one-third, under the conditions shown in Table 344. According to the evaluation carried out in the same manner as in Example 351, it has improved performance for dots and layer peeling as in Example 351.

EXAMPLE 357

A light receiving member for electrophotography was produced in the same manner as in Example 351 under the conditions shown in Table 347. According to the evaluation carried out in the same manner as in Example 351, it has improved performance for dots, coarseness, and layer peeling as in Example 351.

EXAMPLE 358

A light receiving member for electrophotography was prepared by the microwave glow discharge decomposition method in the same manner as in Example 23, except that SiF₄ gas and NaNH₂ /He gas were additionally used when the lower layer was formed. The conditions for production are shown in Table 348. According to the evaluation carried out in the same manner as in Example 351, it has improved performance for dots and layer peeling as in Example 351.

The distribution of atoms in the layer thickness direction in the lower layer was examined by SIMS in the same manner as in Example 351. The results are shown in FIG. 43(c). It was found that aluminum atoms, silicon atoms, and hydrogen atoms are distributed as in Example 351.

EXAMPLE 359

A light receiving member for electrophotography was prepared in the same manner as in Example 293, except that the target composed of Si, Al, and Mg used for the formation of the lower layer was replaced by the one composed of Si, Al, and Mn. The lower layer was formed under the conditions shown in Table 394. The upper layer was formed using the apparatus shown in FIG. 37 under the conditions shown in Table 349. According to the evaluation carried out in the same manner as in Example 351, it has improved performance for dots and layer peeling as in Example 351.

The distribution of atoms in the layer thickness direction in the lower layer was examined by SIMS in the same manner as in Example 351. The results are shown in FIG. 43(d). It was found that aluminum atoms, silicon atoms, and hydrogen atoms are distributed as in Example 351.

EXAMPLE 360

A light receiving member for electrophotography was produced in the same manner as in Example 1 under the conditions shown in Table 1, except that the GeH₄ gas was replaced by SnH₄ gas and the flow rate of SnH₄ gas was reduced to a half that of GeH₄ gas. According to the evaluation carried out in the same manner as in Example 1, it has improved performance for dots, coarseness, and layer peeling as in Example 1.

In the following Tables 1 to 349,

mark "*" means increase of a flow rate at constant proportion;

the mark "**" means decrease of a flow rate at constant proportion;

the term "S-side" means substrate side;

the term "UL-side" means upper layer side;

the term "LL-side" means lower layer side;

the term "U.1st LR-side" means 1st layer region side of the upper layer;

the term "U.2nd LR-side" means 2nd layer region side of the upper layer;

the term "U.3rd LR-side" means 3rd layer region side of the upper layer;

the term "U.4th LR-side" means 4th layer region side of the upper layer;

the term "U.5th LR-side" means 5th layer region side of the upper layer; and

the term "FS-side" means free surface side of the upper layer.

                                      TABLE 1                                      __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub. 4    500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 2                                      __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     AlCl.sub.3 /He                                                                             120 → 40**                                          Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                       50                                                                 (U · 2nd LR-side: 0.3 μm)                                                      50 → 0**                                                    H.sub.2     100                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   250    15      0.5  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   50    250    10      0.4  0.5                                  layer                                                                              CH.sub. 4   500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 3                                      __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.03                                     H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 10**                                                  (UL-side: 0.02 μm)                                                                      10                                                         Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                       50                                                                 (U · 2nd LR-side: 0.3 μm)                                                      50 → 0**                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   250    15      0.5  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   50    250    10      0.4  0.5                                  layer                                                                              CH.sub.4    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 4                                      __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150    0.5     0.3  0.02                                       H.sub.2   5 → 200*                                                                      ↓                                                                              ↓                                                AlCl.sub.3 /He  300    1.5                                                     (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             NO        10                                                                   H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                          region                                                                             NO        10                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   250    20      0.5  20                                     layer                                                                              H.sub.2   500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 5                                      __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                        1500 ppm                                                           SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0.1**                                                   B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                        1500 ppm                                                           GeH.sub. 4  0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                        __________________________________________________________________________

                                      TABLE 6                                      __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    10      0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          5                                                              2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                 3rd SiH.sub.4   400   250    10      0.5  15                                   layer                                                                              Ar          200                                                            region                                                                         4th SiH.sub.4   100   250    5       0.4  0.3                                  layer                                                                              NH.sub. 3   30                                                             region                                                                     __________________________________________________________________________

                                      TABLE 7                                      __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                          Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                         1000 ppm                                                          H.sub.2      100                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                         1000 ppm                                                          H.sub.2      100                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                      5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 8                                      __________________________________________________________________________     Order of                                                                               Gases and      Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                               lamination                                                                             their flow rates                                                                              temperature                                                                           power   pressure                                                                            thickness                           (layer name)                                                                           (SCCM)         (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                             __________________________________________________________________________     Lower layer                                                                            SiH.sub.4                                                                               50    330    5       0.4  0.05                                        H.sub.2  5 → 200*                                                       AlCl.sub.3 /He                                                                          200 → 20**                                             Upper                                                                              1st SiH.sub.4                                                                               100   330    10      0.4  1                                   layer                                                                              layer                                                                              GeH.sub.4                                                                               50                                                                region                                                                             CH.sub.4 20                                                                    PH.sub.3 (against SiH.sub.4)                                                            800 ppm                                                               H.sub.2  300                                                               2nd SiH.sub.4                                                                               100   330    10      0.4  3                                       layer                                                                              CH.sub.4 20                                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                            800 ppm                                                               H.sub.2  300                                                               3rd SiH.sub.4                                                                               400   330    25      0.5  25                                      layer                                                                              SiF.sub.4                                                                               10                                                                region                                                                             H.sub.2  800                                                               4th SiH.sub.4                                                                               100   350    15      0.4  5                                       layer                                                                              CH.sub.4 400                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                     5000 ppm                                                          5th SiH.sub.4                                                                               20    350    10      0.4  1                                       layer                                                                              CH.sub.4 400                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                     8000 ppm                                                      __________________________________________________________________________

                                      TABLE 9                                      __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300    1       0.3  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6                                                            region                                                                             (against SiH.sub.4)                                                                      1000 ppm                                                             CH.sub.4  20                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   300    20      0.5  20                                     layer                                                                              H.sub.2   200                                                              region                                                                         4th SiH.sub.4 50    300    20      0.4  5                                      layer                                                                              N.sub.2   500                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             3000 ppm                                                         5th SiH.sub.4 40    300    10      0.4  0.3                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 10                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                         Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                               AlCl.sub.3 /He                                                                              1 → 0**                                                2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              NO           10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                         __________________________________________________________________________

                                      TABLE 11                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                          Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           3rd SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                         5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 12                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 2nd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 13                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              4th SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub. 4 100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                           5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 14                                     __________________________________________________________________________     Order of                                                                               Gases and        Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates temperature                                                                           power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)           (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4                                                                               50      250    5       0.4  0.05                                      H.sub.2  5 → 200*                                                       AlCl.sub.3 /He                                                                          200 → 20**                                             Upper                                                                              1st SiH.sub.4                                                                               100     250    10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4                                                                               50                                                                region                                                                             C.sub.2 H.sub.2                                                                         10                                                                    PH.sub.3 (against SiH.sub.4)                                                            800 ppm                                                               H.sub.2  300                                                               2nd SiH.sub.4                                                                               100     250    10      0.4  3                                     layer                                                                              C.sub.2 H.sub.2                                                                         10                                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                            800 ppm                                                           H.sub.2                                                                            300                                                                        3rd Si.sub.2 H.sub.6                                                                        200     300    10      0.5  10                                    layer                                                                              H.sub.2  200                                                               region                                                                         4th SiH.sub.4                                                                               300     330    20      0.4  30                                    layer                                                                              C.sub.2 H.sub.2                                                                         50                                                                region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (S-side: 1 μm)                                                                       0 → 100 ppm*                                                   (UL-side: 29 μm)                                                                     100 ppm                                                           5th SiH.sub.4                                                                               200     330    10      0.4  1                                     layer                                                                              C.sub.2 H.sub.2                                                                         200                                                               region                                                                     __________________________________________________________________________

                                      TABLE 15                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         5th SiH.sub.4   100   300    5       0.4  0.7                                  layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                               500 ppm                                                    __________________________________________________________________________

                                      TABLE 16                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                              Layer                               lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                           thickness                           (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                             (μm)                             __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4 0.02                                        H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.4 1                                   layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2   100                                                              2nd SiH.sub.4 100   300    10      0.4 3                                       layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 300   300    20      0.5 20                                      layer                                                                              H.sub.2   500                                                              region                                                                         4th SiH.sub.4 100   300    5       0.4 1                                       layer                                                                              GeH.sub.4 10 → 50*                                                  region                                                                             H.sub. 2  300                                                              5th SiH.sub.4 100 → 40**                                                                    300    10      0.4 1                                       layer                                                                              CH.sub.4  100 → 600*                                                region                                                                     __________________________________________________________________________

                                      TABLE 17                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.5  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.3    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 18                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    0.7     0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.2 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   80    300    7       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   40                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          8                                                                  H.sub.2     100                                                            2nd SiH.sub.4   80    300    7       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   200   300    12      0.4  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   40    300    7       0.3  0.5                                  layer                                                                              GeH.sub.4   400                                                            region                                                                     __________________________________________________________________________

                                      TABLE 19                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   25    300    0.5     0.2  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 15**                                                  (UL-side: 0.01 μm)                                                                      15 → 5**                                            Upper                                                                              1st SiH.sub.4   60    300    5       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          6                                                                  H.sub.2     80                                                             2nd SiH.sub.4   60    300    5       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        6                                                                  (U · 3rd LR-side: 1 μm)                                                        6 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   150   300    10      0.4  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   30    300    5       0.3  0.5                                  layer                                                                              CH.sub.3    300                                                            region                                                                     __________________________________________________________________________

                                      TABLE 20                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   20    300    0.3     0.2  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       80 → 15**                                                   (UL-side: 0.01 μm)                                                                      15 → 5**                                            Upper                                                                              1st SiH.sub.4   40    300    3       0.2  1                                layer                                                                              layer                                                                              GeH.sub.4   20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          4                                                                  H.sub.2     80                                                             2nd SiH.sub.4   40    300    3       0.2  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        4                                                                  (U · 2nd LR-side: 1 μm)                                                        4 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   100   300    6       0.3  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   20    300    3       0.2  0.5                                  layer                                                                              CH.sub.4    200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 21                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50*   500    5       0.4  0.05                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                            Upper                                                                              1st SiH.sub.4 100   500    30      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             C.sub.2 H.sub.2                                                                          10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2   500                                                              2nd SiH.sub.4 100   500    30      0.4  3                                      layer                                                                              C.sub.2 H.sub.2                                                                          10                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2   500                                                              3rd SiH.sub.4 300   500    30      0.5  10                                     layer                                                                              H.sub.2   1500                                                             region                                                                         4th SiH.sub.4 200   500    30      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          10 → 20*                                                  region                                                                             NO        1                                                            __________________________________________________________________________

                                      TABLE 22                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             μW    Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                           discharging                                                                             pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                          power (mW/cm.sup.3)                                                                     (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 150   250    0.5      0.6  0.02                                      H.sub.2   20 → 500*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     400 → 80**                                                    (UL-side: 0.01 μm)                                                                    80 → 50**                                             Upper                                                                              1st SiH.sub.4 500   250    0.5     0.4  1                                  layer                                                                              layer                                                                              SiF.sub.4 20                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             GeH.sub.4 100                                                                  H.sub.2   300                                                              2nd SiH.sub.4 500   250    0.5     0.4  3                                      layer                                                                              SiF.sub.4 20                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   300                                                              3rd SiH.sub.4 700   250    0.5     0.5  20                                     layer                                                                              SiF.sub.4 H                                                                              30                                                               region                                                                             H.sub.2   500                                                              4th SiH.sub.4 150   250    0.5     0.3  1                                      layer                                                                              CH.sub.4  500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 23                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                         Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   C.sub.2 H.sub.2                                                                             10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                             4th SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 24                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                          Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           3rd SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                         4th SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                         5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 25                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         4th SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 26                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 S-side: 0.05 μm)                                                                      200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                           4th SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 27                                     __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50      250    5       0.4  0.05                                   H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                          Upper                                                                              1st SiH.sub.4   100     250    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100     250    10      0.4  3                                  layer                                                                              CH.sub.2 H.sub.2                                                                           10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            3rd SiH.sub.4   300     330    20      0.4  30                                 layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U · 2nd LR-side: 1 μm)                                                        0 → 100 ppm*                                                (U · 4th LR-side: 29 μm)                                                       100 ppm                                                        4th Si.sub.2 H.sub.6                                                                           200                                                            layer                                                                              H.sub.2     200     300    10      0.5  10                                 region                                                                         5th SiH.sub.4   200                                                            layer                                                                              CH.sub.2 H.sub.2                                                                           200     330    10      0.4  1                                  region                                                                     __________________________________________________________________________

                                      TABLE 28                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100                                                            layer                                                                              PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                        region                                                                             NO                250    10      0.4  3                                        (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm                                                         10 → 0                                                      H.sub.2     100                                                            3rd SiH.sub.4   300                                                            layer                                                                              NH.sub.3    30 → 50*                                                                      300    15      0.4  25                                   region                                                                             PH.sub. 3 (against SiH.sub.4)                                                              50 ppm                                                         4th SiH.sub.4   100                                                            layer                                                                              H.sub.2     300   300    5       0.2  8                                    region                                                                         5th SiH.sub.4   100                                                            layer                                                                              NH.sub.3    80 → 100*                                                                     300    5       0.4  0.7                                  region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        500 ppm                                                    __________________________________________________________________________

                                      TABLE 29                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                        1500 ppm                                                       3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                         4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                          __________________________________________________________________________

                                      TABLE 30                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                          Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4 (LL-side: 0.7 μm)                                                               25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                0.5 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                       __________________________________________________________________________

                                      TABLE 31                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                                  CH.sub.4  20                                                                   B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             NO        0.3                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.5                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              H.sub.2   100                                                              region                                                                             CH.sub.4  20                                                                   (against SiH.sub.4)                                                                      1000 ppm                                                             NO        0.2                                                                  SiF.sub.4 0.4                                                                  GeH.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.3                                                              3rd SiH.sub.4 100   300    10      0.5  3                                      layer                                                                              H.sub.2   200                                                              region                                                                             SiF.sub.4 5                                                                    CH.sub.4  1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.5 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.3                                                                  AlCl.sub.3 /He                                                                           0.2                                                              4th SiH.sub.4 100   300    25      0.5  30                                     layer                                                                              H.sub.2   200                                                              region                                                                             CH.sub.4  100                                                                  PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.2 ppm                                                              NO        0.2                                                                  SiF.sub.4 0.2                                                                  GeH.sub.4 0.1                                                                  AlCl.sub.3 /He                                                                           0.2                                                              5th SiH.sub.4 50    300    15      0.4  0.5                                    layer                                                                              CH.sub.4  500                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             5 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                NO        0.5                                                                  SiF.sub.4 0.6                                                                  GeH.sub.4 0.3                                                                  AlCl.sub.3 /He                                                                           0.4                                                          __________________________________________________________________________

                                      TABLE 32                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                             120 → 40**                                          Upper                                                                              1st SiH.sub.4   110   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                        1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                        1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                     H.sub.2     300                                                            3rd SiH.sub.4   100   250    15      0.5  25                                   layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     300                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                         4th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 33                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 Ph.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                     H.sub.2     300                                                            3rd SiH.sub.4   100   250    15      0.5  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             H.sub.2     300                                                                PH.sub.3 (against SiH.sub.4)                                                               40 ppm                                                         4th SiH.sub.4   100   250    15      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     150                                                            5th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 34                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                          Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4 (LL-side: 0.7 μm)                                                               25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3   0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3   0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                0.5 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3   0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                     __________________________________________________________________________

                                      TABLE 35                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub. 4   50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 36                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 37                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.03                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 10**                                                 (UL-side: 0.02 μm)                                                                       10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           10                                                                H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 38                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150    0.5     0.3  0.02                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                                              ← ←                                                  H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                                               300    1.5                                                     H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             NO        10                                                                   H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                          region                                                                             NO        10                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   250    20      0.5  20                                     layer                                                                              H.sub.2   500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 39                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                        1500 ppm                                                           SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        2                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0.1**                                                   B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                        1500 ppm                                                           GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                        __________________________________________________________________________

                                      TABLE 40                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    10      0.4  0.2                                      H.sub.2     5 → 200*                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          5                                                              2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                 3rd SiH.sub.4   400   250    10      0.5  15                                   layer                                                                              Ar          200                                                            region                                                                         4th SiH.sub.4   100   250    5       0.4  0.3                                  layer                                                                              NH.sub.3    30                                                             region                                                                     __________________________________________________________________________

                                      TABLE 41                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     H.sub.2      5 → 200*                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                          Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                         1000 ppm                                                          H.sub.2      100                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                         1000 ppm                                                          H.sub.2      100                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                      5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 42                                     __________________________________________________________________________     Order of                                                                               Gases and      Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                               lamination                                                                             their flow rates                                                                              temperature                                                                           power   pressure                                                                            thickness                           (layer name)                                                                           (SCCM)         (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                             __________________________________________________________________________     Lower layer                                                                            SiH.sub.4                                                                               50    330    5       0.4  0.05                                        PH.sub.3 (against SiH.sub.4)                                                            100 ppm                                                               H.sub.2  5 → 200*                                                       AlCl.sub.3 /He                                                                          200 → 20**                                             Upper                                                                              1st SiH.sub.4                                                                               100   330    10      0.4  1                                   layer                                                                              layer                                                                              GeH.sub.4                                                                               50                                                                region                                                                             CH.sub.4 20                                                                    PH.sub.3 (against SiH.sub.4)                                                            800 ppm                                                               H.sub.2  300                                                               2nd SiH.sub.4                                                                               100   330    10      0.4  3                                       layer                                                                              CH.sub.4 20                                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                            800 ppm                                                               H.sub.2  300                                                               3rd SiH.sub.4                                                                               400   330    25      0.5  25                                      layer                                                                              SiF.sub.4                                                                               10                                                                region                                                                             H.sub.2  800                                                               4th SiH.sub.4                                                                               100   350    15      0.4  5                                       layer                                                                              CH.sub.4 400                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                     5000 ppm                                                          5th SiH.sub.4                                                                               20    350    10      0.4  1                                       layer                                                                              CH.sub.4 400                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                     8000 ppm                                                      __________________________________________________________________________

                                      TABLE 43                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300    1       0.3  0.02                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6                                                            region                                                                             (against SiH.sub.4)                                                                      1000 ppm                                                             CH.sub.4  20                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   300    20      0.5  20                                     layer                                                                              H.sub.2   200                                                              region                                                                         4th SiH.sub.4 50    300    20      0.4  5                                      layer                                                                              N.sub.2   500                                                              region                                                                             PH.sub.3 (against SiH.sub.4 )                                                            3000 ppm                                                         5th SiH.sub.4 40    300    10      0.4  0.3                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 44                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                            H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                         Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                               AlCl.sub.3 /He                                                                              1 → 0**                                                2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              NO           10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                         __________________________________________________________________________

                                      TABLE 45                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2 S(against SiH.sub.4)                                                               10 ppm                                                             PH.sub.3 /H.sub.2 (100 ppm)                                                                5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                       50                                                                 (U · 2nd LR-side: 0.3 μm)                                                      50 → 0**                                                    CH.sub.4    20                                                                 PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     100                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                        20                                                                 (U · 3rd LR-side: 1 μm)                                                        20 → 0**                                                    PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     100                                                            3rd SiH.sub.4   300   300    20      0.5  5                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              CH.sub.4    100                                                            region                                                                         5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    600                                                            region                                                                     __________________________________________________________________________

                                      TABLE 46                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      B.sub.2 H.sub.6 /H.sub.2 (100 ppm)                                                         5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 47                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              4th SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                           5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 48                                     __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50      250    5       0.4  0.05                                   H.sub.2 S(against SiH.sub.4)                                                               3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                               100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                          Upper                                                                              1st SiH.sub.4   100     250    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100     250    10      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            3rd Si.sub.2 H.sub.6                                                                           200     300    10      0.5  10                                 layer                                                                              H.sub.2     200                                                            region                                                                         4th SiH.sub.4   300     330    20      0.4  30                                 layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U · 3rd LR-side: 1 μm)                                                        0 → 100 ppm*                                                (U · 5th LR-side: 29 μm)                                                       100 ppm                                                        5th SiH.sub.4   200     330    10      0.4  1                                  layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 49                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         5th SiH.sub.4   100   300    5       0.4  0.7                                  layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                               500 ppm                                                    __________________________________________________________________________

                                      TABLE 50                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6                                                                (against SiH.sub.4)                                                                      1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 300   300    20      0.5  20                                     layer                                                                              H.sub.2   500                                                              region                                                                         4th SiH.sub.4 100   300    5       0.4  1                                      layer                                                                              GeH.sub.4 10 → 50*                                                  region                                                                             H.sub.2   300                                                              5th SiH.sub.4 100 → 40**                                                                    300    10      0.4  1                                      layer                                                                              CH.sub.4  100 → 600*                                                region                                                                     __________________________________________________________________________

                                      TABLE 51                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    1       0.3  0.02                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2                                                                    3rd SiH.sub.4   300   300    15      0.5  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 52                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    0.7     0.3  0.02                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   80    300    7       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   40                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          8                                                                  H.sub.2     100                                                            2nd SiH.sub.4   80    300    7       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   200   300    12      0.4  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   40    300    7       0.3  0.5                                  layer                                                                              CH.sub.4    400                                                            region                                                                     __________________________________________________________________________

                                      TABLE 53                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   25    300    0.5     0.2  0.02                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 15**                                                  (UL-side: 0.01 μm)                                                                      15 → 5**                                            Upper                                                                              1st SiH.sub.4   60    300    5       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          6                                                                  H.sub.2     80                                                             2nd SiH.sub.4   60    300    5       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        6                                                                  (U · 3rd LR-side: 1 μm)                                                        6 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   150   300    10      0.4  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   30    300    5       0.3  0.5                                  layer                                                                              CH.sub.4    300                                                            region                                                                     __________________________________________________________________________

                                      TABLE 54                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   20    300    0.3     0.2  0.02                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       80 → 15**                                                   (UL-side: 0.01 μm)                                                                      15 → 5**                                            Upper                                                                              1st SiH.sub.4   40    300    3       0.2  1                                layer                                                                              layer                                                                              GeH.sub.4   20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          4                                                                  H.sub.2     80                                                             2nd SiH.sub.4   40    300    3       0.2  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · LR-side: 2 μm)                                                            4                                                                  (U · 3rd LR-side: 1 μm)                                                        4 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   100   300    6       0.3  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   20    300    3       0.2  0.5                                  layer                                                                              CH.sub.4    200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 55                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    500    5       0.4  0.05                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                            Upper                                                                              1st SiH.sub.4 100   500    30      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.2 50                                                               region                                                                             C.sub.2 H.sub.2                                                                          10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2   500                                                              2nd SiH.sub.4 100   500    30      0.4  3                                      layer                                                                              C.sub.2 H.sub.2                                                                          10                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2   500                                                              3rd SiH.sub.4 300   500    30      0.5  10                                     layer                                                                              H.sub.2   1500                                                             region                                                                         4th SiH.sub.4 200   500    30      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          10 → 20*                                                  region                                                                             NO        1                                                            __________________________________________________________________________

                                      TABLE 56                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             μW    Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                           discharging                                                                             pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                          power (mW/cm.sup.3)                                                                     (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 150   250    0.5      0.6  0.02                                      H.sub.2 S(against SiH.sub.4)                                                             3 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               H.sub.2   20 → 500*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     400 → 80**                                                    (UL-side: 0.01 μm)                                                                    80 → 50**                                             Upper                                                                              1st SiH.sub.4 500   250    0.5      0.4  1                                 layer                                                                              layer                                                                              SiF.sub.4 20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             GeH.sub.4 100                                                                  H.sub.2   300                                                              2nd SiH.sub.4 500   250    0.5      0.4  3                                     layer                                                                              SiF.sub.4 20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   300                                                              3rd SiH.sub.4 700   250    0.5      0.5  20                                    layer                                                                              SiF.sub.4 30                                                               region                                                                             H.sub.2   500                                                              4th SiH.sub.4 150   250    0.5      0.3  1                                     layer                                                                              CH.sub.4  500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 57                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                            H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                         Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   C.sub.2 H.sub.2                                                                             10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.4                                                                             10 → 20*                                               region                                                                             NO           1                                                             4th SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 58                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.02                                    H.sub.2 S(against SiH.sub.4)                                                                10 ppm                                                            PH.sub.3 /H.sub.2 (100 ppm)                                                                 5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                          Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           3rd SiH.sub.4    180   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                         4th SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                         5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 59                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      B.sub.2 H.sub.6 /H.sub.2 (100 ppm)                                                         5 → 200*                                                    AlCl.sub.3 He                                                                  (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub. 3   50                                                             region                                                                         4th SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 60                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        PH.sub.3 (against SiH.sub.4)                                                             100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             PH.sub.3 (against SiH.sub.4 )                                                            1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                           4th SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 61                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50     250    5       0.4  0.05                                    H.sub.2 S(against SiH.sub.4)                                                               3 ppm                                                              B.sub.2 H.sub.6 (against SiH.sub.4 )                                                       100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                          Upper                                                                              1st SiH.sub.4   100    250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100    250    10      0.4  3                                   layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            3rd SiH.sub.4   300    330    20      0.4  30                                  layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            (U · 2nd LR-side: 1 μm)                                                        0 → 100 ppm*                                                (U · 4th LR-side: 29 μm)                                                       100 ppm                                                        4th Si.sub.2 H.sub.6                                                                           200    300    10      0.5  10                                  layer                                                                              H.sub.2     200                                                            region                                                                         5th SiH.sub.4   200    330    10      0.4  1                                   layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 62                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      PH.sub.3 (against SiH.sub.4)                                                               100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              PH.sub.3 (against SiH.sub.4 )                                                              800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         4th SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    5       0.4  0.7                                  layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        500 ppm                                                    __________________________________________________________________________

                                      TABLE 63                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                         4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                          __________________________________________________________________________

                                      TABLE 64                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     H.sub.2      5 → 200*                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                          Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                           2nd SiH.sub.4    110   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                0.5 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                       __________________________________________________________________________

                                      TABLE 65                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                                  NO        0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                                  NO        0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              3rd SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  CH.sub.4  1                                                                    SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              4th SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             0.5 ppm                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                          __________________________________________________________________________

                                      TABLE 66                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                             120 → 40**                                          Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                     H.sub.2     300                                                            3rd SiH.sub. 4  100   250    15      0.5  25                                   layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     300                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                         4th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 67                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     PH.sub.3 (against SiH.sub.4)                                                               100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                     H.sub.2     300                                                            3rd SiH.sub.4   100   250    15      0.5  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             H.sub.2     300                                                                PH.sub.3 (against SiH.sub.4)                                                               40 ppm                                                         4th SiH.sub.4   100   250    15      0.5  3                                    layer                                                                              C.sub.2 h.sub.2                                                                            10                                                             region                                                                             H.sub.2     150                                                            5th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 68                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     H.sub.2      5 → 200*                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 0**                                                  (UL-side: 0.05 μm)                                                                       40 → 10**                                          Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                           (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         2nd SiH.sub.4    100                                                           layer                                                                              CH.sub. 4    20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100   300    10      0.4  3                                       SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                300 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub. 4)                                                               0.5 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                     __________________________________________________________________________

                                      TABLE 69                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                              120 → 40**                                                 NO           5                                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 70                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub. 4    500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 71                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.03                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 10**                                                 (UL-side: 0.02 μm)                                                                       10                                                                NO           5                                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.03 μm)                                                      50 → 0**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           10                                                                H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 72                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150    0.5     0.3  0.02                                       H.sub.2   5 → 200*                                                                      ↓                                                                              ↓                                                AlCl.sub.3 /He  300    1.5                                                     (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (againsst SiH.sub.4)                                                     100 ppm                                                              NO        5                                                            Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             NO        10                                                                   H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                          region                                                                             NO        10                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   250    20      0.5  20                                     layer                                                                              H.sub.2                                                                    region                                                                     __________________________________________________________________________

                                      TABLE 73                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            NO          5                                                          Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                         8 → 0.1**                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                        __________________________________________________________________________

                                      TABLE 74                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    10      0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   NO          1 → 5*                                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          5                                                              2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                 3rd SiH.sub.4   400   250    10      0.5  15                                   layer                                                                              Ar          200                                                            region                                                                         4th SiH.sub.4   100   250    5       0.4  0.3                                  layer                                                                              NH.sub.3    30                                                             region                                                                     __________________________________________________________________________

                                      TABLE 75                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     CH.sub.4     5 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.5 μm)                                                                         200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                               1st                                                                               SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                           4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                      5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 76                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    330    5       0.4  0.05                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                                    CH.sub.4  10                                                           Upper                                                                              1st SiH.sub.4 100   330    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              H.sub.2   300                                                              2nd SiH.sub.4 100   330    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              H.sub.2   300                                                              3rd SiH.sub.4 400   330    25      0.5  25                                     layer                                                                              SiF.sub.4 10                                                               region                                                                             H.sub.2   800                                                              4th SiH.sub.4 100   350    15      0.4  5                                      layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      5000 ppm                                                         5th SiH.sub.4 20    350    10      0.4  1                                      layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      8000 ppm                                                     __________________________________________________________________________

                                      TABLE 77                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300    1       0.3  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.1 μm)                                                                     30 → 10**                                                     NO        5                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                         region                                                                             CH.sub.4  20                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   300    20      0.5  20                                     layer                                                                              H.sub.2   200                                                              region                                                                         4th SiH.sub.4 50    300    20      0.4  5                                      layer                                                                              N.sub.2   500                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             3000 ppm                                                         5th SiH.sub.4 40    300    10      0.4  0.3                                    layer                                                                              CH.sub. 4 600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 78                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (TORR)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    CH.sub.4     10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                               AlCl.sub.3 /He                                                                              1 → 0**                                                2nd SIH.sub.4    100   250    15      0.4  3                                   layer                                                                              NO           10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                         __________________________________________________________________________

                                      TABLE 79                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  CH.sub.4     10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μ m)                                                        20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           3rd SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                         5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 80                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub. 2    300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 81                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        CH.sub.4  2 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                       Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              4th SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                           5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 82                                     __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50      250    5       0.4  0.05                                   C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                     Upper                                                                              1st SiH.sub.4   100     250    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100     250    10      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            3rd Si.sub.2 H.sub.6                                                                           200     300    10      0.5  10                                 layer                                                                              H.sub.2     200                                                            region                                                                         4th SiH.sub.4   300     330    20      0.4  30                                 layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub. 4)                                           (U · 3rd LR-side: 1 μm)                                                        0 → 100 ppm*                                                (U · 5th LR-side: 29 μm)                                                       100 ppm                                                        5th SiH.sub.4   200     330    10      0.4  1                                  layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 83                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         5th SiH.sub.4   100   300    5       0.4  0.7                                  layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                               500 ppm                                                    __________________________________________________________________________

                                      TABLE 84                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       H.sub.2   5 → 200                                                       AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     CH.sub.4  10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                      Upper                                                                              1st SiH.sub.4 100   300    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 300   300    20      0.5  20                                     layer                                                                              H.sub.2   500                                                              region                                                                         4th SiH.sub.4 100   300    5       0.4  1                                      layer                                                                              GeH.sub.4 10 → 50*                                                  region                                                                             H.sub.2   300                                                              5th SiH.sub.4 100 → 40**                                                                    300    10      0.4  1                                      layer                                                                              CH.sub.4  100 → 600*                                                region                                                                     __________________________________________________________________________

                                      TABLE 85                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.5  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 86                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    0.7     0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   80    300    7       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   40                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          8                                                                  H.sub.2     100                                                            2nd SiH.sub.4   80    300    7       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   200   300    12      0.4  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   40    300    7       0.3  0.5                                  layer                                                                              CH.sub.4    400                                                            region                                                                     __________________________________________________________________________

                                      TABLE 87                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   25    300    0.5     0.2  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 15**                                                  (UL-side: 0.01 μm)                                                                      15 → 5**                                                    NO          3                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   60    300    5       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          6                                                                  H.sub.2     80                                                             2nd SiH.sub.4   60    300    5       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        6                                                                  (U · 3rd LR-side: 1 μm)                                                        6 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   150   300    10      0.4  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   30    300    5       0.3  0.5                                  layer                                                                              CH.sub.4    300                                                            region                                                                     __________________________________________________________________________

                                      TABLE 88                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   20    300    0.3     0.2  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       80 → 15**                                                   (UL-side: 0.01 μm)                                                                      15 → 5**                                                    NO          2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   40    300    3       0.2  1                                layer                                                                              layer                                                                              GeH.sub.4   20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          4                                                                  H.sub.2     80                                                             2nd SiH.sub.4   40    300    3       0.2  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        4                                                                  (U · 3rd LR-side: 1 μm)                                                        4 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   100   300    6       0.3  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   20    300    3       0.2  0.5                                  layer                                                                              CH.sub.4    200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 89                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    500    5       0.4  0.05                                       C.sub.2 H.sub.2                                                                          5                                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                       Upper                                                                              1st SiH.sub.4 100   500    30      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             C.sub.2 H.sub.2                                                                          10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2   500                                                              2nd SiH.sub.4 100   500    30      0.4  3                                      layer                                                                              C.sub.2 H.sub.2                                                                          10                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2   500                                                              3rd SiH.sub.4 300   500    30      0.5  10                                     layer                                                                              H.sub.2   1500                                                             region                                                                         4th SiH.sub.4 200   500    30      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          10 → 20*                                                  region                                                                             NO        1                                                            __________________________________________________________________________

                                      TABLE 90                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             μW    Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                           discharging                                                                             pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                          power (mW/cm.sup.3)                                                                     (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 150   250    0.5      0.6  0.02                                      H.sub.2   20 → 500*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     400 → 80**                                                    (UL-side: 0.01 μm)                                                                    80 → 50**                                                     NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                      Upper                                                                              1st SiH.sub.4 500   250    0.5      0.4  1                                 layer                                                                              layer                                                                              SiF.sub.4 20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             GeH.sub.4 100                                                                  H.sub.2   300                                                              2nd SiH.sub.4 500   250    0.5      0.4  3                                     layer                                                                              SiF.sub.4 20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   300                                                              3rd SiH.sub.4 700   250    0.5      0.5  20                                    layer                                                                              SiF.sub.4 30                                                               region                                                                             H.sub. 2  500                                                              4th SiH.sub.4 150   250    0.5      0.3  1                                     layer                                                                              CH.sub.4  500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 91                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    C.sub.2 H.sub.2                                                                             10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   C.sub.2 H.sub.2                                                                             10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                             4th SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 92                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  CH.sub.4     10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           3rd SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                         4th SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                         5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 93                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub. 3   50                                                             region                                                                         4th SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 94                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        CH.sub.4  2 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     PH.sub.3 (against SiH.sub.4)                                                             10 ppm                                                       Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             H.sub.2   100                                                              3rd SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                           4th SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 95                                     __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50      250    5       0.4  0.05                                   C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                     Upper                                                                              1st SiH.sub.4   100     250    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100     250    10      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            3rd SiH.sub.4   300     330    20      0.4  30                                 layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U · 2nd LR-side: 1 μ m)                                                       0 → 100 ppm*                                                (U · 4th LR-side: 29 μm)                                                       100 ppm                                                        4th Si.sub.2 H.sub.6                                                                           200     300    15      0.5  10                                 layer                                                                              H.sub.2     200                                                            region                                                                         5th SiH.sub.4   200     330    10      0.4  1                                  layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 96                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             μW    Inner                                                                               Layer                           lamination                                                                             their flow rates  temperature                                                                           discharging                                                                             pressure                                                                            thickness                       (layer name)                                                                           (SCCM)            (°C.)                                                                          power (mW/cm.sup.3)                                                                     (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5        0.4  0.2                                     NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10       0.4  1                               layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   250    10       0.4  3                                   layer                                                                              PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   300    15       0.4  25                                  layer                                                                              NH.sub.3    30 → 5**                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         4th SiH.sub.4   100   300    5        0.2  8                                   layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    5        0.4  0.7                                 layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        500 ppm                                                    __________________________________________________________________________

                                      TABLE 97                                     __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                          Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       3rd SiH.sub. 4  300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                         4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                          __________________________________________________________________________

                                      TABLE 98                                     __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     CH.sub.4     5 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                0.3 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                       __________________________________________________________________________

                                      TABLE 99                                     __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        CH.sub.4  2 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO        0.1                                                          Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                                  CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             NO        0.3                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.5                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              H.sub.2   100                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             NO        0.2                                                                  SiF.sub.4 0.4                                                                  GeH.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.3                                                              3rd SiH.sub.4 100   300    10      0.5  3                                      layer                                                                              H.sub.2   200                                                              region                                                                             SiF.sub.4 5                                                                    CH.sub.4  1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.5 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.3                                                                  AlCl.sub.3 /He                                                                           0.2                                                              4th SiH.sub.4 100   300    25      0.5  30                                     layer                                                                              H.sub.2   200                                                              region                                                                             CH.sub.4  100                                                                  PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.2 ppm                                                              NO        0.2                                                                  SiF.sub.4 0.2                                                                  GeH.sub.4 0.1                                                                  AlCl.sub.3 /He                                                                           0.2                                                              5th SiH.sub.4 50    300    15      0.4  0.5                                    layer                                                                              CH.sub.4  500                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             5 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                NO        0.5                                                                  SiF.sub.4 0.6                                                                  GeH.sub.4 0.3                                                                  AlCl.sub.3 /He                                                                           0.4                                                          __________________________________________________________________________

                                      TABLE 100                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     NO          5                                                                  H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                             120 → 40**                                                  C.sub.2 H.sub.2                                                                            5                                                          Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                     H.sub.2     300                                                            3rd SiH.sub.4   100   250    15      0.5  25                                   layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     300                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                         4th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 101                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  C.sub.2 H.sub.2                                                                            5                                                                  PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                     Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U ·  3rd LR-side: 1 μm)                                                       3 → 0**                                                     H.sub.2     300                                                            3rd SiH.sub.4   100   250    15      0.5  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             H.sub.2     300                                                                PH.sub.3 (against SiH.sub.4)                                                               40 ppm                                                         4th SiH.sub.4   100   250    15      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     150                                                            5th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 102                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     CH.sub.4     2 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  NO           0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3   0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3   0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                         5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                0.5 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3   0.1                                                               GeH.sub.4    0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                     __________________________________________________________________________

                                      TABLE 103                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO        5                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd SiH.sub.4 300   300    20      0.5  5                                      layer                                                                              H.sub.2   300                                                              region                                                                             C.sub.2 H.sub.2                                                                          0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.1                                                                  GeH.sub.4 0.1                                                              4th SiH.sub.4 105   300    15      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 104                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              C.sub.2 H.sub.2                                                                          3                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub. 4                                                                               0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd SiH.sub.4 300   300    20      0.5  7                                      layer                                                                              H.sub.2   300                                                              region                                                                             C.sub.2 H.sub.2                                                                          0.1                                                                  NO        2                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.1                                                              4th SiH.sub.4 100   300    15      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 105                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     C.sub.2 H.sub.2                                                                          3                                                                    NO        5                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd SiH.sub.4 300   300    20      0.5  3                                      layer                                                                              C.sub.2 H.sub.2                                                                          0.5 → 2*                                                  region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.1                                                              4th SiH.sub.4 100   300    15      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 106                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    1       0.4  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side 0.05 μm)                                                                      200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     NO        5                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub. 2                                                                         0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  8                                      layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          1                                                                    GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      5 → 0.3 ppm**                                                 H.sub.2   300                                                              4th SiF.sub.4 0.5   300    15      0.4  20                                     layer                                                                              AlCl.sub.3 /He                                                                           0.1                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.4                                                          __________________________________________________________________________

                                      TABLE 107                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub. 4  0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                C.sub.2 H.sub.2                                                                            0.1                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.2                                                            4th AlCl.sub.3 /He                                                                             0.1   300    15      0.4  20                                   layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 1 μm)                                                        0.1 → 15*                                                   (U · 5th LR-side: 19 μm)                                                       15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.6                                                        __________________________________________________________________________

                                      TABLE 108                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   20    250    1       0.4  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       80 → 15**                                                   (UL-side: 0.01 μm)                                                                      15 → 5**                                                    C.sub.2 H.sub.2                                                                            5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                H.sub.2     150                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub. 2                                                                           0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  2                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th AlCl.sub.3 /He                                                                             0.1   300    15      0.4  20                                   layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 5 μm)                                                        0.1 → 13*                                                   (U · 5th LR-side: 15 μm)                                                       13 → 17*                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             1                                                                  GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 109                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   300    10      35   1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      35   3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.6                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             H.sub.2     300                                                                SiH.sub.4   300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.2                                                            4th SiF.sub.4   0.5   300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 19 μm)                                                       15                                                                 (U · 5th LR-side: 1 μm)                                                        15 → 30*                                                    SiH.sub.4                                                                      (U · 3rd LR-side: 19 μm)                                                       100                                                                (U · 5th LR-side: 1 μm)                                                        100 → 50**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.3                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.5                                                        __________________________________________________________________________

                                      TABLE 110                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    5       0.4  0.05                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO        5                                                                    C.sub.2 H.sub.2                                                                          10                                                                   H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th AlCl.sub.3 /He                                                                           0.1                                                              layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               NO        0.1                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.4                                                          __________________________________________________________________________

                                      TABLE 111                                    __________________________________________________________________________     Order of                                                                               Gases and            Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                         lamination                                                                             their flow rates     temperature                                                                           power   pressure                                                                            thickness                     (layer name)                                                                           (SCCM)               (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                       __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 20         300    0.3     0.2  0.02                                  NO        2                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 100*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     80 → 15**                                                     (UL-side: 0.01 μm)                                                                    15 → 5**                                              Upper                                                                              1st SiH.sub.4 100        300    10      35   1                             layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100        300    10      35   3                                 layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1        300    20      0.5  6                                 layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th SiF.sub.4 0.5        300    15      0.4  20                                layer                                                                              AlCl.sub.3 /He                                                                           0.1                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      12 ppm → 0.3 ppm**                                            NO        0.1                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50         300    10      0.4  0.5                               layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.4                                                          __________________________________________________________________________

                                      TABLE 112                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300    1       0.3  0.02                                       C.sub.2 H.sub.2                                                                          5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.6                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             8 ppm                                                                NO        0.1                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 113                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50      250    1       0.4  0.02                                     NO        5                                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 1                                                                3rd AlCl.sub.3 /He                                                                           0.1     300    20      0.5  5                                    layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th SiF.sub.4 0.5     300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                           0.1                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             10 → 0.3 ppm**                                                NO        0.1                                                                  GeH.sub.4 0.3                                                              5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  GeH.sub.4 0.5                                                          __________________________________________________________________________

                                      TABLE 114                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    5       0.4  0.03                                       NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 10**                                                    (UL-side: 0.01 μm)                                                                    10                                                                   H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                        Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.7                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            4th AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.3                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.7                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                        __________________________________________________________________________

                                      TABLE 115                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperatures                                                                          power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300    1       0.3  0.02                                       NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO(against SiH.sub.4)                                                                    800 ppm                                                              C.sub.2 H.sub.2                                                                          10                                                                   B.sub.2 H.sub.6                                                                          10                                                                   SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300    15      0.4  10                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 116                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150    0.5     0.3  0.02                                       NO        5     ↓                                                                              ↓                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                                              300    1.5                                                     H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub. 3 /He                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  30                                     layer                                                                              AlCl.sub.3 /He                                                                           0.1                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 117                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       NO        5                                                                    H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.7                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            4th AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.3                                                                  NH.sub.3  100                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.5                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                        __________________________________________________________________________

                                      TABLE 118                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub. 4                                                                               10 → 100*                                                                     250    5       0.4  0.2                                        NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  10                                     layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  20                                     layer                                                                              AlCl.sub.3 /He                                                                           0.1                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              N.sub.2   500                                                                  NO        0.1                                                                  GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 119                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 25    300    0.5     0.3  0.02                                       NO        3                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 100*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 15**                                                    (UL-side: 0.01 μm)                                                                    15 → 5**                                              Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.5                                                              region                                                                             H.sub.2   300                                                                  SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.3                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.5                                                          __________________________________________________________________________

                                      TABLE 120                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.3  0.02                                       NO        5                                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                      Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub. 2  150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub. 2 H.sub.2                                                                         0.1                                                                  GeH.sub.4 1                                                                3rd AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               GeH.sub.4 0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300    20      0.4  4                                      layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              H.sub.2   300                                                                  NO        0.1                                                                  GeH.sub.4 0.3                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.5                                                          __________________________________________________________________________

                                      TABLE 121                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    5       0.4  0.05                                       NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                           120 → 40**                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   PH.sub.3 (against SiH.sub.4)                                                             8 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300    20      0.5  6                                      layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  NO        0.1                                                                  PH.sub.3 (against SiH.sub.4)                                                             0.1 ppm                                                              H.sub.2   300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.2                                                          __________________________________________________________________________

                                      TABLE 122                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                       300    10      0.4  0.2                                      NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 0**                                                     (UL-side: 0.15 μm)                                                                    40 → 10**                                             Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1     300    15      0.4  20                                   layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      12 → 0.3 ppm**                                                NO        0.1                                                                  GeH.sub.4 0.1                                                              4th AlCl.sub.3 /He                                                                           0.1     300    20      0.5  3                                    layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                              5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 123                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                              120 → 40**                                                 NO           5                                                                 SiF.sub.4    5                                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 124                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      100                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 125                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.03                                    SiF.sub.4    2                                                                 H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 10**                                                 (UL-side: 0.02 μm)                                                                       10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           10                                                                GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                               2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U ·  3rd LR-side: 1 μm)                                                        10 → 0**                                               3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 126                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150    0.5     0.3  0.02                                       H.sub.2   5 → 200*                                                                      ↓                                                                              ↓                                                AlCl.sub.3 /He  300    1.5                                                     (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO        5                                                                    SiF.sub.4 5                                                            Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             NO        10                                                                   H.sub.2   100                                                              2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                          region                                                                             NO        10                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   250    20      0.5  20                                     layer                                                                              H.sub. 2  500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 127                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50     250    1       0.3  0.02                                    SiF.sub.4   5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            NO          4                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   100    250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             NO          4                                                                  SiF.sub.4   0.5                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           He          400                                                                CH.sub.4    2                                                                  AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100    250    10      0.4  4                                   layer                                                                              GeH.sub.4   0.3                                                            region                                                                             NO                                                                             (U · 1st LR-side: 3 μm)                                                        4                                                                  (U · 3rd LR-side: 1 μm)                                                        4 → 0.1**                                                   SiF.sub.4   0.3                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           He          400                                                                CH.sub.4    2                                                                  AlCl.sub.3 /He                                                                             0.2                                                            3rd SiH.sub.4   300    250    25      0.6  25                                  layer                                                                              GeH.sub.4   0.1                                                            region                                                                             NO          0.1                                                                SiF.sub.4   0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.5 ppm                                                            He          500                                                                CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                            4th SiH.sub.4   20     250    15      0.4  1                                   layer                                                                              GeH.sub.4   0.2                                                            region                                                                             NO          0.3                                                                SiF.sub.4   1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1 ppm                                                              N.sub.2     0.8                                                                CH.sub.4    400                                                                AlCl.sub.3 /He                                                                             0.3                                                        __________________________________________________________________________

                                      TABLE 128                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    10      0.4  0.2                                      SiF.sub.4   1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   NO          1 → 5*                                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          5                                                                  SiF.sub.4   10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U ·  3rd LR-side: 1 μm)                                                       5 → 0**                                                     SiF.sub.4   10                                                             3rd SiH.sub.4   400   250    10      0.5  15                                   layer                                                                              Ar          200                                                            region                                                                             SiF.sub.4   40                                                             4th SiH.sub.4   100   250    5       0.4  0.3                                  layer                                                                              NH.sub.3    30                                                             region                                                                             SiF.sub.4   10                                                         __________________________________________________________________________

                                      TABLE 129                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     CH.sub.4     5 → 25*                                                    SiF.sub.4    1 → 10*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                      5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 130                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    330    5       0.4  0.05                                       SiF.sub.4 5                                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                                    CH.sub.4  10                                                           Upper                                                                              1st SiH.sub.4 100   330    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              H.sub.2   300                                                              2nd SiH.sub.4 100   330    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              H.sub.2   300                                                              3rd SiH.sub.4 400   330    25      0.5  25                                     layer                                                                              SiF.sub.4 10                                                               region                                                                             H.sub.2   800                                                              4th SiH.sub.4 100   350    15      0.4  5                                      layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      5000 ppm                                                         5th SiH.sub.4 20    350    10      0.4  1                                      layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      8000 ppm                                                     __________________________________________________________________________

                                      TABLE 131                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiF.sub.4 5     300    1       0.3  0.02                                       SiH.sub.4 50                                                                   H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     NO        5                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300    10      0.4  3                                      layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                         region                                                                             CH.sub.4  20                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   300    20      0.5  20                                     layer                                                                              H.sub.2   200                                                              region                                                                         4th SiH.sub.4 50    300    20      0.4  5                                      layer                                                                              N.sub.2   500                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             3000 ppm                                                         5th SiH.sub.4 40    300    10      0.4  0.3                                    layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 132                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiF.sub.4    5     250    5       0.4  0.05                                    SiH.sub.4    50                                                                CH.sub.4     10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                               AlCl.sub.3 /He                                                                              1 → 0**                                                2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              NO           10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                         __________________________________________________________________________

                                      TABLE 133                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.3  0.02                                    SiF.sub.4    10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                          Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1.5                             layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.8 μm)                                                                        40                                                                (U · 2nd LR-side: 0.7 μm)                                                       40 → 0**                                                   SiF.sub.4    5                                                                 PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               CH.sub.4     20                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 →  0**                                                  SiF.sub.4    5                                                                 PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                           3rd SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            4th SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    4                                                             5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    6                                                         __________________________________________________________________________

                                      TABLE 134                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 135                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        CH.sub.4  2 → 20*                                                       SiF.sub.4 1 → 10*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                       Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                                  SiF.sub.4 10                                                               2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                                  SiF.sub.4 10                                                               3rd SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              4th SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               SiF.sub.4 5                                                                5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                             SiF.sub.4 5                                                            __________________________________________________________________________

                                      TABLE 136                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiF.sub.6   5      250    5       0.4  0.05                                    SiH.sub.4   50                                                                 C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                     Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            3rd Si.sub.2 H.sub.6                                                                           200   300    10      0.5  10                                   layer                                                                              H.sub.2     200                                                            region                                                                             Si.sub.2 F.sub.6                                                                           10                                                             4th SiH.sub.4   300   330    20      0.4  30                                   layer                                                                              C.sub.2 H.sub. 2                                                                           50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U · 3rd LR-side: 1 μm)                                                        0 → 100 ppm*                                                (U · 5th LR-side: 29 μm)                                                       100 ppm                                                        5th SiH.sub.4   200   330    10      0.4  1                                    layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 137                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      NO          1 → 10*                                                     Si.sub.2 F.sub.6                                                                           1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                                SiF.sub.6   10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 1 μm)                                                        10                                                                 (U · 3rd LR-side: 29 μ m)                                                      10 → 0**                                                    H.sub.2     100                                                                Si.sub.2 F.sub.6                                                                           10                                                             3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                             Si.sub.2 F.sub.6                                                                           10                                                             4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                             Si.sub.2 F.sub.6                                                                           30                                                             5th SiH.sub.4   100   300    5       0.4  0.7                                  layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                               500 ppm                                                            Si.sub.2 F.sub.6                                                                           10                                                         __________________________________________________________________________

                                      TABLE 138                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   5     250    1       0.4  0.02                                     SiH.sub.4   50                                                                 H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   CH.sub.4    10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             CH.sub.4    20                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              CH.sub.4    20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           H.sub.2     100                                                            3rd SiH.sub.4   300   300    20      0.5  20                                   layer                                                                              H.sub.2     500                                                            region                                                                         4th SiH.sub.4   100   300    5       0.4  1                                    layer                                                                              GeH.sub.4   10 → 50*                                                region                                                                             H.sub.2     300                                                            5th SiH.sub.4   100 → 40**                                                                    300    10      0.4  1                                    layer                                                                              CH.sub.4    100 → 600*                                              region                                                                     __________________________________________________________________________

                                      TABLE 139                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   5     300    1       0.3  0.02                                     SiH.sub.4   50                                                                 H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.5  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 140                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    0.7     0.3  0.02                                     SiF.sub.4   5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   80    300    7       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   40                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          8                                                                  H.sub.2     100                                                            2nd SiH.sub.4   80    300    7       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   200   300    12      0.4  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   40    300    7       0.3  0.5                                  layer                                                                              CH.sub.4    400                                                            region                                                                     __________________________________________________________________________

                                      TABLE 141                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   25    300    0.5     0.2  0.02                                     SiF.sub.4   3                                                                  H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 15**                                                  (UL-side: 0.01 μm)                                                                      15 → 5**                                                    NO          3                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   60    300    5       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          6                                                                  H.sub.2     80                                                             2nd SiH.sub.4   60    300    5       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        6                                                                  (U · 3rd LR-side: 1 μm)                                                        6 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   150   300    10      0.4  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   30    300    5       0.3  0.5                                  layer                                                                              CH.sub.4    300                                                            region                                                                     __________________________________________________________________________

                                      TABLE 142                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   2     300    0.3     0.2  0.02                                     SiH.sub.4   20                                                                 H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       80 → 15**                                                   UL-side: 0.01 μm)                                                                       15 → 5**                                                    NO          2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                     Upper                                                                              1st SiH.sub.4   40    300    3       0.2  1                                layer                                                                              layer                                                                              GeH.sub.4   20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          4                                                                  H.sub.2     80                                                             2nd SiH.sub.4   40    300    3       0.2  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        4                                                                  (U · 3rd LR-side: 1 μm)                                                        4 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   100   300    6       0.3  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   20    300    3       0.2  0.5                                  layer                                                                              CH.sub.4    200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 143                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   5     500    5       0.4  0.05                                     SiH.sub.4   50                                                                 C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                     Upper                                                                              1st SiH.sub.4   100   500    30      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     500                                                            2nd SiH.sub.4   100   500    30      0.4  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     500                                                            3rd SiH.sub.4   300   500    30      0.5  10                                   layer                                                                              H.sub.2     1500                                                           region                                                                         4th SiH.sub.4   200   500    30      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            10 → 20*                                                region                                                                             NO          1                                                          __________________________________________________________________________

                                      TABLE 144                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             μW    Inner                                                                               Layer                           lamination                                                                             their flow rates  temperature                                                                           discharging                                                                             pressure                                                                            thickness                       (layer name)                                                                           (SCCM)            (°C.)                                                                          power (mW/cm.sup.3)                                                                     (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   10    250    0.5      0.6  0.02                                    SiH.sub.4   150                                                                H.sub.2     20 → 500*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       400 → 80**                                                  (UL-side: 0.01 μm)                                                                      80 → 50**                                                   NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   500   250    0.5      0.4  1                               layer                                                                              layer                                                                              SiF.sub.4   20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           GeH.sub.4   100                                                                H.sub.2     300                                                            2nd SiH.sub.4   500   250    0.5      0.4  3                                   layer                                                                              SiF.sub.4   20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           H.sub.2     300                                                            3rd SiH.sub.4   700   250    0.5      0.5  20                                  layer                                                                              SiF.sub.4   30                                                             region                                                                             H.sub.2     500                                                            4th SiH.sub.4   150   250    0.5      0.3  1                                   layer                                                                              CH.sub.4    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 145                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiF.sub.4    5     250    5       0.4  0.05                                    SiH.sub.4    50                                                                C.sub.2 H.sub.2                                                                             10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   C.sub.2 H.sub.2                                                                             10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                             4th SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 146                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4 0.02                                     SiF.sub.4    5                                                                 H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  CH.sub.4     10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    10                                                            3rd SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    10                                                            4th SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    5                                                         __________________________________________________________________________

                                      TABLE 147                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      SiF.sub.4   1 → 10*                                                     NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         4th SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 148                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      SiF.sub.4   1 → 10*                                                     CH.sub.4    1 → 20*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   PH.sub.3 (against SiH.sub.4)                                                               20 ppm                                                     Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   30                                                             region                                                                             SiF.sub.4   10                                                                 PH.sub.3 (against SiH.sub.4)                                                               1000 ppm                                                           H.sub.2     100                                                                CH.sub.4    20                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              CH.sub.4    20                                                             region                                                                             SiF.sub.4   10                                                                 PH.sub.3 (against SiH.sub.4)                                                               1000 ppm                                                           H.sub.2     100                                                            3rd SiH.sub.4   100   300    15      0.4  30                                   layer                                                                              PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         region                                                                             SiF.sub.4   10                                                                 CH.sub.4    150                                                            4th SiH.sub.4   100   300    5       0.4  3                                    layer                                                                              H.sub.2     200                                                            region                                                                             SiF.sub.4   5                                                              5th SiH.sub.4   50    300    10      0.4  0.7                                  layer                                                                              CH.sub.4    600                                                            region                                                                             SiF.sub.4   3                                                          __________________________________________________________________________

                                      TABLE 149                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   5       250    5       0.4  0.05                                   SiH.sub.4   50                                                                 C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                     Upper                                                                              1st SiH.sub.4   100     250    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100     250    10      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            H.sub.2     300                                                            3rd SiH.sub.4   300     330    20      0.4  30                                 layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U ·  2nd LR-side: 1 μm)                                                       0 → 100 ppm*                                                (U · 4th LR-side: 29 μm)                                                       100 ppm                                                        4th Si.sub.2 H.sub.4                                                                           200     300    10      0.5  10                                 layer                                                                              H.sub.2     200                                                            region                                                                         5th SiH.sub.4   200     330    10      0.4  1                                  layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 150                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             μW    Inner                                                                               Layer                           lamination                                                                             their flow rates  temperature                                                                           discharging                                                                             pressure                                                                            thickness                       (layer name)                                                                           (SCCM)            (°C.)                                                                          power (mW/cm.sup.3)                                                                     (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5        0.4  0.2                                     SiF.sub.4   1 → 10*                                                     NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10       0.4  1                               layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            NO          10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   250    10       0.4  3                                   layer                                                                              PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   300    15       0.4  25                                  layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         4th SiH.sub.4   100   300    5        0.2  8                                   layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    5        0.4  0.7                                 layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        500 ppm                                                    __________________________________________________________________________

                                      TABLE 151                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   5     250    1       0.3  0.02                                     SiH.sub.4   50                                                                 H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                          Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                         4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                          __________________________________________________________________________

                                      TABLE 152                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     SiF.sub.4    1 → 10*                                                    CH.sub.4     5 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4 (LL-side: 0.7 μm)                                                               25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                           2nd SiH.sub.4    100   300    10      4    3                                   layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                           5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                0.5 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               GeH.sub.4    0.1                                                       __________________________________________________________________________

                                      TABLE 153                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      SiF.sub.4   1 → 10*                                                     CH.sub.4    2 → 20*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            NO          0.1                                                        Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     100                                                                CH.sub.4    20                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           NO          0.3                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.5                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              H.sub.2     100                                                            region                                                                             CH.sub.4    20                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           NO          0.2                                                                SiF.sub.4   0.4                                                                GeH.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.3                                                            3rd SiH.sub.4   100   300    10      0.5  3                                    layer                                                                              H.sub.2     200                                                            region                                                                             SiF.sub.4   5                                                                  CH.sub.4    1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.5 ppm                                                            NO          0.1                                                                GeH.sub.4   0.3                                                                AlCl.sub.3 He                                                                              0.2                                                            4th SiH.sub.4   100   300    25      0.5  30                                   layer                                                                              H.sub.2     200                                                            region                                                                             CH.sub.4    100                                                                PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.2 ppm                                                            NO          0.2                                                                SiF.sub.4   0.2                                                                GeH.sub.4   0.1                                                                AlCl.sub.3 /He                                                                             0.2                                                            5th SiH.sub.4   50    300    15      0.4  0.5                                  layer                                                                              CH.sub.4    500                                                            region                                                                             PH.sub.3 (against SiH.sub.4)                                                               5 ppm                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1 ppm                                                              NO          0.5                                                                SiF.sub.4   0.6                                                                GeH.sub.4   0.3                                                                AlCl.sub.3 /He                                                                             0.4                                                        __________________________________________________________________________

                                      TABLE 154                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiF.sub.4   5     250    5       0.4  0.05                                     SiH.sub.4   50                                                                 NO          5                                                                  H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                             120 → 40**                                                  C.sub.2 H.sub.2                                                                            5                                                          Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                                SiF.sub.4   5                                                              2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                     H.sub.2     300                                                                SiF.sub.4   5                                                              3rd SiH.sub.4   100   250    15      0.5  25                                   layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     300                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                             SiF.sub.4   5                                                              4th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                                 SiF.sub.4   3                                                          __________________________________________________________________________

                                      TABLE 155                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     SiF.sub.4   5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  C.sub.2 H.sub.2                                                                            5                                                                  PH.sub.3    10 ppm                                                     Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO          3                                                                  H.sub.2     300                                                            2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U ·  3rd LR-side: 1 μm)                                                       3 → 0**                                                     H.sub.2     300                                                            3rd SiH.sub.4   100   250    15      0.5  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             H.sub.2     300                                                                PH.sub.3 (against SiH.sub.4)                                                               40 ppm                                                         4th SiH.sub.4   100   250    15      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     150                                                            5th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 156                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.5  0.2                                     SiF.sub.4    1 → 10*                                                    CH.sub.4     2 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           H.sub.2 S(against SiH.sub.4)                                                                0.3 ppm                                                           NO           0.1                                                       Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             NO           0.1                                                               SiF.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               CH                                                                             (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  H.sub.2 S(against SiH.sub.4)                                                                0.2 ppm                                                           AlCl.sub.3 /He                                                                              0.5                                                           2nd SiH.sub.4    100   300    10      0.4  2                                   layer                                                                              GeH.sub.4    0.3                                                           region                                                                             NO           0.1                                                               SiF.sub.4    0.3                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               CH.sub.4     20                                                                H.sub.2 S(against SiH.sub.4)                                                                0.2 ppm                                                           AlCl.sub.3 /He                                                                              0.5                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              GeH.sub.4    0.1                                                           region                                                                             NO           0.1                                                               SiF.sub.4    0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.5 ppm                                                           H.sub.2      500                                                               CH.sub.4     1                                                                 H.sub.2 S(against SiH.sub.4)                                                                0.2 ppm                                                           AlCl.sub.3 /He                                                                              0.1                                                           4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              GeH.sub.4    0.2                                                           region                                                                             NO           0.3                                                               SiF.sub.4    1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.2 ppm                                                           PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          H.sub.2 S(against SiH.sub.4)                                                                0.2 ppm                                                           CH.sub.4     600                                                               AlCl.sub.3 /He                                                                              0.3                                                           5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              GeH.sub.4    0.3                                                           region                                                                             NO           0.5                                                               SiF.sub.4    2                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             PH.sub.3 (against SiH.sub.4)                                                                10 ppm                                                            H.sub.2 S(against SiH.sub.4)                                                                2 ppm                                                             CH.sub.4     600                                                               AlCl.sub.3 /He                                                                              0.3                                                       __________________________________________________________________________

                                      TABLE 157                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            SiF.sub.4   5                                                                  NO          5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      35   1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.1                                                            2nd SiH.sub.4   100   300    10      35   3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd SiH.sub.4   300   300    20      0.5  5                                    layer                                                                              H.sub.2     300                                                            region                                                                             C.sub.2 H.sub.2                                                                            0.1                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.1                                                                GeH.sub.4   0.1                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 158                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            SiF.sub.4   5                                                                  C.sub.2 H.sub.2                                                                            3                                                          Upper                                                                              1st SiH.sub.4   100   300    10      35   1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      35   3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd SiH.sub.4   300   300    20      0.5  7                                    layer                                                                              H.sub.2     300                                                            region                                                                             NO          2                                                                  C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.1                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 159                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   C.sub.2 H.sub.2                                                                            3                                                                  NO          5                                                                  SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      35   1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      35   3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd SiH.sub.4   300   300    20      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            0.5 → 2*                                                region                                                                             H.sub.2     300                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.1                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 160                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                      250    1       0.4  0.02                                    H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   NO          5                                                                  SiF.sub.4   1 → 10*                                             Upper                                                                              1st SiH.sub.4   100    300    10      35   1                               layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100    300    10      35   3                                   layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1    300    20      0.5  8                                   layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            1                                                                  GeH.sub.4   0.2                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        5 → 0.3 ppm**                                           4th SiF.sub.4   0.5    300    15      0.4  20                                  layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50     300    10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.4                                                        __________________________________________________________________________

                                      TABLE 161                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    1       0.4  0.02                                     SiF.sub.4   1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.2                                                            4th SiF.sub.4   0.5   300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 1 μm)                                                        0.1 → 15*                                                   (U · 5th LR-side: 19 μm)                                                       15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                NO          0.1                                                                SiF.sub.4   0.5                                                                GeH.sub. 4  0.6                                                        __________________________________________________________________________

                                      TABLE 162                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   40    250    1       0.4  0.02                                     SiF.sub.4   2                                                                  C.sub.2 H.sub.2                                                                            10                                                                 H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.3                                                                AlCl.sub.3 /He                                                                             0.5                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              H.sub.2     150                                                            region                                                                             NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.3                                                                AlCl.sub.3 /He                                                                             0.3                                                                GeH.sub.4   0.5                                                            3rd SiH.sub.4   300   300    20      0.5  2                                    layer                                                                              H.sub.2     300                                                            region                                                                             NO          0.2                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.6 ppm                                                            SiF.sub.4   0.2                                                                C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.1                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                            region                                                                             (U · 3rd LR-side: 5 μm)*                                                       0.1 → 13*                                                   (U · 5th LR-side: 15 μm)                                                       13 → 17*                                                    NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1 ppm                                                              SiH.sub.4   0.2                                                                AlCl.sub.3 /He                                                                             0.2                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.5                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        2 ppm                                                              SiF.sub.4   0.1                                                                AlCl.sub.3 /He                                                                             1                                                                  GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 163                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.6                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.2                                                            4th SiF.sub.4   0.5   300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 19 μm)                                                       15                                                                 (U · 5th LR-side: 1 μm)                                                        15 → 30*                                                    SiH.sub.4                                                                      (U · 3rd LR-side: 19 μm)                                                       100                                                                (U · 5th LR-side: 1 μm)                                                        100 → 50**                                                  NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.3                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.5                                                        __________________________________________________________________________

                                      TABLE 164                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperatures                                                                          power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            NO          5                                                                  C.sub.2 H.sub.2                                                                            10                                                                 H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th SiF.sub.4   0.5   300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                             NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.2                                                                GeH.sub.4   0.4                                                        __________________________________________________________________________

                                      TABLE 165                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4  20     300    0.3     0.2  0.02                                     NO         2                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                       100 ppm                                                             H.sub.2    5 → 100*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                      80 → 15**                                                    (UL-side: 0.01 μm)                                                                     15 → 5**                                                     SiF.sub.4  2                                                           Upper                                                                              1st SiH.sub.4  100    300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4  50                                                              region                                                                             H.sub.2    150                                                                 NO         10                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                       800 ppm                                                             SiF.sub.4  0.5                                                                 C.sub.2 H.sub.2                                                                           0.1                                                                 AlCl.sub.3 /He                                                                            0.1                                                             2nd SiH.sub.4  100    300    10      0.35 3                                    layer                                                                              H.sub.2    150                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                       800 ppm                                                             AlCl.sub.3 /He                                                                            0.1                                                                 SiF.sub.4  0.5                                                                 NO         10                                                                  C.sub.2 H.sub.2                                                                           0.1                                                                 GeH.sub.4  0.5                                                             3rd AlCl.sub.3 /He                                                                            0.1    300    20      0.5  6                                    layer                                                                              SiF.sub.4  0.1                                                             region                                                                             SiH.sub.4  300                                                                 H.sub.2    300                                                                 NO         0.1                                                                 C.sub.2 H.sub.2                                                                           0.1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             GeH.sub.4  0.1                                                             4th SiF.sub.4  0.5    300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                            0.1                                                             region                                                                             SiH.sub.4  100                                                                 C.sub.2 H.sub.2                                                                           15                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                       12 → 0.3                                                                ppm**                                                               NO         0.1                                                                 GeH.sub.4  0.2                                                             5th SiH.sub.4  50     300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                           30                                                              region                                                                             NO         0.1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             SiF.sub.4  0.5                                                                 AlCl.sub.3 /He                                                                            0.1                                                                 GeH.sub.4  0.4                                                         __________________________________________________________________________

                                      TABLE 166                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    1       0.3  0.02                                     C.sub.2 H.sub.2                                                                            5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2 S(against SiH.sub.4)                                                               10 ppm                                                             H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4 )                                                       800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.6                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                C.sub.2 H.sub.2                                                                            0.1                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th AlCl.sub.3 He                                                                              0.1   300    15      0.4  20                                   layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 167                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4  50     250    1       0.4  0.02                                     NO         5                                                                   H.sub.2    5 → 200*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                      200 → 30**                                                   (UL-side: 0.01 μm)                                                                     30 → 10**                                                    SiF.sub.4  5                                                           Upper                                                                              1st SiH.sub.4  100    300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4  50                                                              region                                                                             H.sub.2    150                                                                 NO         10                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                       880 ppm                                                             C.sub.2 H.sub.2                                                                           0.1                                                                 SiF.sub.4  0.5                                                                 AlCl.sub.3 /He                                                                            0.1                                                             2nd SiH.sub.4  100    300    10      0.35 3                                    layer                                                                              H.sub.2    150                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                       800 ppm                                                             AlCl.sub.3 /He                                                                            0.1                                                                 SiF.sub.4  0.5                                                                 NO         10                                                                  C.sub.2 H.sub.2                                                                           0.1                                                                 GeH.sub.4  1                                                               3rd AlCl.sub.3 /He                                                                            0.1    300    20      0.5  5                                    layer                                                                              SiF.sub.4  0.1                                                             region                                                                             SiH.sub.4  300                                                                 H.sub.2    300                                                                 NO         0.1                                                                 C.sub.2 H.sub.2                                                                           0.1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             GeH.sub.4  0.1                                                             4th SiF.sub.4  0.5    300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                            0.1                                                             region                                                                             SiH.sub.4  100                                                                 C.sub.2 H.sub.2                                                                           15                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             PH.sub.3 (against SiH.sub.4)                                                              10 → 0.3 ppm**                                               NO         0.1                                                                 GeH.sub.4  0.3                                                             5th SiH.sub.4  50     300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                           30                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             NO         0.1                                                                 SiF.sub.4  0.5                                                                 AlCl.sub.3 /He                                                                            0.2                                                                 GeH.sub.4  0.5                                                         __________________________________________________________________________

                                      TABLE 168                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.03                                     NO          5                                                                  H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 10**                                                  (UL-side: 0.01 μm)                                                                      10                                                                 SiF.sub.4   5                                                                  H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                      Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3  /He                                                                            0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.7                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.2                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          4th SiF.sub.4   0.5   300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.3                                                                NO          0.1                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                H.sub. 2 S(against SiH.sub.4)                                                              1 ppm                                                              GeH.sub.4   0.7                                                        __________________________________________________________________________

                                      TABLE 169                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    1       0.3  0.02                                     NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th SiF.sub.4   0.5   300    15      0.4  10                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.1                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 He                                                                              0.2                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 170                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    150    0.5     0.3  0.02                                     NO          5     ↓                                                                              ↓                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                                              300    1.5                                                   H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th SiF.sub.4   0.5   300    15      0.4  30                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.4                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.2                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 171                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     NO          5                                                                  H.sub.2 S(against SiH.sub.4)                                                               10 ppm                                                             H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.7                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                C.sub.2 H.sub.2                                                                            0.1                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          4th AlCl.sub.3 /He                                                                             0.1   300    15      0.4  20                                   layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.3                                                                NH.sub.3    100                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                          5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                H.sub.2 S(against SiH.sub.4)                                                               1 ppm                                                              GeH.sub.4   0.5                                                        __________________________________________________________________________

                                      TABLE 172                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      NO          5 → 20*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   SiF.sub.4   1 → 10*                                             Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  10                                   layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th SiF.sub.4   0.5   300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                N.sub.2     500                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.4                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 173                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   25    300    0.5     0.2  0.02                                     NO          3                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 15**                                                  (UL-side: 0.01 μm)                                                                      15 → 5**                                                    SiF.sub.4   3                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    15      0.4  20                                   layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.1                                                            4th AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.3                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.5                                                        __________________________________________________________________________

                                      TABLE 174                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     NO          5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   1                                                              3rd AlCl.sub.3 /He                                                                             0.1   300    15      0.4  20                                   layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                             NO          0.1                                                                GeH.sub.4   0.1                                                            4th AlCl.sub.3 /He                                                                             0.1   300    20      0.5  4                                    layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.3                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.5                                                        __________________________________________________________________________

                                      TABLE 175                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     NO          5                                                                  H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                             120 → 40**                                                  SiF.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    15      0.4  20                                   layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 PH.sub.3 (against SiH.sub.4)                                                               8 ppm                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.1                                                                GeH.sub.4   0.1                                                            4th AlCl.sub.3 /He                                                                             0.1   300    20      0.5  6                                    layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                PH.sub.3 (against SiH.sub.4)                                                               0.1 ppm                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.2                                                        __________________________________________________________________________

                                      TABLE 176                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                       300    10      0.4  0.2                                    NO          5 → 20*                                                     H.sub.2     5 → 200*                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 0**                                                   (UL-side: 0.15 μm)                                                                      40 → 10**                                                   SiF.sub.4   1 → 10*                                             Upper                                                                              1st SiH.sub.4   100     300    10      0.35 1                              layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100     300    10      0.35 3                                  layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 SiF.sub.4   0.5                                                                C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1     300    15      0.4  20                                 layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        12 → 0.3 ppm**                                              NO          0.1                                                                GeH.sub.4   0.1                                                            4th AlCl.sub.3 /He                                                                             0.1     300    20      0.5  3                                  layer                                                                              SiF.sub.4   0.5                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.2                                                            5th SiH.sub.4   50      300    10      0.4  0.5                                layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 177                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    GeH.sub.4    5                                                                 H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              H.sub.2      100                                                           region                                                                             GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                               2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 178                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              H.sub.2      100                                                           region                                                                             GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                               2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub. 4    500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 179                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.03                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           GeH.sub.4    5                                                                 H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 10**                                                 (UL-side: 0.02 μm)                                                                       10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             H.sub.2      100                                                               GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             H.sub.2      100                                                               NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 180                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    150    0.5     0.3  0.02                                     H.sub.2     5 → 200*                                                                      ↓                                                                              ↓                                              AlCl.sub.3 /He    300    1.5                                                   (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   GeH.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           NO          10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO          10                                                                 H.sub.2     100                                                            3rd SiH.sub.4   300   250    20      0.5  20                                   layer                                                                              H.sub.2     500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 181                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            NO          5                                                                  SiF.sub.4   0.5                                                                GeH.sub.4   5                                                                  CH.sub.4    1                                                          Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     360                                                                AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  NO          8                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              H.sub.2     360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0.1**                                                   AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                CH.sub.4    1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           GeH.sub.4   0.1                                                            3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              CH.sub.4    1                                                              region                                                                             NO          0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            H.sub.2     600                                                                GeH.sub.4   0.1                                                            4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.4                                                                SiF.sub.4   1                                                                  AlCl.sub.3 /He                                                                             0.5                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.6 ppm                                                            N.sub.2     1                                                                  GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 182                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    10      0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   GeH.sub.4   1 → 5*                                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          5                                                                  SiF.sub.4   10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                    SiF.sub.4   10                                                             3rd SiH.sub.4   400   250    10      0.5  15                                   layer                                                                              Ar          200                                                            region                                                                             SiF.sub.4   40                                                             4th SiH.sub.4   100   250    5       0.4  0.3                                  layer                                                                              NH.sub.3    30                                                             region                                                                             SiF.sub.4   10                                                         __________________________________________________________________________

                                      TABLE 183                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     CH.sub.4     5 → 25*                                                    GeH.sub.4    1 → 10*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    5                                                             region                                                                             He           100                                                               CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              He           100                                                           region                                                                             CH.sub. 4    20                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              He           500                                                           region                                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                      5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 184                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    330    5       0.4  0.05                                     H.sub.2     5 → 200*                                                    CH.sub.4    10                                                                 AlCl.sub.3 /He                                                                             200 → 20**                                                  GeH.sub.4   10                                                         Upper                                                                              1st SiH.sub.4   100   330    10      0.4  1                                layer                                                                              layer                                                                              H.sub.2     300                                                            region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            CH.sub.4    20                                                                 GeH.sub.4   50                                                             2nd SiH.sub.4   100   330    10      0.4  3                                    layer                                                                              CH.sub.4    20                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            3rd SiH.sub.4   400   330    25      0.5  25                                   layer                                                                              SiF.sub.4   10                                                             region                                                                             H.sub.2     800                                                            4th SiH.sub.4   100   350    15      0.4  5                                    layer                                                                              CH.sub.4    400                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        5000 ppm                                                       5th SiH.sub.4   20    350    10      0.4  1                                    layer                                                                              CH.sub.4    400                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        8000 ppm                                                   __________________________________________________________________________

                                      TABLE 185                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    1       0.3  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   GeH.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                       region                                                                             CH.sub.4    20                                                                 H.sub.2     100                                                            3rd SiH.sub.4   300   300    20      0.5  20                                   layer                                                                              H.sub.2     200                                                            region                                                                         4th SiH.sub.4   50    300    20      0.4  5                                    layer                                                                              N.sub.2     500                                                            region                                                                             PH.sub.3 (against SiH.sub.4)                                                               3000 ppm                                                       5th SiH.sub.4   40    300    10      0.4  0.3                                  layer                                                                              CH.sub.4    600                                                            region                                                                     __________________________________________________________________________

                                      TABLE 186                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    GeF.sub.4    5                                                                 CH.sub.4     10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                  Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeF.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              NO           10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                         __________________________________________________________________________

                                      TABLE 187                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.2                                     H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  GeH.sub.4    10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 ∞m)                                                                     50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    5                                                             2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    5                                                             3rd SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            4th SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    5                                                             5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    5                                                         __________________________________________________________________________

                                      TABLE 188                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   SnH.sub.4   2 → 20*                                                     GeH.sub.4   1 → 10*                                             Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                            3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3                                                                   region                                                                     __________________________________________________________________________

                                      TABLE 189                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      CH.sub.4    2 → 20*                                                     GeH.sub.4   1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                     Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             CH.sub.4    20                                                                 H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           SiF.sub.4   10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              CH.sub.4    20                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           SiF.sub.4   10                                                                 H.sub.2     100                                                            3rd SiH.sub.4   100   300    3       0.5  3                                    layer                                                                              SiF.sub.4   5                                                              region                                                                             H.sub.2     200                                                            4th SiH.sub.4   100   300    15      0.4  30                                   layer                                                                              CH.sub.4    100                                                            region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                             SiF.sub.4   5                                                              5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    600                                                            region                                                                             SiF.sub.4   5                                                          __________________________________________________________________________

                                      TABLE 190                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50      250    5       0.4  0.05                                   C.sub.2 H.sub.2                                                                            5                                                                  GeH.sub.4   5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                     Upper                                                                              1st SiH.sub.4   100     250    10      0.4  11                             layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100     250    10      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            3rd Si.sub.2 H.sub.6                                                                           200     300    10      0.5  10                                 layer                                                                              H.sub.2     200                                                            region                                                                             Si.sub.2 F.sub.6                                                                           10                                                             4th SiH.sub.4   300     330    20      0.4  30                                 layer                                                                              C.sub.2 H.sub. 2                                                                           50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U · 3rd LR-side: 1 μm)                                                        0 → 100 ppm*                                                (U · 5th LR-side: 29 μm)                                                       100 ppm                                                        5th SiH.sub.4   200     330    10      0.4  1                                  layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     Lower layer                                                                            SiH.sub.4   50      250    5       0.4  0.05                                   C.sub.2 H.sub.2                                                                            5                                                                  GeH.sub.4   5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                     Upper                                                                              1st SiH.sub.4   100     250    10      0.4  11                             layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100     250    10      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            3rd Si.sub.2 H.sub.6                                                                           200     300    10      0.5  10                                 layer                                                                              H.sub.2     200                                                            region                                                                             Si.sub.2 F.sub.6                                                                           10                                                             4th SiH.sub.4   300     330    20      0.4  30                                 layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            (U · 3rd LR-side: 1 μm)                                                        0 → 100 ppm*                                                (U · 5th LR-side: 29 μm)                                                       100 ppm                                                        5th SiH.sub.4   200     330    10      0.4  1                                  layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 191                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      NO          1 → 10*                                                     GeH.sub.4   1 → 5*                                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   Si.sub.2 F.sub.6                                                                           1                                                          Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              NO          10                                                             region                                                                             GeH.sub.4   50                                                                 H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            Si.sub.2 F.sub.6                                                                           10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                                Si.sub.2 F.sub.6                                                                           10                                                             3rd SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                             Si.sub.2 F.sub.6                                                                           10                                                             4th SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                             Si.sub.2 F.sub.6                                                                           10                                                             5th SiH.sub.4   100   300    5       0.4  0.7                                  layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                               500 ppm                                                            Si.sub.2 F.sub.6                                                                           10                                                         __________________________________________________________________________

                                      TABLE 192                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   GeH.sub.4   10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                    Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             CH.sub.4    20                                                                 H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                       2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              CH.sub.4    20                                                             region                                                                             H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                       3rd SiH.sub.4   300   300    20      0.5  20                                   layer                                                                              H.sub.2     500                                                            region                                                                         4th SiH.sub.4   100   300    5       0.4  1                                    layer                                                                              GeH.sub.4   10 → 50*                                                region                                                                             H.sub.2     300                                                            5th SiH.sub.4   100 → 40**                                                                    300    10      0.4  1                                    layer                                                                              CH.sub.4    100 → 600*                                              region                                                                     __________________________________________________________________________

                                      TABLE 193                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                             GeH.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                             2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub.2     100                                                            3rd SiH.sub.4   300   300    15      0.5  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 194                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    300    0.7     0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                             GeH.sub.4   10                                                         Upper                                                                              lst SiH.sub.4   80    300    7       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   40                                                             region                                                                             H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          8                                                              2nd SiH.sub.4   80    300    7       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   200   300    12      0.4  20                                   layer                                                                              H.sub.2     400                                                            region                                                                         4th SiH.sub.4   40    300    7       0.3  0.5                                  layer                                                                              CH.sub.4    400                                                            region                                                                     __________________________________________________________________________

                                      TABLE 195                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   25    300    0.5     0.2  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       100 → 15**                                                  (UL-side: 0.01 μm)                                                                      15 → 5**                                                    NO          3                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                             GeH.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   60    300    5       0.3  1                                layer                                                                              layer                                                                              GeH.sub.4   30                                                             region                                                                             H.sub.2     80                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          6                                                              2nd SiH.sub.4   60    300    5       0.3  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        6                                                                  (U · 3rd LR-side: 1 μm)                                                        6 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   150   300    10      0.4  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   30    300    5       0.3  0.5                                  layer                                                                              CH.sub.4    300                                                            region                                                                     __________________________________________________________________________

                                      TABLE 196                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   20    300    0.3     0.2  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       80 → 15**                                                   (UL-side: 0.01 μm)                                                                      15 → 5**                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                             GeH.sub.4   10                                                         Upper                                                                              1st SiH.sub.4   40    300    3       0.2  1                                layer                                                                              layer                                                                              GeH.sub.4   20                                                             region                                                                             H.sub.2     80                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          4                                                              2nd SiH.sub.4   40    300    3       0.2  3                                    layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        4                                                                  (U · 3rd LR-side: 1 μm)                                                        4 → 0**                                                     H.sub.2     80                                                             3rd SiH.sub.4   100   300    6       0.3  20                                   layer                                                                              H.sub.2     300                                                            region                                                                         4th SiH.sub.4   20    300    3       0.2  0.5                                  layer                                                                              CH.sub.4    200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 197                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    500    5       0.4  0.05                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  C.sub.2 H.sub.2                                                                            5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                             GeH.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   100   500    30      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     500                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            10                                                             2nd SiH.sub.4   100   500    30      0.4  3                                    layer                                                                              H.sub.2     500                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            10                                                             3rd SiH.sub.4   300   500    30      0.5  10                                   layer                                                                              H.sub.2     1500                                                           region                                                                         4th SiH.sub.4   200   500    30      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            10 → 20*                                                region                                                                             NO          1                                                          __________________________________________________________________________

                                      TABLE 198                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             μW    Inner                                                                              Layer                            lamination                                                                             their flow rates  temperature                                                                           discharging                                                                             pressure                                                                           thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          power (mW/cm.sup.3)                                                                     (Torr)                                                                             (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   150   250    0.5      0.6 0.02                                     H.sub.2     20 → 500*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       400 → 80**                                                  (UL-side: 0.01 μm)                                                                      80 → 50**                                                   NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            GeH.sub.4   10                                                         Upper                                                                              1st SiH.sub.4   500   250    0.5      0.4 1                                layer                                                                              layer                                                                              H.sub.2     300                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           GeH.sub.4   100                                                                SiF.sub.4   20                                                             2nd SiH.sub.4   500   250    0.5      0.4 3                                    layer                                                                              H.sub.2     300                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           SiF.sub.4   20                                                             3rd SiH.sub.4   700   250    0.5      0.5 20                                   layer                                                                              SiF.sub.4   30                                                             region                                                                             H.sub.2     500                                                            4th SiH.sub.4   150   250    0.5      0.3 1                                    layer                                                                              CH.sub.4    500                                                            region                                                                     __________________________________________________________________________

                                      TABLE 199                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 C.sub.2 H.sub.2                                                                             10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           GeF.sub.4    5                                                         Upper                                                                              1st SiH.sub.4    100   250    15      0.4  1                               layer                                                                              layer                                                                              GeF.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      300                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             10                                                            2nd SiH.sub.4    100   250    15      0.4  3                                   layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    200   250    15      0.4  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                             4th SiH.sub.4    300   250    15      0.5  10                                  layer                                                                              H.sub.2      300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 200                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  CH.sub.4     10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                           GeH.sub.4    10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeF.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                H.sub.2      100                                                               PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           SiF.sub.4    10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   H.sub.2      100                                                               PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           SiF.sub.4    10                                                            3rd SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    10                                                            4th SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    5                                                         __________________________________________________________________________

                                      TABLE 201                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     300    5       0.4  0.2                                      H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   NO          1 → 10*                                                     SnH.sub.4   1 → 10*                                             Upper                                                                              1st SiH.sub.4   100   300    10      0.4  1                                layer                                                                              layer                                                                              SnH.sub.4   50                                                             region                                                                             GeH.sub.4   10                                                                 H.sub.2     100                                                            2nd SiH.sub.4   100   300    10      0.4  3                                    layer                                                                              NO                                                                         region                                                                             (U · 1st LR-side: 2 μm)                                                        5                                                                  (U · 3rd LR-side: 1 μm)                                                        5 → 0**                                                     H.sub.2     100                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                        3rd SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    50                                                             region                                                                         4th SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    10      0.4  0.3                                  layer                                                                              NH.sub.3    50                                                             region                                                                     __________________________________________________________________________

                                      TABLE 202                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      GeH.sub.4   1 → 10*                                                     CH.sub.4    2 → 20*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                     Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             CH.sub.4    20                                                                 H.sub.2     100                                                                PH.sub.3 (against SiH.sub.4)                                                               1000 ppm                                                           SiF.sub.4   10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              CH.sub.4    20                                                             region                                                                             H.sub.2     100                                                                PH.sub.3 (against SiH.sub.4)                                                               1000 ppm                                                           SiF.sub.4   10                                                             3rd SiH.sub.4   100   300    15      0.4  30                                   layer                                                                              CH.sub.4    100                                                            region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                             SiF.sub.4   10                                                             4th SiH.sub.4   100   300    3       0.5  3                                    layer                                                                              SiF.sub.4   5                                                              region                                                                             H.sub.2     200                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    600                                                            region                                                                             SiF.sub.4   10                                                         __________________________________________________________________________

                                      TABLE 203                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  C.sub.2 H.sub.2                                                                            5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                             GeH.sub.4   10                                                         Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              H.sub.2     300                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            GeH.sub.4   50                                                                 C.sub.2 H.sub.2                                                                            10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              H.sub.2     300                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            10                                                             3rd SiH.sub.4   300   330    20      0.4  30                                   layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U ·  2nd LR-side: 1 μm)                                                       0 →                                                                     100 ppm*                                                           (U · 4th LR-side: 29 μm)                                                       100 ppm                                                        4th Si.sub.2 H.sub.6                                                                           200   300    10      0.5  10                                   layer                                                                              H.sub.2     200                                                            region                                                                         5th SiH.sub.4   200   330    10      0.4  1                                    layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 204                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      GeF.sub.4   1 → 10*                                                     NO          1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                           Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     100                                                                PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            NO          10                                                             2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                        region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        10                                                                 (U · 3rd LR-side: 1 μm)                                                        10 → 0**                                                    H.sub. 2    100                                                            3rd SiH.sub.4   300   300    15      0.4  25                                   layer                                                                              NH.sub.3    30 → 50*                                                region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                         4th SiH.sub.4   100   300    5       0.2  8                                    layer                                                                              H.sub.2     300                                                            region                                                                         5th SiH.sub.4   100   300    5       0.4  0.7                                  layer                                                                              NH.sub.3    80 → 100*                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        500 ppm                                                    __________________________________________________________________________

                                      TABLE 205                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   GeH.sub.4   5                                                          Upper                                                                              1st SiH.sub.4   110   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             He          360                                                                NO          8                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       2nd SiH.sub.4   110   250    10      0.4  3                                    layer                                                                              He          360                                                            region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                        8                                                                  (U · 3rd LR-side: 1 μm)                                                        8 → 0**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                       3rd SiH.sub.4   300   250    25      0.6  25                                   layer                                                                              He          600                                                            region                                                                         4th SiH.sub.4   50    250    10      0.4  1                                    layer                                                                              CH.sub.4    500                                                            region                                                                             NO          0.1                                                                N.sub.2     1                                                          __________________________________________________________________________

                                      TABLE 206                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     GeH.sub.4    1 → 10*                                                    CH.sub.4     5 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  SiF.sub.4    0.5                                                               NO           0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    0.5                                                               NO           0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          CH.sub.4     20                                                                AlCl.sub.3 /He                                                                              0.1                                                               NO           0.1                                                               SiF.sub.4    0.5                                                               GeH.sub.4    0.1                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              H.sub.2      500                                                           region                                                                             CH.sub.4     1                                                                 AlCl.sub.3   He    0.1                                                         NO           0.1                                                               SiF.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           GeH.sub.4    1                                                             4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          AlCl.sub.3 /He                                                                              0.1                                                               NO           0.1                                                               SiF.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           GeH.sub.4    0.1                                                           5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             AlCl.sub.3 /He                                                                              0.1                                                               NO           0.1                                                               SiF.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           PH.sub.3 (against SiH.sub.4)                                                                0.5 ppm                                                           GeH.sub.4    0.1                                                       __________________________________________________________________________

                                      TABLE 207                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    5       0.4  0.2                                      GeH.sub.4   1 → 10*                                                     CH.sub.4    2 → 20*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                     Upper                                                                              1st SiH.sub.4   100   250    10      0.4  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             CH.sub.4    20                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           H.sub.2     100                                                                SiF.sub.4   10                                                                 NO          0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   250    10      0.4  3                                    layer                                                                              H.sub.2     100                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1000 ppm                                                           CH.sub.4    20                                                                 AlCl.sub.3 /He                                                                             0.1                                                                NO          0.1                                                                SiF.sub.4   10                                                                 GeH.sub.4   0.1                                                            3rd SiH.sub.4   100   300    3       0.5  3                                    layer                                                                              H.sub.2     200                                                            region                                                                             CH.sub.4    1                                                                  AlCl.sub.3 /He                                                                             0.1                                                                NO          0.1                                                                SiF.sub.4   5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.5                                                            4th SiH.sub.4   100   300    15      0.4  30                                   layer                                                                              CH.sub.4    100                                                            region                                                                             PH.sub.3 (against SiH.sub.4)                                                               50 ppm                                                             AlCl.sub.3 /He                                                                             0.1                                                                NO          0.1                                                                SiF.sub.4   5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              CH.sub.4    600                                                            region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                NO          0.1                                                                SiF.sub.4   5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            PH.sub.3 (against SiH.sub.4)                                                               0.5 ppm                                                            GeH.sub.4   0.1                                                        __________________________________________________________________________

                                      TABLE 208                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     NO          5                                                                  H.sub.2     10 → 200*                                                   AlCl.sub.3 /He                                                                             120 → 40**                                                  GeH.sub.4   10                                                         Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           C.sub.2 H.sub.2                                                                            10                                                                 H.sub.2     300                                                                NO          3                                                                  SiF.sub.4   5                                                              2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              H.sub.2     300                                                            region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                     SiF.sub.4   5                                                              3rd SiH.sub. 4  100   250    15      0.5  25                                   layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     300                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        50 ppm                                                             SiF.sub.4   5                                                              4th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                                 SiF.sub.4   3                                                          __________________________________________________________________________

                                      TABLE 209                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.3  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   C.sub.2 H.sub.2                                                                            5                                                                  NO          5                                                                  PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                             GeH.sub.4   10                                                         Upper                                                                              1st SiH.sub.4   100   250    10      0.5  1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           H.sub.2     300                                                                NO          3                                                              2nd SiH.sub.4   100   250    10      0.5  3                                    layer                                                                              H.sub.2     300                                                            region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               1500 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                        3                                                                  (U · 3rd LR-side: 1 μm)                                                        3 → 0**                                                 3rd SiH.sub.4   100   250    15      0.5  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             H.sub.2     300                                                                PH.sub.3 (against SiH.sub.4)                                                               40 ppm                                                         4th SiH.sub.4   100   250    15      0.5  3                                    layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             H.sub.2     150                                                            5th SiH.sub.4   60    250    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            60                                                             region                                                                             H.sub.2     50                                                         __________________________________________________________________________

                                      TABLE 210                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     GeH.sub.4    1 → 10*                                                    CH.sub.4     2 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  SiF.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           NO           0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                     Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          AlCl.sub.3 /He                                                                              0.1                                                               NO           0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             SiF.sub.4    0.5                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              H.sub.2      100                                                           region                                                                             CH.sub.4     20                                                                NO           0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    0.1                                                           3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              CH.sub.4     1                                                             region                                                                             H.sub.2      500                                                               NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    0.1                                                           4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             NO           0.1                                                               PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    0.1                                                           5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                             NO           0.1                                                               PH.sub.3 (against SiH.sub.4)                                                                0.5 ppm                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    0.1                                                       __________________________________________________________________________

                                      TABLE 211                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                NO          5                                                                  GeH.sub.4   5                                                                  SiF.sub.4   0.5                                                        Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 SiF.sub.4   0.5                                                            2nd SiF.sub.4   0.5   300    10      0.35 3                                    layer                                                                              SiH.sub.4   100                                                            region                                                                             H.sub.2     150                                                                C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            GeH.sub.4   0.1                                                            3rd SiF.sub.4   0.1   300    20      0.5  5                                    layer                                                                              H.sub.2     300                                                            region                                                                             SiH.sub.4   300                                                                C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                        __________________________________________________________________________

                                      TABLE 212                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            C.sub.2 H.sub.2                                                                            3                                                                  NO          5                                                                  GeH.sub.4   10                                                                 SiF.sub.4   0.5                                                        Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 SiF.sub.4   0.5                                                            2nd SiF.sub.4   0.5   300    10      0.35 3                                    layer                                                                              SiH.sub.4   100                                                            region                                                                             H.sub.2     150                                                                C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            GeH.sub.4   0.1                                                            3rd SiF.sub.4   0.5                                                            layer                                                                              H.sub.2     300                                                            region                                                                             SiH.sub.4   300                                                                C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                        __________________________________________________________________________

                                      TABLE 213                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    1       0.4  0.02                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            3                                                                  NO          5                                                                  GeH.sub.4   10                                                                 SiF.sub.4   0.5                                                        Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 SiF.sub.4   0.5                                                            2nd SiF.sub.4   0.5   300    10      0.35 3                                    layer                                                                              SiH.sub.4   100                                                            region                                                                             H.sub.2     150                                                                C.sub.2 H.sub.2                                                                            0.1                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            GeH.sub.4   0.1                                                            3rd SiF.sub.4   0.1   300    20      0.5  3                                    layer                                                                              H.sub.2     300                                                            region                                                                             SiH.sub.4   300                                                                C.sub.2 H.sub.2                                                                            0.5 → 2*                                                    AlCl.sub.3 /He                                                                             0.1                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                            15                                                             region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                        __________________________________________________________________________

                                      TABLE 214                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                       250    1       0.4  0.2                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     NO        5                                                                    GeH.sub.4 1 → 10*                                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 (against SiH.sub.4)                                                            0.5                                                          Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.1                                                                  AlCl.sub.3 /He                                                                           0.5                                                              3rd SiH.sub.4 300     300    20      0.5  8                                    layer                                                                              H.sub.2   300                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.1                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          1                                                                    GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      5 → 0.3 ppm**                                             4th SiH.sub.4 100     300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             SiF.sub.4 0.8                                                                  AlCl.sub.3 /He                                                                           0.5                                                                  NO        0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                          5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.3                                                                  SiF.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 215                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   10 → 100*                                                                     250    1       0.4  0.2                                      GeH.sub.4   1 → 10*                                                     H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                       200 → 40**                                                  (UL-side: 0.15 μm)                                                                      40 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                        Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.1                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub. 4)                                                       800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.5                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiF.sub.4   0.1                                                            region                                                                             SiH.sub.4   300                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.5                                                            4th SiF.sub.4   0.5   300    15      0.4  20                                   layer                                                                              AlCl.sub.3 /He                                                                             0.1                                                            region                                                                             SiH.sub.4   100                                                                C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 1 μm)                                                        0.1 → 15*                                                   (U · 5th LR-side: 19 μm)                                                       15                                                                 NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.1                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.3                                                        __________________________________________________________________________

                                      TABLE 216                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   20    250    1       0.4  0.02                                     H.sub.2     5 → 100*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       80 → 15**                                                   (UL-side: 0.01 μm)                                                                      15 → 5**                                                    C.sub.2 H.sub.2                                                                            5                                                                  NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            GeF.sub.4   2                                                                  SiF.sub.4   0.1                                                        Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeF.sub.4   50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            C.sub.2 H.sub.2                                                                            0.3                                                                AlCl.sub.3 /He                                                                             0.3                                                                NO          10                                                                 SiF.sub.4   0.5                                                                H.sub.2     150                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.2                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.5                                                                GeF.sub.4   0.2                                                                SiF.sub.4   0.5                                                            3rd SiH.sub.4   300   300    20      0.5  2                                    layer                                                                              H.sub.2     300                                                            region                                                                             NO          0.2                                                                C.sub.2 H.sub.2                                                                            0.3                                                                GeF.sub.4   0.2                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.3                                                            4th SiH.sub.4   100   300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                            region                                                                             (U · 3rd LR-side: 5 μm)                                                        0.1 → 13*                                                   (U · 5th LR-side: 15 μm)                                                       13 → 17*                                                    NO          0.2                                                                GeF.sub.4   0.2                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.3                                                                AlCl.sub.3 /He                                                                             0.1                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.2 ppm                                                            SiF.sub.4   0.3                                                                AlCl.sub.3 /He                                                                             0.1                                                                GeF.sub.4   0.1                                                        __________________________________________________________________________

                                      TABLE 217                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.02                                     H.sub.2     5 → 20*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                       200 → 30**                                                  (UL-side: 0.01 μm)                                                                      30 → 10**                                                   NO          5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            GeH.sub.4   5                                                                  C.sub.2 H.sub.2                                                                            1                                                                  SiF.sub.4   0.1                                                        Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            5                                                                  H.sub.2     150                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            NO          10                                                                 SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.3                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.3                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                            3rd SiH.sub.4   300   300    20      0.5  5                                    layer                                                                              H.sub.2     300                                                            region                                                                             NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.3                                                            4th SiH.sub.4         300    15      0.4  20                                   layer                                                                              (U · 3rd LR-side: 19 μm)                                                       100                                                            region                                                                             (U · 5th LR-side: 1 μm)                                                        100 → 50**                                                  SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                NO          0.2                                                                C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 19 μm)                                                       15                                                                 (U · 5th LR-side: 1 μm)                                                        15 → 30*                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                        5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            NO          0.2                                                                SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                        __________________________________________________________________________

                                      TABLE 218                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50    250    5       0.4  0.05                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                        100 ppm                                                            NO          5                                                                  C.sub.2 H.sub.2                                                                            10                                                                 H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  GeH.sub.4   5                                                                  SiF.sub.4   0.5                                                        Upper                                                                              1st SiH.sub.4   100   300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             H.sub.2     150                                                                NO          10                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            SiF.sub.4   0.5                                                                AlCl.sub.3 /He                                                                             0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                            2nd SiH.sub.4   100   300    10      0.35 3                                    layer                                                                              H.sub.2     150                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                        800 ppm                                                            AlCl.sub.3 /He                                                                             0.1                                                                SiF.sub.4   0.5                                                                NO          10                                                                 C.sub.2 H.sub.2                                                                            0.1                                                                GeH.sub.4   0.2                                                            3rd AlCl.sub.3 /He                                                                             0.1   300    20      0.5  5                                    layer                                                                              SiH.sub.4   300                                                            region                                                                             SiF.sub.4   0.1                                                                H.sub.2     300                                                                NO          0.1                                                                C.sub.2 H.sub.2                                                                            0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            GeH.sub.4   0.2                                                            4th SiF.sub.4   0.5   300    10      0.4  20                                   layer                                                                              SiH.sub.4   100                                                            region                                                                             A1C1.sub.3 /He                                                                             0.1                                                                C.sub.2 H.sub.2                                                                            15                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                        10 ppm                                                             NO          0.1                                                                GeH.sub.4   0.2                                                            5th SiH.sub.4   50    300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                            30                                                             region                                                                             NO          0.1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                        0.3 ppm                                                            SiF.sub.4   0.5                                                                GeH.sub.4   0.2                                                        __________________________________________________________________________

                                      TABLE 219                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 20      300    0.3     0.2  0.02                                     NO        2                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 100*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     80 → 15**                                                     (UL-side: 0.01 μm)                                                                    15 → 5**                                                      GeH.sub.4 2                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.3                                                              3rd AlCl.sub.3 /He                                                                           0.1     300    20      0.5  6                                    layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.3                                                              4th SiF.sub.4 0.5     300    15      0.4  20                                   layer                                                                              SiH.sub.4 100                                                              region                                                                             A1C1.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      12 → 0.3 ppm**                                                NO        0.1                                                                  GeH.sub.4 0.3                                                              5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.3                                                          __________________________________________________________________________

                                      TABLE 220                                    __________________________________________________________________________     Order of                                                                               Gases and        Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates temperature                                                                            power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)           (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4  50    300     1       0.3  0.02                                     C.sub.2 H.sub.2                                                                           5                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                       100 ppm                                                             H.sub.2 S(against SiH.sub.4)                                                              10 ppm                                                              H.sub.2    5 → 200*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                      200 → 30**                                                   (UL-side: 0.01 μm)                                                                     30 → 10**                                                    GeH.sub.4  5                                                                   NO         5                                                                   SiF.sub.4  1                                                           Upper                                                                              1st SiH.sub.4  100   300     10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4  50                                                              region                                                                             H.sub.2    150                                                                 NO         10                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                       800 ppm                                                             SiF.sub.4  0.5                                                                 C.sub.2 H.sub.2                                                                           0.1                                                                 AlCl.sub.3 /He                                                                            0.1                                                             2nd SiH.sub.4  100   300     10      0.35 3                                    layer                                                                              H.sub.2    150                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                       800 ppm                                                             AlCl.sub.3 /He                                                                            0.1                                                                 SiF.sub.4  0.5                                                                 NO         10                                                                  C.sub.2 H.sub.2                                                                           0.1                                                                 GeH.sub.4  0.5                                                             3rd AlCl.sub.3 /He                                                                            0.1   300     20      0.5  5                                    layer                                                                              SiF.sub.4  0.1                                                             region                                                                             SiH.sub.4  300                                                                 H.sub.2    300                                                                 NO         0.1                                                                 C.sub.2 H.sub.2                                                                           0.1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             GeH.sub.4  0.5                                                             4th SiF.sub.4  0.5   300     15      0.4  20                                   layer                                                                              SiH.sub.4  100                                                             region                                                                             AlCl.sub.3 /He                                                                            0.1                                                                 C.sub.2 H.sub.2                                                                           15                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             PH.sub.3 (against SiH.sub.4)                                                              8 ppm                                                               NO         0.1                                                                 GeH.sub.4  0.5                                                             5th SiH.sub.4  50    300     10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                           30                                                              region                                                                             NO         0.1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                       0.3 ppm                                                             SiF.sub.4  0.5                                                                 AlCl.sub.3 /He                                                                            0.1                                                                 GeH.sub.4  0.3                                                                 PH.sub. 3 (against SiH.sub.4)                                                             0.1 ppm                                                     __________________________________________________________________________

                                      TABLE 221                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates  temperature                                                                            power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)            (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50      250     1       0.4  0.02                                    NO        5                                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100     300     10      0.35 1                               layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100     300     10      0.35 3                                   layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1     300     20      0.5  5                                   layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.1                                                              4th SiF.sub.4 0.5     300     15      0.4  20                                  layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             10 → 0.3 ppm**                                                NO        0.1                                                                  GeH.sub.4 0.2                                                                  AlCl.sub.3 /He                                                                           0.1                                                              5th SiH.sub.4 50      300     10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.2                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  PH.sub.3 (against SiH.sub. 4)                                                            0.1 ppm                                                      __________________________________________________________________________

                                      TABLE 222                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     5       0.4  0.02                                      NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 10**                                                    (UL-side: 0.01 μm)                                                                    10                                                                   GeH.sub.4 5                                                                    H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.2                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                        Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                 layer                                                                              layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                SiF.sub.4 0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                GeH.sub.4 0.2                                                          __________________________________________________________________________

                                      TABLE 223                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300     1       0.3  0.02                                      NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  SiF.sub.4 0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  10                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.2                                                          __________________________________________________________________________

                                      TABLE 224                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150     0.5     0.3  0.02                                      NO        5     ↓                                                                               ↓                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                                              300     1.5                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                              4th SiF.sub.4 0.5   300     15      0.4  30                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.1                                                          __________________________________________________________________________

                                      TABLE 225                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiF.sub.4 0.5   250     1       0.4  0.02                                      SiH.sub.4 50                                                                   NO        5                                                                    H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.3                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                        Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                 layer                                                                              layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.3                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            4th SiF.sub.4 0.5   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  NO        0.1                                                                  NH.sub.3  100                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                            5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                GeH.sub.4 0.1                                                          __________________________________________________________________________

                                      TABLE 226                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250     5       0.4  0.2                                       NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     GeH.sub.4 1 → 10*                                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.3                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  10                                    layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.3                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              N.sub.2   500                                                                  NO        0.1                                                                  GeH.sub.4 0.3                                                                  AlCl.sub.3 /He                                                                           0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                          __________________________________________________________________________

                                      TABLE 227                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 25    300     0.5     0.2  0.02                                      NO        3                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 100*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 15**                                                    (UL-side: 0.15 μm)                                                                    15 → 5**                                                      SnH.sub.4 3                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35                                                                               1                                  layer                                                                              layer                                                                              SnH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300     10      0.35                                                                               3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  SnH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     15      0.4 20                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             NO        0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SnH.sub.4 0.5                                                                  SiF.sub.4 0.5                                                              4th AlCl.sub.3 /He                                                                           0.1   300     20      0.5 5                                      layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SnH.sub.4 0.5                                                              5th SiH.sub.4 50    300     10      0.4 0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  SnH.sub.4 0.2                                                          __________________________________________________________________________

                                      TABLE 228                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     1       0.3  0.02                                      NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               NO        0.1                                                                  GeH.sub.4 0.5                                                                  SiF.sub.4 0.5                                                              4th SiF.sub.4 0.5   300     20      0.5  4                                     layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.1                                                          __________________________________________________________________________

                                      TABLE 229                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     5       0.4  0.05                                      NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                           120 → 40**                                                    GeH.sub.4 5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     15      0.4  20                                    layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   PH.sub.3 (against SiH.sub.4)                                                             8 ppm                                                                NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.5                                                              4th AlCl.sub.3 /He                                                                           0.1   300     20      0.5  6                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  PH.sub.3 (against SiH.sub.4)                                                             0.1 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.3                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.1                                                          __________________________________________________________________________

                                      TABLE 230                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates  temperature                                                                            power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)            (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                       300     10      0.4                                                                               0.2                                       NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 0**                                                     (UL-side: 0.15 μm)                                                                    40 → 10**                                                     GeH.sub.4 1 → 10*                                                       C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100     300     10      0.35 1                               layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                              2nd SiH.sub.4 100     300     10      0.35 3                                   layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                              3rd AlCl.sub.3 /He                                                                           0.1     300     15      0.4  20                                  layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      12 → 0.3 ppm**                                                NO        0.1                                                              4th AlCl.sub.3 /He                                                                           0.1     300     20      0.5  3                                   layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.3                                                              5th SiH.sub.4 50      300     10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  GeH.sub.4 0.1                                                          __________________________________________________________________________

                                      TABLE 231                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    300     2       0.3  0.05                                   H.sub.2      5 → 200*                                                   Al(CH.sub.3).sub.3 /He                                                         (S-side: 0.03 μm)                                                                        200 → 50**                                                 (UL-side: 0.02 μm)                                                                       50 → 5**                                                   NO           5                                                                 CH.sub.4     1                                                                 GeH.sub.4    10                                                                SiFe         1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              H.sub.2      300                                                           region                                                                             GeH.sub.4    50                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          NO           10                                                                SiF.sub.4    5                                                                 CH.sub.4     5                                                                 Al(CH.sub.3).sub.3 /He                                                                      0.5                                                           2nd SiH.sub.4    100   300     10      0.4  10                                 layer                                                                              H.sub.2      300                                                           region                                                                             GeH.sub.4    1                                                                 B.sub. 2 H.sub.6 (against SiH.sub.4)                                                        1500 ppm                                                          CH.sub.4     5                                                                 SiF.sub.4    5                                                                 Al(CH.sub.3).sub.3 /He                                                                      0.3                                                               NO                                                                             (U · 1st LR-side: 9 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0.1**                                          Upper                                                                              3rd SiH.sub.4    300   300     25      0.5  25                             layer                                                                              layer                                                                              H.sub.2      300                                                           region                                                                             GeH.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          CH.sub.4     1                                                                 SiF.sub.4    1                                                                 Al(CH.sub.3).sub.3 /He                                                                      0.1                                                               NO           0.1                                                           4th SiH.sub.4    200   300     15      0.4  5                                  layer                                                                              H.sub.2      200                                                           region                                                                             GeH.sub.4    1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.1 ppm                                                           PH.sub.3 (against SiH.sub.4)                                                                1000 ppm                                                          SiF.sub.4    1                                                                 NO           0.1                                                               Al(CH.sub.3).sub.3 /He                                                                      0.1                                                               CH.sub.4                                                                       (U · 3rd LR-side: 1 μm)                                                         1 → 600*                                                   (U · 5th LR-side: 4 μm)                                                         600                                                           5th H.sub.2      200   300     10      0.4  0.3                                layer                                                                              GeH.sub.4    2                                                             region                                                                             SiF.sub.4    5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             PH.sub.3 (against SiH.sub.4)                                                                5 ppm                                                             NO           0.5                                                               Al(CH.sub.3).sub.3 /He                                                                      0.5                                                               CH.sub.4     600                                                               SiH.sub.4                                                                      (U · 4th LR-side: 0.03 μm)                                                      200 → 20**                                                 (SF-side: 0.27 μm)                                                                       20                                                        __________________________________________________________________________

                                      TABLE 232                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     5       0.4  0.05                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                                 H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              H.sub.2      100                                                           region                                                                             GeH.sub.4 (LL-Side: 0.7 μm)                                                              50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → **                                                2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → **                                                3rd SiH.sub.4    300   250     15      0.5  20                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250     10      0.4  0.5                                layer                                                                              CH.sub.2     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 233                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     5       0.4  0.05                                   AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              H.sub.2      100                                                           region                                                                             GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                               2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300   250     15      0.5  20                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250     10      0.4  0.5                                layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 234                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     5       0.4  0.03                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           Mg(C.sub.5 H.sub.5).sub.2 /He                                                               3                                                                 NO           5                                                                 H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 10**                                                 (UL-side: 0.02 μm)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10                                                        Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             H.sub.2      100                                                               GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                            2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             H.sub.2      100                                                               NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300   250     15      0.5  20                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250     10      0.4  0.5                                layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 235                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150     0.5     0.3  0.02                                      H.sub.2   5 → 200*                                                                      ↓                                                                               ↓                                               AlCl.sub.3 /He  300     1.5                                                    (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     Mg(C.sub.5 H.sub.5).sub.2 /He                                                            10 → 5**                                              Upper                                                                              1st SiH.sub.4 100   250     10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             NO        10                                                               2nd SiH.sub.4 100   250     10      0.4  3                                     layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                          region                                                                             NO        10                                                                   He        100                                                              3rd SiH.sub.4 300   250     20      0.5  20                                    layer                                                                              He        500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 236                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     1       0.3  0.02                                   H.sub.2      5 → 200*                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1 → 5*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           NO           5                                                                 SiF.sub.4    0.5                                                               GeH.sub.4    5                                                                 CH.sub.4     1                                                         Upper                                                                              1st SiH.sub.4    110   250     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      100                                                               AlCl.sub.3 /He                                                                              0.5                                                               SiF.sub.4    0.5                                                               CH.sub.4     1                                                                 NO           8                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.5                                                           2nd SiH.sub. 4   100   250     10      0.4  3                                  layer                                                                              H.sub.2      100                                                           region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0.1**                                                  AlCl.sub.3 /He                                                                              0.5                                                               SiF.sub.4    0.5                                                               CH.sub.4     1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.5                                                           3rd SiH.sub.4    300   250     25      0.6  25                                 layer                                                                              CH.sub.4     1                                                             region                                                                             NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           H.sub.2      600                                                               GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           4th SiH.sub.4    50    250     10      0.4  1                                  layer                                                                              CH.sub.4     500                                                           region                                                                             NO           0.4                                                               SiF.sub.4    1                                                                 AlCl.sub.3 /He                                                                              0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.6 ppm                                                           N.sub.2      1                                                                 GeH.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                         __________________________________________________________________________

                                      TABLE 237                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiF.sub.4    10    250     10      0.4  0.2                                    SiH.sub.4    10 → 100*                                                  H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1 → 5*                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           5                                                                 SiF.sub.4    10                                                            2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                            NO           5 → 0**                                                    SiF.sub.4    10                                                            3rd SiH.sub.4    400   250     10      0.5  15                                 layer                                                                              Ar           200                                                           region                                                                             SiF.sub.4    40                                                            4th SiH.sub.4    100   250     5       0.4  0.3                                layer                                                                              NH.sub.3     30                                                            region                                                                             SiF.sub.4    10                                                        __________________________________________________________________________

                                      TABLE 238                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300     10      0.4  0.2                                    CH.sub.4     5 → 25*                                                    GeH.sub.4    1 → 10*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              **                                                                (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                            Mg(C.sub.5 H.sub.5).sub.2 /He                                                               3                                                         Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      100                                                               CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      2nd SiH.sub.4    100   300     10      0.4  3                                  layer                                                                              H.sub.2      100                                                           region                                                                             CH.sub.4     20                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      3rd SiH.sub.4    300   300     20      0.5  20                                 layer                                                                              H.sub.2      500                                                           region                                                                         4th SiH.sub.4    100   300     15      0.4  7                                  layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                               region           3000 ppm                                                      5th SiH.sub.4    40    300     10      0.4  0.1                                layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 239                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    330     5       0.4  0.05                                      H.sub.2   5 → 200*                                                      CH.sub.4  10                                                                   AlCl.sub.3 /He                                                                           200 → 20**                                                    Mg(C.sub.5 H.sub.5)/He                                                                   5                                                            Upper                                                                              1st SiH.sub.4 100   330     10      0.4  1                                 layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              CH.sub.4  20                                                                   GeH.sub.4 50                                                               2nd SiH.sub.4 100   330     10      0.4  3                                     layer                                                                              CH.sub.4  20                                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              H.sub.2   300                                                              3rd SiH.sub.4 400   330     25      0.5  25                                    layer                                                                              SiF.sub.4 10                                                               region                                                                             H.sub.2   800                                                              4th SiH.sub.4 100   350     15      0.4  5                                     layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      5000 ppm                                                         5th SiH.sub.4 20    350     10      0.4  1                                     layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      8000 ppm                                                     __________________________________________________________________________

                                      TABLE 240                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300     1       0.3  0.02                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     Mg(C.sub.5 H.sub.5)/He                                                                   5                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300     10      0.4  3                                     layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                        region        1000 ppm                                                             CH.sub.4  20                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   300     20      0.5  20                                    layer                                                                              H.sub.2   200                                                              region                                                                         4th SiH.sub.4 50    300     20      0.4  5                                     layer                                                                              N.sub.2   500                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             3000 ppm                                                         5th SiH.sub.4 40    300     10      0.4  0.3                                   layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 241                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate  RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates                                                                               temperature                                                                               power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)          (°C.)                                                                              (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    5     250     5       0.4  0.05                                   Mg(C.sub.5 H.sub.5)/He                                                                      5                                                                 C.sub.2 H.sub.2                                                                             10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                  Upper                                                                              1st SiH.sub.4    100   250     15      0.4  1                              layer                                                                              layer                                                                              GeF.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100   250     15      0.4  3                                  layer                                                                              NO           10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub.4    300   250     15      0.5  10                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    200   250     15      0.4  20                                 layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                         __________________________________________________________________________

                                      TABLE 242                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     1       0.4  0.02                                   H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  Mg(C.sub.5 H.sub.5)/He                                                                      10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    5                                                             2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    5                                                             3rd SiH.sub.4    300   300     20      0.5  5                                  layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            4th SiH.sub.4    100   300     15      0.4  20                                 layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    5                                                             5th SiH.sub.4    50    300     10      0.4  0.5                                layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    5                                                         __________________________________________________________________________

                                      TABLE 243                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300     5       0.4  0.2                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  Mg(C.sub.5 H.sub.5)/He                                                                      1 → 10*                                            Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              SnH.sub.4    50                                                            region                                                                             GeH.sub.4    10                                                                H.sub.2      100                                                           2nd SiH.sub.4    100   300     10      0.4  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO           100                                                               (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                    H.sub.2      100                                                           3rd SiH.sub.4    100   300     5       0.2  8                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    300   300     15      0.4  25                                 layer                                                                              NH.sub.3     50                                                            region                                                                         5th SiH.sub.4    100   300     10      0.4  0.3                                layer                                                                              NH.sub.3     50                                                            region                                                                     __________________________________________________________________________

                                      TABLE 244                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250     5       0.4  0.2                                       CH.sub.4  2 → 20*                                                       GeH.sub.4 1 → 10*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               SiF.sub.4 10                                                                   Mg(C.sub.5 H.sub.5)/He                                                                   3                                                            Upper                                                                              1st SiH.sub.4 100   250     10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             SiF.sub.4 10                                                               2nd SiH.sub.4 100   250     10      0.4  3                                     layer                                                                              CH.sub.4  20                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub. 4)                                                     1000 ppm                                                             SiF.sub.4 10                                                                   H.sub.2   100                                                              3rd SiH.sub.4 100   300     3       0.5  3                                     layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              4th SiH.sub.4 100   300     15      0.4  30                                    layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               SiF.sub.4 5                                                                5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              CH.sub.4  600                                                              region                                                                             SiF.sub.4 5                                                            __________________________________________________________________________

                                      TABLE 245                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4   50     250     5       0.4  0.05                                   C.sub.2 H.sub.2                                                                            5                                                                  Mg(C.sub.5 H.sub.5)/He                                                                     5                                                                  H.sub.2     5 → 200*                                                    AlCl.sub.3 /He                                                                             200 → 20**                                                  PH.sub.3 (against SiH.sub.4)                                                               10 ppm                                                     Upper                                                                              1st SiH.sub.4   100    250     10      0.4  11                             layer                                                                              layer                                                                              GeH.sub.4   50                                                             region                                                                             C.sub.2 H.sub.2                                                                            10                                                                 PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            2nd SiH.sub.4   100    250     10      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                            10                                                             region                                                                             PH.sub.3 (against SiH.sub.4)                                                               800 ppm                                                            H.sub.2     300                                                            3rd Si.sub.2 H.sub.6                                                                           200    300     10      0.5  10                                 layer                                                                              H.sub.2     200                                                            region                                                                             Si.sub.2 F.sub.6                                                                           10                                                             4th SiH.sub.4   300    330     20      0.4  30                                 layer                                                                              C.sub.2 H.sub.2                                                                            50                                                             region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (S-side: 1 μm)                                                                          0 → 100 ppm*                                                (UL-side: 29 μm)                                                                        100 ppm                                                        5th SiH.sub.4   200    330     10      0.4  1                                  layer                                                                              C.sub.2 H.sub.2                                                                            200                                                            region                                                                     __________________________________________________________________________

                                      TABLE 246                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     250     5       0.4  0.2                                    NO           1 → 10*                                                    Mg(C.sub.5 H.sub.5)/He                                                                      1 → 3*                                                     H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  Si.sub.2 F.sub.6                                                                            1                                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              NO           10                                                            region                                                                             GeH.sub.4    50                                                                H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           Si.sub.2 F.sub.6                                                                            10                                                            2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                               Si.sub.2 F.sub.6                                                                            10                                                            3rd SiH.sub.4    100   300     5       0.2  8                                  layer                                                                              H.sub.2      300                                                           region                                                                             Si.sub.2 F.sub.6                                                                            10                                                            4th SiH.sub.4    300   300     15      0.4  25                                 layer                                                                              NH.sub.3     30 → 50*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                                50 ppm                                                            Si.sub.2 F.sub.6                                                                            30                                                            5th SiH.sub.4    100   300     5       0.4  0.7                                layer                                                                              NH.sub.3     80 → 100*                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                                500 ppm                                                           Si.sub.2 F.sub.6                                                                            10                                                        __________________________________________________________________________

                                      TABLE 247                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     1       0.4  0.02                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     Mg(C.sub.5 H.sub.5)/He                                                                   3                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                      Upper                                                                              1st SiH.sub.4 100   300     10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                         2nd SiH.sub.4 100   300     10      0.4  3                                     layer                                                                              CH.sub.4  20                                                               region                                                                             H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                         3rd SiH.sub.4 300   300     20      0.5  20                                    layer                                                                              H.sub.2   500                                                              region                                                                         4th SiH.sub.4 100   300     5       0.4  1                                     layer                                                                              GeH.sub.4 10 → 50*                                                  region                                                                             H.sub.2   300                                                              5th SiH.sub.4 100 → 40**                                                                    300     10      0.4  1                                     layer                                                                              CH.sub.4  100 → 600*                                                region                                                                     __________________________________________________________________________

                                      TABLE 248                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300     1       0.3                                                                               0.02                                        H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      50 ppm                                                               GeH.sub.4 10                                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              NO        10                                                               2nd SiH.sub.4 100                                                              layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                          region                                                                             NO              300     10      0.4  3                                         (U · 1st LR-side: 2                                                             10                                                                   μm)                                                                         (U · 3rd LR-side: 1                                                             10 → 0**                                                      μm)                                                                         H.sub.2   100                                                              3rd SiH.sub.4 300   300     15      0.5  20                                    layer                                                                              H.sub.2   400                                                              region                                                                         4th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              CH.sub.4  500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 249                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300     0.7     0.3  0.02                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      50 ppm                                                               GeH.sub.4 10                                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 80    300     7       0.3  1                                 layer                                                                              layer                                                                              GeH.sub.4 40                                                               region                                                                             H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              NO        8                                                                2nd SiH.sub.4 80    300     7       0.3  3                                     layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                          region                                                                             NO                                                                             (U · 1st LR-side: 2                                                             8                                                                    μm)                                                                         (U · 3rd LR-side: 1                                                             8 →  0**                                                      μm)                                                                         H.sub.2   80                                                               3rd SiH.sub.4 200   300     12      0.4  20                                    layer                                                                              H.sub.2   400                                                              region                                                                         4th SiH.sub.4 40    300     7       0.3  0.5                                   layer                                                                              CH.sub.4  400                                                              region                                                                     __________________________________________________________________________

                                      TABLE 250                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    25    300     0.5     0.2  0.02                                   H.sub.2      5 → 100*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 15**                                                 (UL-side: 0.01 μm)                                                                       15 → 5**                                                   NO           3                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         50 ppm                                                            GeH.sub.4    5                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    60    300     5       0.3  1                              layer                                                                              layer                                                                              GeH.sub.4    30                                                            region                                                                             H.sub.2      80                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           6                                                             2nd SiH.sub.4    60    300     5       0.3  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         6                                                                 (U ·  3rd LR-side: 1 μm)                                                        6 → 0**                                                    H.sub.2      80                                                            3rd SiH.sub.4    150   300     10      0.4  20                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    30    300     5       0.3  0.5                                layer                                                                              CH.sub.4     300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 251                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    20    300     0.3     0.2  0.02                                   H.sub.2      5 → 100*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        80 → 15**                                                  (UL-side: 0.01 μm)                                                                       15 → 5**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         50 ppm                                                            NO           2                                                                 GeH.sub.4    4                                                                 Mg(C.sub.5 H.sub.5)                                                                         2                                                         Upper                                                                              1st SiH.sub.4    40    300     3       0.2  1                              layer                                                                              layer                                                                              GeH.sub.4    20                                                            region                                                                             H.sub.2      80                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           4                                                             2nd SiH.sub.4    40    300     3       0.2  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         4                                                                 (U · 3rd LR-side: 1 μm)                                                         4 → 0**                                                    H.sub.2      80                                                            3rd SiH.sub.4    100   300     6       0.3  20                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    20    300     3       0.2  0.5                                layer                                                                              CH.sub.4     200                                                           region                                                                     __________________________________________________________________________

                                      TABLE 252                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    500     5       0.4  0.05                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                                    C.sub.2 H.sub.2                                                                          5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   500     30      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   500                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          10                                                               2nd SiH.sub.4 100   500     30      0.4  3                                     layer                                                                              H.sub.2   500                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          10                                                               3rd SiH.sub.4 300   500     30      0.5  10                                    layer                                                                              H.sub.2   1500                                                             region                                                                         4th SiH.sub.4 200   500     30      0.4  20                                    layer                                                                              C.sub.2 H.sub.2                                                                          10 → 20*                                                  region                                                                             NO        1                                                            __________________________________________________________________________

                                      TABLE 253                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              μW discharg-                                                                        Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            ing power                                                                              pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 150   250     0.5     0.6  0.02                                      H.sub.2   20 → 500*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     400 → 80**                                                    (UL-side: 0.01 μm)                                                                    80 → 50**                                                     SiF.sub.4 20                                                                   NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              GeH.sub.4 10                                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                            15                                                           Upper                                                                              1st SiH.sub.4 500   250     0.5     0.4  1                                 layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             GeH.sub.4 100                                                                  SiF.sub.4 20                                                                   NO        20                                                               2nd SiH.sub.4 500   250     0.5     0.4  3                                     layer                                                                              H.sub.2   300                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             SiF.sub.4 20                                                                   NO        20                                                               3rd SiH.sub.4 700   250     0.5     0.5  20                                    layer                                                                              SiF.sub.4 30                                                               region                                                                             H.sub.2   500                                                              4th SiH.sub.4 150   250     0.5     0.3  1                                     layer                                                                              CH.sub.4  500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 254                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     5       0.4  0.05                                   H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 C.sub.2 H.sub.2                                                                             10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    100   250     15      0.4  1                              layer                                                                              layer                                                                              GeF.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   H.sub.2      300                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             10                                                            2nd SiH.sub.4    100   250     15      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub. 4   200   250     15      0.4  20                                 layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                             4th SiH.sub.4    300   250     15      0.5  10                                 layer                                                                              H.sub.2      300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 255                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     1       0.4  0.02                                   H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  CH.sub.4     10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                           SiF.sub.4    5                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                H.sub.2      100                                                               PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           SiF.sub.4    10                                                            2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   H.sub.2      100                                                               PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           SiF.sub.4    10                                                            3rd SiH.sub.4    100   300     15      0.4  20                                 layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    10                                                            4th SiH.sub.4    300   300     20      0.5  5                                  layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            5th SiH.sub.4    50    300     10      0.4  0.5                                layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    5                                                         __________________________________________________________________________

                                      TABLE 256                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            AlCl.sub.3 /He     300     5       0.4  0.2                                    (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  SiH.sub.4    10 → 100*                                                  H.sub.2      5 → 200*                                                   NO           1 → 10*                                                    SnH.sub.4    1 → 10*                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1 → 5*                                             Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              SnH.sub.4    50                                                            region                                                                             GeH.sub.4    10                                                                H.sub.2      100                                                               NO           10                                                            2nd SiH.sub.4    100   300     10      0.4  3                                  layer                                                                              NO                                                                         region                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                    H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       3rd SiH.sub.4    300   300     15      0.4  25                                 layer                                                                              NH.sub.3     50                                                            region                                                                         5th SiH.sub.4    100   300     5       0.2  8                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    100   300     10      0.4  0.3                                layer                                                                              NH.sub.3     50                                                            region                                                                     __________________________________________________________________________

                                      TABLE 257                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1 → 5*                                                                        250     5       0.4  0.2                                       CH.sub.4  2 → 20*                                                       H.sub.2   5 → 200*                                                      SiH.sub.4 10 → 100*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     PH.sub.3 (against SiH.sub.4)                                                             10 ppm                                                               SiF.sub.4 5                                                            Upper                                                                              1st SiH.sub.4 100   250     10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             SiF.sub.4 10                                                               2nd SiH.sub.4 100   250     10      0.4  3                                     layer                                                                              CH.sub.4  20                                                               region                                                                             H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             SiF.sub.4 10                                                               3rd SiH.sub.4 100   300     15      0.4  30                                    layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               SiF.sub.4 10                                                               4th SiH.sub.4 100   300     3       0.5  3                                     layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              CH.sub.4  600                                                              region                                                                             SiF.sub.4 10                                                           __________________________________________________________________________

                                      TABLE 258                                    __________________________________________________________________________     Order of                                                                               Gases and            Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                        lamination                                                                             their flow rates     temperature                                                                            power   pressure                                                                            thickness                    (layer name)                                                                           (SCCM)               (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                      __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50      250     5       0.4  0.05                                 H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 C.sub.2 H.sub.2                                                                             5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                            Mg(C.sub.5 H.sub.5).sub.2 /He                                                               3                                                         Upper                                                                              1st SiH.sub.4    100     250     10      0.4  1                            layer                                                                              layer                                                                              H.sub.2      300                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           GeH.sub.4    50                                                                C.sub.2 H.sub.2                                                                             10                                                            2nd SiH.sub.4    100     250     10      0.4  3                                layer                                                                              H.sub.2      300                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             10                                                            3rd SiH.sub.4    300     330     20      0.4  30                               layer                                                                              C.sub.2 H.sub.2                                                                             50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            U · 2nd LR-side: 1 μm)                                                          0 → 100 ppm*                                               (U · 4th LR-side: 29 μm)                                                        100 ppm                                                       4th Si.sub.2 H.sub.6                                                                            200     300     10      0.5  10                               layer                                                                              H.sub.2      200                                                           region                                                                         5th SiH.sub.4    200     330     10      0.4  1                                layer                                                                              C.sub.2 H.sub.2                                                                             200                                                           region                                                                     __________________________________________________________________________

                                      TABLE 259                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250     5       0.4  0.2                                       GeF.sub.4 1 → 10*                                                       NO        1 → 10*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     Mg(C.sub.5 H.sub.5).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   250     10      0.4  1                                 layer                                                                              layer                                                                              GeF.sub.4 50                                                               region                                                                             H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              NO        10                                                               2nd SiH.sub.4 100   250     10      0.4  3                                     layer                                                                              PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                          region                                                                             NO                                                                             (U · 1st LR-side: 2                                                   μm)                                                                                   10                                                                   (U · 3rd LR-side: 1                                                   μm)                                                                                   10 → 0**                                                      H.sub.2   100                                                              3rd SiH.sub.4 300   300     15      0.4  25                                    layer                                                                              NH.sub.3  30 → 50*                                                  region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                           4th SiH.sub.4 100   300     5       0.2  8                                     layer                                                                              H.sub.2   300                                                              region                                                                         5th SiH.sub.4 100   300     5       0.4  0.7                                   layer                                                                              NH.sub.3  80 → 100*                                                 region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      500 ppm                                                      __________________________________________________________________________

                                      TABLE 260                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     1       0.3  0.02                                   H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  NO           5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         200 ppm                                                           GeH.sub.4    20                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      300                                                               NO           5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              He           300                                                           region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      3rd SiH.sub.4    300   250     25      0.6  25                                 layer                                                                              H.sub.2      600                                                           region                                                                         4th SiH.sub.4    50    250     10      0.4  1                                  layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 261                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300     10      0.4  0.2                                    GeH.sub.4    1 → 10*                                                    CH.sub.4     5 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  SiF.sub.4    1                                                                 NO           0.4                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                            Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          H.sub.2      100                                                               SiF.sub.4    1                                                                 NO           0.4                                                               AlCl.sub.3 /He                                                                              0.4                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.4                                                           2nd SiH.sub.4    100   300     10      0.4  3                                  layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          CH.sub.4     20                                                                AlCl.sub.3 /He                                                                              0.4                                                               NO           0.4                                                               SiF.sub.4    1                                                                 GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.4                                                       Upper                                                                              3rd SiH.sub.4    300   300     20      0.5  20                             layer                                                                              layer                                                                              H.sub.2      500                                                           region                                                                             CH.sub.4     1                                                                 AlCl.sub.3 /He                                                                              0.1                                                               NO           0.1                                                               SiF.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           4th SiH.sub.4    100   300     15      0.4  7                                  layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          AlCl.sub.3 /He                                                                              0.2                                                               NO           0.2                                                               SiF.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.5 ppm                                                           GeH.sub.4    0.2                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.2                                                           5th SiH.sub.4    40    300     10      0.4  0.1                                layer                                                                              CH.sub.4     600                                                           region                                                                             AlCl.sub.3 /He                                                                              1                                                                 NO           1                                                                 SiF.sub.4    2                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             PH.sub.3 (against SiH.sub.4)                                                                5 ppm                                                             GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                         __________________________________________________________________________

                                      TABLE 262                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250     5       0.4  0.2                                       GeH.sub.4 1 → 10*                                                       CH.sub.4  2 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     SiF.sub.4 1                                                                    NO        0.4                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   250     10      0.4  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                                  SiF.sub.4 10                                                                   NO        0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.5).sub. 2 /He                                                           0.4                                                              2nd SiH.sub.4 100   250     10      0.4  3                                     layer                                                                              H.sub.2   100                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             CH.sub.4  20                                                                   AlCl.sub.3 /He                                                                           0.4                                                                  NO        0.4                                                                  SiF.sub.4 10                                                                   GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              3rd SiH.sub.4 100   300     3       0.5  3                                     layer                                                                              H.sub.2   200                                                              region                                                                             CH.sub.4  1                                                                    AlCl.sub.3 /He                                                                           0.1                                                                  NO        0.1                                                                  SiF.sub.4 5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiH.sub.4 100   300     15      0.4  30                                    layer                                                                              CH.sub.2  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               AlCl.sub.3 /He                                                                           0.2                                                                  NO        0.2                                                                  SiF.sub.4 5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              CH.sub.4  600                                                              region                                                                             AlCl.sub.3 /He                                                                           1                                                                    NO        1                                                                    SiF.sub.4 2                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.5 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             1 ppm                                                                GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 263                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     5       0.4  0.05                                      NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                           120 → 40**                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   250     10      0.5  1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1500 ppm                                                             C.sub.2 H.sub.2                                                                          20                                                                   H.sub.2   300                                                                  NO        3                                                                2nd SiH.sub.4 100   250     10      0.5  3                                     layer                                                                              H.sub.2   300                                                              region                                                                             C.sub.2 H.sub.2                                                                          20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1500 ppm                                                             NO                                                                             (U · 1st LR-side:                                                     2 μm)  3                                                                    (U · 3rd LR-side:                                                     1 μm)  3 → 0**                                                   3rd SiH.sub.4 100   250     15      0.5  25                                    layer                                                                              C.sub.2 H.sub.2                                                                          10                                                               region                                                                             H.sub.2   300                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      50 ppm                                                           4th SiH.sub.4 60    250     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          60                                                               region                                                                             H.sub.2   50                                                           __________________________________________________________________________

                                      TABLE 264                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     1       0.3  0.02                                   H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  C.sub.2 H.sub.2                                                                             5                                                                 NO           5                                                                 PH.sub.3     10 ppm                                                            Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5 → 1**                                            Upper                                                                              1st SiH.sub.4    100   250     10      0.5  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             C.sub.2 H.sub.2                                                                             20                                                                PH.sub.3 (against SiH.sub.4)                                                                1500 ppm                                                          H.sub.2      300                                                               NO           3                                                             2nd SiH.sub.4    100   250     10      0.5  3                                  layer                                                                              H.sub.2      300                                                           region                                                                             C.sub.2 H.sub.2                                                                             20                                                                PH.sub.3 (against SiH.sub.4)                                                                1500 ppm                                                          NO                                                                             (U ·  1st LR-side: 2 μm)                                                        3                                                                 (U · 3rd LR-side: 1 μm)                                                         3 → 0**                                                3rd SiH.sub.4    100   250     15      0.5  20                                 layer                                                                              C.sub.2 H.sub.2                                                                             15                                                            region                                                                             H.sub.2      300                                                               PH.sub.3 (against SiH.sub.4)                                                                40 ppm                                                        4th SiH.sub.4    100   250     15      0.5  3                                  layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             H.sub.2      150                                                           5th SiH.sub.4    60    250     10      0.4  0.5                                layer                                                                              C.sub.2 H.sub.2                                                                             60                                                            region                                                                             H.sub.2      50                                                        __________________________________________________________________________

                                      TABLE 265                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300     10      0.4  0.2                                    GeH.sub.4    1 → 10*                                                    CH.sub.4     2 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  SiF.sub.4    1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                            NO           0.4                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          AlCl.sub.3 /He                                                                              0.4                                                               NO           0.4                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             SiF.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.4                                                           2nd SiH.sub.4    100   300     10      0.4  3                                  layer                                                                              H.sub.2      100                                                           region                                                                             CH.sub.4     20                                                                NO           0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          SiF.sub.4    1                                                                 AlCl.sub.3 /He                                                                              0.4                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.4                                                           3rd SiH.sub.4    300   300     20      0.5  20                                 layer                                                                              CH.sub.4     1                                                             region                                                                             H.sub.2      500                                                               NO           0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           4th SiH.sub.4    100   300     15      0.4  7                                  layer                                                                              CH.sub.4     600                                                           region                                                                             NO           0.2                                                               PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.5 ppm                                                           SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.2                                                               H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    0.2                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.2                                                           5th SiH.sub.4    40    300     10      0.4  0.1                                layer                                                                              CH.sub.4     600                                                           region                                                                             NO           1                                                                 PH.sub. 3 (against SiH.sub.4)                                                               5 ppm                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             SiF.sub.4    2                                                                 AlCl.sub.3 /He                                                                              1                                                                 H.sub.2 S(against SiH.sub.4)                                                                1 ppm                                                             GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                         __________________________________________________________________________

                                      TABLE 266                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     1       0.4  0.02                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  NO        5                                                                    GeH.sub.4 5                                                                    SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  NO        10                                                                   SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              2nd SiF.sub.4 0.5   300     10      0.35 3                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             H.sub.2   150                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd SiF.sub.4 0.1   300     20      0.5  5                                     layer                                                                              H.sub.2   300                                                              region                                                                             SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiH.sub.4 100   300     15      0.4  20                                    layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 2                                                                    NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 267                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     1       0.4  0.02                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              C.sub.2 H.sub.2                                                                          3                                                                    GeH.sub.4 5                                                                    SiF.sub.4 3                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            10                                                           Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              2nd SiF.sub.4 0.5   300     10      0.35 3                                     layer                                                                              SiH.sub. 4                                                                               100                                                              region                                                                             H.sub.2   150                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              GeH.sub.4 0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd SiF.sub.4 0.5   300     20      0.5  7                                     layer                                                                              H.sub.2   300                                                              region                                                                             SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  NO        2                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiH.sub.4 100   300     15      0.4  20                                    layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 2                                                                    NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 268                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     1       0.4  0.02                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     C.sub.2 H.sub.2                                                                          3                                                                    NO        5                                                                    SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  NO        10                                                                   SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              2nd SiF.sub.4 0.5   300     10      0.35 3                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             H.sub.2   150                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              GeH.sub.4 0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd SiF.sub.4 0.1   300     20      0.5  3                                     layer                                                                              H.sub.2   300                                                              region                                                                             SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.5 → 2*                                                      AlCl.sub.3 /He                                                                           0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiH.sub.4 100   300     15      0.4  20                                    layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 2                                                                    NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 269                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                        250     1       0.4  0.2                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     NO        5                                                                    GeH.sub.4 50                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 (against SiH.sub.4)                                                            0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            10 → 0**                                              Upper                                                                              1st SiH.sub.4 100      300     10      0.35 1                              layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              2nd SiH.sub.4 100      300     10      0.35 3                                  layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.4                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd SiH.sub.4 300      300     20      0.5  8                                  layer                                                                              H.sub.2   300                                                              region                                                                             AlCl.sub.3 /He.sub.4                                                                     0.1                                                                  SiF.sub.4 0.1                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          1                                                                    GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      5 → 0.3 ppm**                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiH.sub.4 100      300     15      0.4  20                                 layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             SiF.sub.4 0.8                                                                  AlCl.sub.3 /He                                                                           0.5                                                                  NO        0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50       300     10      0.4  0.5                                layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 1                                                                    AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 2                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 270                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     250     1       0.4  0.2                                    GeH.sub.4    50                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  NO           5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           C.sub.2 H.sub.2                                                                             0.1                                                               SiF.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5 → 1**                                            Upper                                                                              1st SiH.sub.4    100   300     10      0.35 1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      150                                                               NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             0.4                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.4                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.4                                                           2nd SiH.sub.4    100   300     10      0.35 3                                  layer                                                                              H.sub.2      150                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           AlCl.sub.3 /He                                                                              0.2                                                               SiF.sub.4    0.5                                                               NO           10                                                                C.sub.2 H.sub.2                                                                             0.4                                                               GeH.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.2                                                           3rd AlCl.sub.3 /He                                                                              0.1   300     20      0.5  5                                  layer                                                                              SiF.sub.4    0.1                                                           region                                                                             SiH.sub.4    300                                                               H.sub.2      300                                                               NO           0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           C.sub.2 H.sub.2                                                                             0.1                                                               GeH.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           4th SiF.sub.4    0.5   300     15      0.4  20                                 layer                                                                              AlCl.sub.3 /He                                                                              0.1                                                           region                                                                             SiH.sub.4    100                                                               C.sub.2 H.sub.2                                                                             100                                                               (U · 3rd LR-side: 1 μm)                                                         0.1 → 15*                                                  (U · 5th LR-side: 19 μm)                                                        15                                                                NO           0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           GeH.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           5th SiH.sub.4    50    300     10      0.4  0.5                                layer                                                                              C.sub.2 H.sub.2                                                                             30                                                            region                                                                             AlCl.sub.3 /He                                                                              1                                                                 SiF.sub.4    2                                                                 NO           0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                         __________________________________________________________________________

                                      TABLE 271                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    20    250     1       0.4  0.02                                   H.sub.2      5 → 100*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        80 → 15**                                                  (UL-side: 0.01 μm)                                                                       15 → 5**                                                   C.sub.2 H.sub.2                                                                             5                                                                 NO           10                                                                GeF.sub.4    2                                                                 SiF.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    100   300     10      0.35 1                              layer                                                                              layer                                                                              GeF.sub.4    50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             0.3                                                               AlCl.sub.3 /He                                                                              0.3                                                               NO           10                                                                SiF.sub.4    0.5                                                               H.sub.2      150                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.3                                                           2nd SiH.sub.4    100   300     10      0.35 3                                  layer                                                                              H.sub.2      150                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           AlCl.sub.3 /He                                                                              0.2                                                               NO           10                                                                C.sub.2 H.sub.2                                                                             0.5                                                               GeF.sub.4    0.2                                                               SiF.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.2                                                           3rd SiH.sub.4    300   300     20      0.5  2                                  layer                                                                              H.sub.2      300                                                           region                                                                             NO           0.1                                                               C.sub.2 H.sub.2                                                                             0.1                                                               GeF.sub.4    0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           AlCl.sub.3 /He                                                                              0.1                                                               SiF.sub.4    0.3                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           4th SiH.sub.4    100   300     15      0.4  20                                 layer                                                                              C.sub.2 H.sub.2                                                            region                                                                             (U · 3rd LR-side: 5 μm)                                                         0.1 → 13*                                                  (U · 5th LR-side: 15 μm)                                                        13 → 17*                                                   NO           0.1                                                               GeF.sub.4    0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           SiF.sub.4    0.3                                                               AlCl.sub.3 /He                                                                              0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           5th SiH.sub.4    50    300     10      0.4  0.5                                layer                                                                              C.sub.2 H.sub.2                                                                             30                                                            region                                                                             NO           1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             SiF.sub.4    2                                                                 AlCl.sub.3 /He                                                                              1                                                                 GeF.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                         __________________________________________________________________________

                                      TABLE 272                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     5       0.4  0.02                                   H.sub.2      5 → 20*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                         Upper                                                                              1st SiH.sub.4    100   300     10      0.35 1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             C.sub.2 H.sub.2                                                                             5                                                                 H.sub.2      150                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           10                                                                SiF.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.5                                                               AlCl.sub.3 /He                                                                              0.3                                                           2nd SiH.sub.4    100   300     10      0.35 3                                  layer                                                                              H.sub.2      150                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           AlCl.sub.3 /He                                                                              0.3                                                               SiF.sub.4    0.5                                                               GeH.sub.4    0.4                                                               NO           10                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.3                                                               C.sub.2 H.sub.2                                                                             0.4                                                           3rd SiH.sub.4    300   300     20      0.5  5                                  layer                                                                              H.sub.2      300                                                           region                                                                             NO           0.1                                                               C.sub.2 H.sub.2                                                                             0.1                                                               GeH.sub.4    0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           SiF.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                           4th SiH.sub.4          300     15      0.4  20                                 layer                                                                              (U · 3rd LR-side: 19 μm)                                       region           100                                                               (U · 5th LR-side: 1 μm)                                                         100 → 50**                                                 GeH.sub.4    0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               NO           0.2                                                               C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 19 μm)                                                        15                                                                (U · 5th LR-side: 1 μm)                                                         15 → 30*                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                       5th SiH.sub.4    50    300     10      0.4  0.5                                layer                                                                              C.sub.2 H.sub.2                                                                             30                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             NO           0.5                                                               GeH.sub.4    1                                                                 SiF.sub.4    2                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                                 AlCl.sub.3 /He                                                                              1                                                         __________________________________________________________________________

                                      TABLE 273                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     5       0.4  0.05                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO        5                                                                    C.sub.2 H.sub.2                                                                          10                                                                   H.sub.2   5 → 200**                                                     AlCl.sub.3 /He                                                                           200 → 20**                                                    GeH.sub.4 5                                                                    SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4 )                                                     800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.2                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiH.sub.4 300                                                              region                                                                             SiF.sub.4 0.1                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300     10      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               NO        0.1                                                                  GeH.sub.4 0.2                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 1                                                                    GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 274                                    __________________________________________________________________________     Order of                                                                               Gases and            Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                        lamination                                                                             their flow rates     temperature                                                                            power   pressure                                                                            thickness                    (layer name)                                                                           (SCCM)               (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                      __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    20      300     0.3     0.2  0.02                                 NO           2                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           H.sub.2      5 → 100*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        80 → 15**                                                  (UL-side: 0.01 μm)                                                                       15 → 5**                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                               2                                                         Upper                                                                              1st SiH.sub.4    100     300     10      0.35 1                            layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      150                                                               NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           SiF.sub.4    0.5                                                               C.sub.2 H.sub.2                                                                             0.4                                                               AlCl.sub.3 /He                                                                              0.4                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.4                                                           2nd SiH.sub.4    100     300     10      0.35 3                                layer                                                                              H.sub.2      150                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           AlCl.sub.3 /He                                                                              0.2                                                               SiF.sub.4    0.5                                                               NO           10                                                                C.sub.2 H.sub.2                                                                             0.4                                                               GeH.sub.4    0.3                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.2                                                           3rd AlCl.sub.3 /He                                                                              0.1     300     20      0.5  6                                layer                                                                              SiF.sub.4    0.1                                                           region                                                                             SiH.sub.4    300                                                               H.sub.2      300                                                               NO           0.1                                                               C.sub.2 H.sub.2                                                                             0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           4th SiF.sub.4    0.5     300     15      0.4  20                               layer                                                                              SiH.sub.4    100                                                           region                                                                             AlCl.sub.3 /He                                                                              0.1                                                               C.sub.2 H.sub.2                                                                             15                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         12 → 0.3 ppm**                                             NO           0.1                                                               GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                           5th SiH.sub.4    50      300     10      0.4  0.5                              layer                                                                              C.sub.2 H.sub.2                                                                             30                                                            region                                                                             NO           0.5                                                               B.sub.2 H.sub.6 (against SiH.sub. 4)                                                        1 ppm                                                             SiF.sub.4    2                                                                 AlCl.sub.3 /He                                                                              1                                                                 GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                         __________________________________________________________________________

                                      TABLE 275                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300     1       0.3  0.02                                      C.sub.2 H.sub.2                                                                          5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    NO        5                                                                    SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4 )                                                     0.3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             8 ppm                                                                H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                NO        0.1                                                                  GeH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                PH.sub.3 (against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 276                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates  temperature                                                                            power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)            (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                        SiH.sub.4     50      250     1       0.4  0.02                                NO            5                                                                H.sub.2       5 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                         200 → 30**                                                (UL-side: 0.01 μm)                                                                        30 → 10**                                                 GeH.sub.4     1                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                                5                                                                C.sub.2 H.sub.2                                                                              0.1                                                              SiF.sub.4     0.5                                                          Upper                                                                              1st SiH.sub.4 100     300     10      0.35 1                               layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              2nd SiH.sub.4 100     300     10      0.35 3                                   layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1     300     20      0.5  5                                   layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5     300     15      0.4  20                                  layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             10 → 0.3 ppm**                                                NO        0.1                                                                  GeH.sub.4 0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50      300     10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                NO        0.5                                                                  SiF.sub.4 2                                                                    GeH.sub.4 1                                                                    AlCl.sub.3 /He                                                                           1                                                                    PH.sub.3 (against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 277                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     5       0.4  0.02                                      NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 10**                                                    (UL-side: 0.01 μm)                                                                    10                                                                   GeH.sub.4 1                                                                    H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                C.sub.2 H.sub.2                                                                          0.5                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3                                                                               0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              2nd SiH.sub. 4                                                                               100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.5                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                 layer                                                                              layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                SiF.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              4th SiF.sub.4 0.5   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 278                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300     1       0.3  0.02                                      NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            10 → 1**                                              Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  SiF.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  10                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 2                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 279                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150     0.5     0.3  0.02                                      NO        5     ↓                                                                               ↓                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                                              300     1.5                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.5                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.5).sub. 2 /He                                                           0.4                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  30                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 280                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiF.sub.4 0.5   250     1       0.4  0.02                                      SiH.sub.4 50                                                                   NO        5                                                                    H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.5                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            10                                                           Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub. 2 /He                                                           0.3                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.3                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  NO        0.1                                                                  NH.sub. 3 100                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 281                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250     5       0.4  0.2                                       NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     Mg(C.sub.5 H.sub.7).sub.2 /He                                                            1 → 10*                                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  GeH.sub.4 5                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.7 ).sub.2 /He                                                           0.4                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.3                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.3                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     20      0.5  10                                    layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              N.sub.2   500                                                                  NO        0.1                                                                  GeH.sub.4 0.3                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                NO        0.5                                                                  SiF.sub.4 2                                                                    GeH.sub.4 1                                                                    AlCl.sub.3 /He                                                                           1                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 282                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 25    300     0.5     0.2  0.02                                      NO        3                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 100*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 15**                                                    (UL-side: 0.01 μm)                                                                    15 → 5**                                                      SnH.sub.4 3                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              SnH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.4                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  SnH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             NO        0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SnH.sub.4 0.1                                                                  SiF.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300     20      0.5  5                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SnH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    SnH.sub.4 1                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 283                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     1       0.3  0.02                                      NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.5                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.4                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     15      0.4  20                                    layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               NO        0.1                                                                  GeH.sub.4 0.1                                                                  SiF.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300     20      0.5  4                                     layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 284                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250     5       0.4  0.05                                      NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                           120 → 40**                                                    GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            5                                                            Upper                                                                              1st SiH.sub.4 100   300     10      0.35 1                                 layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              2nd SiH.sub.4 100   300     10      0.35 3                                     layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300     15      0.4  20                                    layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   PH.sub.3 (against SiH.sub.4)                                                             8 ppm                                                                NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300     20      0.5  6                                     layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  PH.sub.3 (against SiH.sub.4)                                                             0.1 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.3                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300     10      0.4  0.5                                   layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                PH.sub.3 (against SiH.sub.4)                                                             0.3 ppm                                                              SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 285                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates  temperature                                                                            power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)            (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                       300     10      0.4  0.2                                     NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 0**                                                     (UL-side: 0.15 μm)                                                                    40 → 10**                                                     GeH.sub.4 1 → 10*                                                       C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100     300     10      0.35 1                               layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.5 ).sub.2 /He                                                           0.4                                                              2nd SiH.sub.4 100     300     10      0.35 3                                   layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.4                                                                  GeH.sub.4 0.5                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1     300     15      0.4  20                                  layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      12 → 0.3 ppm**                                                NO        0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              4th AlCl.sub.3 /He                                                                           0.1     300     20      0.5  3                                   layer                                                                              SiF.sub.4 0.5                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.3                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50      300     10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            1                                                            __________________________________________________________________________

                                      TABLE 286                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    300     2       0.3  0.05                                   H.sub.2      5 → 200*                                                   Al(CH.sub.3).sub.3 /He                                                         (S-side: 0.03 μm)                                                                        200 → 50**                                                 (UL-side: 0.02 μm)                                                                       50 → 5**                                                   NO           5                                                                 CH.sub.4     1                                                                 GeH.sub.4    10                                                                SiF.sub.4    1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           Mg(C.sub.5 H.sub.5).sub.2 /H                                                                15                                                        Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              H.sub.2      300                                                           region                                                                             GeH.sub.4    50                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          NO           10                                                                SiF.sub.4    5                                                                 CH.sub.4     5                                                                 Al(CH.sub.3).sub.3 /He                                                                      0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /H                                                                0.3                                                           2nd SiH.sub.4    100   300     10      0.4  10                                 layer                                                                              H.sub.2      300                                                           region                                                                             GeH.sub.4    1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          CH.sub.4     5                                                                 SiF.sub.4    5                                                                 Al(CH.sub.3).sub.3 /He                                                                      0.3                                                               NO                                                                             (U · 1st LR-side: 9 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0.1**                                                  Mg(C.sub.5 H.sub.5).sub.2 /H                                                                0.3                                                           3rd SiH.sub.4    300   300     25      0.5  25                                 layer                                                                              H.sub.2      300                                                           region                                                                             GeH.sub.4    0.5                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.5 ppm                                                           CH.sub.4     1                                                                 SiF.sub.4    1                                                                 Al(CH.sub.3).sub.3 /He                                                                      0.1                                                               NO           0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /H                                                                0.1                                                           4th SiH.sub.4    200   300     15      0.4  5                                  layer                                                                              H.sub.2      200                                                           region                                                                             GeH.sub.4    1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.1 ppm                                                           PH.sub.3 (against SiH.sub.4)                                                                1000 ppm                                                          SiF.sub.4    1                                                                 NO           0.1                                                               Al(CH.sub.3).sub.3 /He                                                                      0.1                                                               CH.sub.4                                                                       (U · 3rd LR-side: 1 μm)                                                         1 → 600*                                                   (U · 5th LR-side: 4 μm)                                                         600                                                               Mg(C.sub.5 H.sub.5).sub.2 /H                                                                0.2                                                           5th H.sub.2      200   300     10      0.4  0.3                                layer                                                                              GeH.sub.4    2                                                             region                                                                             SiF.sub.4    5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             PH.sub.3 (against SiH.sub.4)                                                                5 ppm                                                             NO           0.5                                                               Al(CH.sub.3).sub.3 /He                                                                      0.5                                                               CH.sub.4     600                                                               SiH.sub.4                                                                      (U · 4th LR-side: 0.03 μm)                                                      200 → 20**                                                 (SF-side: 0.27 μm)                                                                       20                                                                Mg(C.sub.5 H.sub.5).sub.2 /H                                                                0.5                                                       __________________________________________________________________________

                                      TABLE 287                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    330     1       0.01 0.05                                   H.sub.2      5 → 200*                                                   Ar           100                                                       Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              H.sub.2      300                                                           region                                                                             GeH.sub.4    50                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          NO           5                                                             2nd SiH.sub.4    100   330     10      0.4  3                                  layer                                                                              H.sub.2      300                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          NO                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                3rd SiH.sub.4    300   330     25      0.6  25                                 layer                                                                              H.sub.2      600                                                           region                                                                         4th SiH.sub.4    50    330     10      0.4  1                                  layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 288                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                         lamination                                                                             their flow rates    temperature                                                                            power   pressure                                                                            thickness                     (layer name)                                                                           (SCCM)              (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                       __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50     250     5       0.4  0.05                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5                                                                 H.sub.2      100 → 200*                                                 AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100    250     10      0.4  1                             layer                                                                              layer                                                                              H.sub.2      100                                                           region                                                                             GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                               2nd SiH.sub.4    100    250     10      0.4  3                                 layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300    250     15      0.5  20                                layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50     250     10      0.4  0.5                               layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 289                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     5       0.4  0.05                                   AlCl.sub.3 /He                                                                              120 → 40**                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              H.sub.2      100                                                           region                                                                             GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                               2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              H.sub.2      100                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300   250     15      0.5  20                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250     10      0.4  0.5                                layer                                                                              CH.sub. 4    500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 290                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.03                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           GeH.sub.4    5                                                                 NO           2                                                                 H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 10**                                                 (UL-side: 0.02 μm)                                                                       10                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             H.sub.2      100                                                               GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             H.sub.2      100                                                               NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                               3rd SiH.sub.4    300   250    15      0.5  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 291                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                              150    0.5                                                               200 → 30**                                                                    ↓                                                                              ↓                                                                               0.3  0.02                                    (UL-side: 0.01 μm)                                                                             300    1.5                                                               30 → 0**                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                               2                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5 → 3**                                            Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             He           100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          NO           10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO           10                                                                He           100                                                           3rd SiH.sub.4    300   250    20      0.5  20                                  layer                                                                              He           500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 292                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.3  0.02                                    H.sub.2      5 → 200*                                                   Mg(C.sub.5 H.sub.5).sub.2 /He                                                               5                                                                 AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               6                                                                 NO           8                                                                 SiF.sub.4    3                                                                 GeH.sub.4    5                                                                 CH.sub.4     1                                                         Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      300                                                               AlCl.sub.3 /He                                                                              0.3                                                               SiF.sub.4    0.5                                                               CH.sub.4     1                                                                 NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         (1500 ppm                                                                            1500   Mg(C.sub. 5 H.sub.5).sub.2 /He                                                         0.4                                          Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.4                                                           2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              H.sub.2      300                                                           region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0.1**                                                 AlCl.sub.3 /He                                                                              0.3                                                               SiF.sub.4    0.5                                                               CH.sub.4     1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          GeH.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.4                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.4                                                       Upper                                                                              3rd SiH.sub.4    300   250    25      0.6  25                              layer                                                                              layer                                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                           region                                                                             CH.sub.4     1                                                                 NO           0.1                                                               SiF.sub.4    0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.1 ppm                                                           H.sub.2      600                                                               GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5 ).sub.2 /He                                                              0.2                                                           4th SiH.sub.4    50    250    10      0.4  1                                   layer                                                                              CH.sub.4     500                                                           region                                                                             Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1                                                                 NO           0.5                                                               SiF.sub.4    2                                                                 AlCl.sub.3 /He                                                                              1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             N.sub.2      1                                                                 GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                         __________________________________________________________________________

                                      TABLE 293                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     250    10      0.4  0.2                                     SiF.sub.4    10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  GeH.sub.4    1 → 5*                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               20                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           5                                                                 SiF.sub.4    10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                    SiF.sub.4    10                                                            3rd SiH.sub.4    400   250    10      0.5  15                                  layer                                                                              Ar           200                                                           region                                                                             SiF.sub.4    40                                                            4th SiH.sub.4    100   250    5       0.4  0.3                                 layer                                                                              NH.sub.3     30                                                            region                                                                             SiF.sub.4    10                                                        __________________________________________________________________________

                                      TABLE 294                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300    10      0.4  0.2                                     Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1 → 10*                                                    CH.sub.4     5 → 25*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      100                                                               CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                        25                                                                (U · 2nd LR-side: 0.3 μm)                                                       25 → 20**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              H.sub.2      100                                                           region                                                                             CH.sub.4     20                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      3rd SiH.sub.4    300   300    20      0.5  20                                  layer                                                                              He           500                                                           region                                                                         4th SiH.sub.4    100   300    15      0.4  7                                   layer                                                                              CH.sub.4     600                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                3000 ppm                                                      5th SiH.sub.4    40    300    10      0.4  0.1                                 layer                                                                              CH.sub.4     600                                                           region                                                                     __________________________________________________________________________

                                      TABLE 295                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    330     5       0.4  0.05                                      H.sub.2   5 → 200*                                                      Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10                                                                   AlCl.sub.3 /He                                                                           200 → 20**                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   330     10      0.4  1                                 layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              CH.sub.4  20                                                                   GeH.sub.4 50                                                               2nd SiH.sub.4 100   330     10      0.4  3                                     layer                                                                              CH.sub.4  20                                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                              H.sub.2   300                                                              3rd SiH.sub.4 400   330     25      0.5  25                                    layer                                                                              SiF.sub.4 10                                                               region                                                                             H.sub.2   800                                                              4th SiH.sub.4 100   350     15      0.4  5                                     layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub. 6 (against SiH.sub.4)                                                     5000 ppm                                                         5th SiH.sub.4 20    350     10      0.4  1                                     layer                                                                              CH.sub.4  400                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      8000 ppm                                                     __________________________________________________________________________

                                      TABLE 296                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                              RF discharging                                                                         Inner                                                                             Layer                               lamination                                                                             their flow rates                                                                               temperature                                                                            power   pressure                                                                          thickness                           (layer name)                                                                           (SCCM)          (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                            (μm)                             __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300     1       0.3                                                                               0.02                                        H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     Mg(C.sub.5 H.sub.5).sub.2 /He                                                            2                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            30                                                           Upper                                                                              1st SiH.sub.4 100   300     10      0.4                                                                               1                                   layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   100                                                              2nd SiH.sub.4 100   300     10      0.4                                                                               3                                       layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                        region        1000 ppm                                                             CH.sub.4  20                                                                   H.sub.2   100                                                              3rd SiH.sub.4 300   300     20      0.5                                                                               20                                      layer                                                                              H.sub.2   200                                                              region                                                                         4th SiH.sub.4 50    300     20      0.4                                                                               5                                       layer                                                                              N.sub.2   500                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             3000 ppm                                                         5th SiH.sub.4 40    300     10      0.4                                                                               0.3                                     layer                                                                              CH.sub.4  600                                                              region                                                                     __________________________________________________________________________

                                      TABLE 297                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     5       0.4  0.05                                   GeF.sub.4    5                                                                 CH.sub.4     10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5                                                         Upper                                                                              1st SiH.sub.4    100   250     15      0.4  1                              layer                                                                              layer                                                                              GeF.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100   250     15      0.4  3                                  layer                                                                              NO           10                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           H.sub.2      300                                                           3rd SiH.sub. 4   300   250     15      0.5  10                                 layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    200   250     15      0.4  20                                 layer                                                                              C.sub.2 H.sub.2                                                                             10 → 20*                                               region                                                                             NO           1                                                         __________________________________________________________________________

                                      TABLE 298                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     1       0.4  0.02                                   H.sub.2      5 → 200*                                                   Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5                                                                 AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (SF-side: 0.01 μm)                                                                       30 → 10**                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                               10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (U · 2nd LR-side: 0.3 μm)                                                       50 → 0**                                                   CH.sub.4     20                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    5                                                             2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      100                                                               SiF.sub.4    5                                                             3rd SiH.sub.4    300   300     20      0.5  5                                  layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            4th SiH.sub.4    100   300     15      0.4  20                                 layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    5                                                             5th SiH.sub.4    50    300     10      0.4  0.5                                layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    5                                                         __________________________________________________________________________

                                      TABLE 299                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     300     5       0.4  0.2                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1 → 10*                                            Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              SnH.sub.4    50                                                            region                                                                             GeH.sub.4    10                                                                H.sub.2      100                                                           2nd SiH.sub.4    100   300     10      0.4  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                    H.sub.2      100                                                           3rd SiH.sub.4    100   300     5       0.2  8                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    300   300     15      0.4  25                                 layer                                                                              NH.sub.3     50                                                            region                                                                         5th SiH.sub.4    100   300     10      0.4  0.3                                layer                                                                              NH.sub.3     50                                                            region                                                                     __________________________________________________________________________

                                      TABLE 300                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     250     5       0.4  0.2                                    CH.sub.4     2 → 20*                                                    GeH.sub.4    1 → 10*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                            Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5                                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4     20                                                                H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          SiF.sub.4    10                                                            2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              CH.sub.4     20                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                          SiF.sub.4    10                                                                H.sub.2      100                                                           3rd SiH.sub.4    100   300     3       0.5  3                                  layer                                                                              SiF.sub.4    5                                                             region                                                                             H.sub.2      200                                                           4th SiH.sub.4    100   300     15      0.4  30                                 layer                                                                              CH.sub.4     100                                                           region                                                                             PH.sub.3 (against SiH.sub.4)                                                                50 ppm                                                            SiF.sub.4    5                                                             5th SiH.sub.4    50    300     10      0.4  0.5                                layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    5                                                         __________________________________________________________________________

                                      TABLE 301                                    __________________________________________________________________________     Order of                                                                               Gases and            Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                        lamination                                                                             their flow rates     temperature                                                                            power   pressure                                                                            thickness                    (layer name)                                                                           (SCCM)               (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                      __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50      250     5       0.4  0.05                                 C.sub.2 H.sub.2                                                                             5                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               3 → 1**                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 PH.sub.3 (against SiH.sub.4)                                                                10 ppm                                                    Upper                                                                              1st SiH.sub.4    100     250     10      0.4  1                            layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             C.sub.2 H.sub.2                                                                             10                                                                PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      300                                                           2nd SiH.sub.4    100     250     10      0.4  3                                layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           H.sub.2      300                                                           3rd Si.sub.2 H.sub.6                                                                            200     300     10      0.5  10                               layer                                                                              H.sub.2      200                                                           region                                                                             Si.sub.2 F.sub.6                                                                            10                                                            4th SiH.sub.4    300     330     20      0.4  30                               layer                                                                              C.sub.2 H.sub.2                                                                             50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U · 3rd LR-side: 1 μm)                                                         0 → 100 ppm*                                               (U · 5th LR-side: 29 μm)                                                        100 ppm                                                       5th SiH.sub.4    200     330     10      0.4  1                                layer                                                                              C.sub.2 H.sub.2                                                                             200                                                           region                                                                     __________________________________________________________________________

                                      TABLE 302                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     250     5       0.4  0.2                                    NO           0 → 10*                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1 → 5*                                                     H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  Si.sub.2 F.sub.6                                                                            1                                                         Upper                                                                              1st SiH.sub.4    100   250     10      0.4  1                              layer                                                                              layer                                                                              NO           10                                                            region                                                                             GeH.sub.4    50                                                                H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           Si.sub.2 F.sub.6                                                                            10                                                            2nd SiH.sub.4    100   250     10      0.4  3                                  layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                               Si.sub.2 F.sub.6                                                                            10                                                            3rd SiH.sub.4    100   300     5       0.2  8                                  layer                                                                              H.sub.2      300                                                           region                                                                             Si.sub.2 F.sub.6                                                                            10                                                            4th SiH.sub.4    300   300     15      0.4  25                                 layer                                                                              NH.sub.3     30 → 50*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                                50 ppm                                                            Si.sub.2 F.sub.6                                                                            30                                                            5th SiH.sub.4    100   300     5       0.4  0.7                                layer                                                                              NH.sub.3     80 → 100*                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                                500 ppm                                                           Si.sub.2 F.sub.6                                                                            10                                                        __________________________________________________________________________

                                      TABLE 303                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                              RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates   temperature                                                                            power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)             (°C.)                                                                           (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250     1       0.4  0.02                                   H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               20                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                   Upper                                                                              1st SiH.sub.4    100   300     10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             CH.sub.4     20                                                                H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      2nd SiH.sub.4    100   300     10      0.4  3                                  layer                                                                              CH.sub.4     20                                                            region                                                                             H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1000 ppm                                                      3rd SiH.sub.4    300   300     20      0.5  20                                 layer                                                                              H.sub.2      500                                                           region                                                                         4th SiH.sub.4    100   300     5       0.4  1                                  layer                                                                              GeH.sub.4    10 → 50*                                               region                                                                             H.sub.2      300                                                           5th SiH.sub.4    100 → 40**                                                                    300     10      0.4  1                                  layer                                                                              CH.sub.4     100 → 600*                                             region                                                                     __________________________________________________________________________

                                      TABLE 304                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    300    1       0.3  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.02 μm)                                                                       30 → 10**                                                  NO           5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         50 ppm                                                            Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                      25                                                        Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           10                                                            2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   300    15      0.5  20                                  layer                                                                              H.sub.2      400                                                           region                                                                         4th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 305                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    300    0.7     0.3  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  NO           4                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         50 ppm                                                            Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                      20                                                        Upper                                                                              1st SiH.sub.4    80    300    7       0.3  1                               layer                                                                              layer                                                                              GeH.sub.4    40                                                            region                                                                             H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           8                                                             2nd SiH.sub.4    80    300    7       0.3  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         8                                                                 (U · 3rd LR-side: 1 μm)                                                         8 → 0**                                                    H.sub.2      80                                                            3rd SiH.sub.4    200   300    12      0.4  20                                  layer                                                                              H.sub.2      400                                                           region                                                                         4th SiH.sub.4    40    300    7       0.3  0.5                                 layer                                                                              CH.sub.4     400                                                           region                                                                     __________________________________________________________________________

                                      TABLE 306                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    25    300    0.5     0.2  0.02                                    H.sub.2      5 → 100*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        100 → 15**                                                 (UL-side: 0.01 μm)                                                                       15 → 5**                                                   NO           3                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         50 ppm                                                            Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                      15                                                        Upper                                                                              1st SiH.sub.4    60    300    5       0.3  1                               layer                                                                              layer                                                                              GeH.sub.4    30                                                            region                                                                             H.sub.2      80                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           6                                                             2nd SiH.sub.4    60    300    5       0.3  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         6                                                                 (U · 3rd LR-side: 1 μm)                                                         6 → 0**                                                    H.sub.2      80                                                            3rd SiH.sub.4    150   300    10      0.4  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    30    300    5       0.3  0.5                                 layer                                                                              CH.sub.4     300                                                           region                                                                     __________________________________________________________________________

                                      TABLE 307                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    20    300    0.3     0.2  0.02                                    H.sub.2      5 → 100*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        80 → 15**                                                  (UL-side: 0.01 μm)                                                                       15 → 5**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         50 ppm                                                            NO           2                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                      10                                                        Upper                                                                              1st SiH.sub.4    40    300    3       0.2  1                               layer                                                                              layer                                                                              GeH.sub.4    20                                                            region                                                                             H.sub.2      80                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           4                                                             2nd SiH.sub.4    40    300    3       0.2  3                                   layer                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         4                                                                 (U · 3rd LR-side: 1 μm)                                                         4 → 0**                                                    H.sub.2      80                                                            3rd SiH.sub.4    100   300    6       0.3  20                                  layer                                                                              H.sub.2      300                                                           region                                                                         4th SiH.sub.4    20    300    3       0.2  0.5                                 layer                                                                              CH.sub.4     200                                                           region                                                                     __________________________________________________________________________

                                      TABLE 308                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            Ge        5     500    5       0.4  0.05                                       SiH.sub.4 50                                                                   H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                                    C.sub.2 H.sub.2                                                                          5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                   20                                                           Upper                                                                              1st SiH.sub.4 100   500    30      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   500                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          10                                                               2nd SiH.sub.4 100   500    30      0.4  3                                      layer                                                                              H.sub.2   500                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          10                                                               3rd SiH.sub.4 300   500    30      0.5  10                                     layer                                                                              H.sub.2   1500                                                             region                                                                         4th SiH.sub.4 200   500    30      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          10 → 20*                                                  region                                                                             NO        1                                                            __________________________________________________________________________

                                      TABLE 309                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 150   250    0.5     0.6  0.02                                       H.sub.2   20 → 500*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     400 → 80**                                                    (UL-side: 0.01 μm)                                                                    80 → 50**                                                     SiF.sub.4 10                                                                   NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              GeH.sub.4 20                                                                   Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                   10                                                           Upper                                                                              1st SiH.sub.4 500   250    0.5     0.4  1                                  layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             GeH.sub.4 100                                                                  SiF.sub.4 20                                                                   NO        15                                                               2nd SiH.sub.4 500   250    0.5     0.4  3                                      layer                                                                              H.sub.2   300                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             SiF.sub.4 20                                                                   NO        15                                                               3rd SiH.sub.4 700   250    0.5     0.5  20                                     layer                                                                              SiF.sub.4 30                                                               region                                                                             H.sub.2   500                                                              4th SiH.sub.4 150   350    0.5     0.3  1                                      layer                                                                              CH.sub.4  500                                                              region                                                                     __________________________________________________________________________

                                      TABLE 310                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            GeF.sub.4     5     250    5       0.4  0.05                                   SiH.sub.4     50                                                               H.sub.2       5 → 200*                                                  AlCl.sub.3 /He                                                                               200 → 20**                                                C.sub.2 H.sub.2                                                                              10                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100 ppm                                                          Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                       10                                                       Upper                                                                              1st SiH.sub.4     100   250    15      0.4  1                              layer                                                                              layer                                                                              GeF.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                         50                                                               (U · 2nd LR-side: 0.03 μm)                                                       50 → 0**                                                  H.sub.2       300                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          800 ppm                                                          C.sub.2 H.sub.2                                                                              10                                                           2nd SiH.sub.4     100   250    15      0.4  3                                  layer                                                                              C.sub.2 H.sub.2                                                                              10                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                          800 ppm                                                          H.sub.2       300                                                          3rd SiH.sub.4     200   250    15      0.4  20                                 layer                                                                              C.sub.2 H.sub.2                                                                              10 → 20*                                              region                                                                             NO            1                                                            4th SiH.sub.4     300   250    15      0.5  10                                 layer                                                                              H.sub.2       300                                                          region                                                                     __________________________________________________________________________

                                      TABLE 311                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.4  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  CH.sub.4     10                                                                PH.sub.3 (against SiH.sub.4)                                                                100 ppm                                                           SiF.sub.4    10                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                      10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                        50                                                                (SF-side: 0.3 μm)                                                                        50 → 0**                                                   CH.sub.4     20                                                                H.sub.2      100                                                               PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           SiF.sub.4    10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              CH.sub.4                                                                   region                                                                             (U · 1st LR-side: 2 μm)                                                         20                                                                (U · 3rd LR-side: 1 μm)                                                         20 → 0**                                                   H.sub.2      100                                                               PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           SiF.sub.4    10                                                            3rd SiH.sub.4    100   300    15      0.4  20                                  layer                                                                              CH.sub.4     100                                                           region                                                                             SiF.sub.4    10                                                            4th SiH.sub.4    300   300    20      0.5  5                                   layer                                                                              H.sub.2      300                                                           region                                                                             SiF.sub.4    20                                                            5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              CH.sub.4     600                                                           region                                                                             SiF.sub.4    50                                                        __________________________________________________________________________

                                      TABLE 312                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            AlCl.sub.3 /He     300    5       0.4  0.2                                     (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  SiH.sub.4    10 → 100*                                                  H.sub.2      5 → 200*                                                   NO           1 → 10*                                                    SnH.sub.4    1 → 10*                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                      5 → 10*                                            Upper                                                                              1st SiH.sub.4    100   300    10      0.4  1                               layer                                                                              layer                                                                              SnH.sub.4    50                                                            region                                                                             GeH.sub.4    10                                                                H.sub.2      100                                                           2nd SiH.sub.4    100   300    10      0.4  3                                   layer                                                                              NO                                                                         region                                                                             (U · 1st LR-side: 2 μm)                                                         5                                                                 (U · 3rd LR-side: 1 μm)                                                         5 → 0**                                                    H.sub.2      100                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                       3rd SiH.sub.4    300   300    15      0.4  25                                  layer                                                                              NH.sub.3     50                                                            region                                                                         4th SiH.sub.4    100   300    5       0.2  8                                   layer                                                                              H.sub.2      300                                                           region                                                                         5th SiH.sub.4    100   300    10      0.4  0.3                                 layer                                                                              NH.sub.3     50                                                            region                                                                     __________________________________________________________________________

                                      TABLE 313                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                   1 → 10*                                                                       250    5       0.4  0.2                                        CH.sub.4  2 → 20*                                                       H.sub.2   5 → 200*                                                      SiH.sub.4 10 → 100*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     PH.sub.3 (against SiH.sub.4)                                                             10 ppm                                                       Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             SiF.sub.4 10                                                               2nd SiH.sub.4 100   250    10      0.4  3                                      layer                                                                              CH.sub.4  20                                                               region                                                                             H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             1000 ppm                                                             SiF.sub.4 10                                                               3rd SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               SiF.sub.4 10                                                               4th SiH.sub.4 100   300    3       0.5  3                                      layer                                                                              SiF.sub.4 5                                                                region                                                                             H.sub.2   200                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                             SiF.sub.4 10                                                           __________________________________________________________________________

                                      TABLE 314                                    __________________________________________________________________________     Order of                                                                               Gases and            Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                         lamination                                                                             their flow rates     temperature                                                                           power   pressure                                                                            thickness                     (layer name)                                                                           (SCCM)               (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                       __________________________________________________________________________     Lower layer                                                                            GeH.sub.4    10      250    5       0.4  0.05                                  SiH.sub.4    50                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                              200 → 20**                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2)/He                                                      10 → 3**                                                   C.sub.2 H.sub.2                                                                             5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         10 ppm                                                    Upper                                                                              1st SiH.sub.4    100     250    10      0.4  1                             layer                                                                              layer                                                                              H.sub.2      300                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           GeH.sub.4    50                                                                C.sub.2 H.sub.2                                                                             10                                                            2nd SiH.sub.4    100     250    10      0.4  3                                 layer                                                                              H.sub.2      300                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             10                                                            3rd SiH.sub.4    300     330    20      0.4  30                                layer                                                                              C.sub.2 H.sub.2                                                                             50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                            (U · 2nd LR-side: 1 μm)                                                         0 → 100 ppm*                                               (U · 4th LR-side: 29 μm)                                                        100 ppm                                                       4th Si.sub.2 H.sub.6                                                                            200     300    10      0.5  10                                layer                                                                              H.sub.2      200                                                           region                                                                         5th SiH.sub.4    200     330    10      0.4  1                                 layer                                                                              C.sub.2 H.sub.2                                                                             200                                                           region                                                                     __________________________________________________________________________

                                      TABLE 315                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     250    5       0.4  0.2                                     GeF.sub.4    1 → 10*                                                    NO           1 → 10*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               20 → 5**                                           Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeF.sub.4    50                                                            region                                                                             H.sub.2      100                                                               PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                           NO           10                                                            2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              PH.sub.3 (against SiH.sub.4)                                                                800 ppm                                                       region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   H.sub.2      100                                                           3rd SiH.sub.4    300   300    15      0.4  25                                  layer                                                                              NH.sub.3     30 → 50*                                               region                                                                             PH.sub.3 (against SiH.sub.4)                                                                50 ppm                                                        4th SiH.sub.4    100   300    5       0.2  8                                   layer                                                                              H.sub.2      300                                                           region                                                                         5th SiH.sub.4    100   300    5       0.4  0.7                                 layer                                                                              NH.sub.3     80 → 100*                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         500 ppm                                                   __________________________________________________________________________

                                      TABLE 316                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.3  0.02                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  NO           3                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           GeH.sub.4    5                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.4  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      300                                                               NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                      2nd SiH.sub.4    100   250    10      0.4  3                                   layer                                                                              H.sub.2      300                                                           region                                                                             NO                                                                             (U · 1st LR-side: 2 μm)                                                         10                                                                (U · 3rd LR-side: 1 μm)                                                         10 → 0**                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                      3rd SiH.sub.4    300   250    25      0.6  25                                  layer                                                                              H.sub.2      600                                                           region                                                                         4th SiH.sub.4    50    250    10      0.4  1                                   layer                                                                              CH.sub.4     500                                                           region                                                                     __________________________________________________________________________

                                      TABLE 317                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4     10 → 100*                                                                     300    10      0.4  0.2                                    GeH.sub.4     1 → 10*                                                   CH.sub.4      5 → 25*                                                   H.sub.2       5 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                         200 → 40**                                                (UL-side: 0.15 μm)                                                                        40 → 10**                                                 NO            0.5                                                              SiF.sub.4     1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          10 ppm                                                           Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                10 → 0.5**                                        Upper                                                                              1st SiH.sub.4     100   300    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4     50                                                           region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                         25                                                               (U · 2nd LR-side: 0.3 μm)                                                        25 → 20**                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                         H.sub.2       100                                                              SiF.sub. 4    1                                                                NO            0.5                                                          AlCl.sub.3 /He                                                                     0.4                                                                            Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.5                                                          2nd SiH.sub.4     100   300    10      0.4  3                                  layer                                                                              H.sub.2       100                                                          region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                         CH.sub.4      20                                                               AlCl.sub.3 /He                                                                               0.4                                                              NO            0.5                                                              SiF.sub.4     1                                                                GeH.sub.4     0.5                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.5                                                      Upper                                                                              3rd SiH.sub.4     300   300    20      0.5  20                             layer                                                                              layer                                                                              H.sub.2       500                                                          region                                                                             CH.sub.4      1                                                                AlCl.sub.3 /He                                                                               0.1                                                              NO            0.1                                                              SiF.sub.4     0.2                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          0.1 ppm                                                          GeH.sub.4     0.1                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.1                                                          4th SiH.sub.4     100   300    15      0.4  7                                  layer                                                                              CH.sub.4      600                                                          region                                                                             PH.sub.3 (against SiH.sub.4)                                                                 3000 ppm                                                         AlCl.sub.3 /He                                                                               0.2                                                              NO            0.2                                                              SiF.sub.4     0.3                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          0.3 ppm                                                          GeH.sub.4     0.1                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.1                                                          5th SiH.sub.4     40    300    10      0.4  0.1                                layer                                                                              CH.sub.4      600                                                          region                                                                             AlCl.sub.3 /He                                                                               1                                                                NO            0.5                                                              SiF.sub.4     1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1 ppm                                                            PH.sub.3 (against SiH.sub.4)                                                                 2 ppm                                                            GeH.sub.4     0.8                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                1                                                        __________________________________________________________________________

                                      TABLE 318                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        GeH.sub.4 1 → 10*                                                       CH.sub.4  2 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     SiF.sub.4 10                                                                   NO        0.5                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            5                                                            Upper                                                                              1st SiH.sub.4 100   250    10      0.4  1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             CH.sub.4  20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             H.sub.2   100                                                                  SiF.sub.4 10                                                                   NO        0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Cu(C.sub. 4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                           0.5                                                              2nd SiH.sub.4 100                                                              layer                                                                              H.sub.2   100                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000 ppm                                                             CH.sub.4  20    250    10      0.4  3                                          AlCl.sub.3 /He                                                                           0.4                                                                  NO        0.5                                                                  SiF.sub.4 10                                                                   GeH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.5                                                          Upper                                                                              3rd SiH.sub.4 100   300    3       0.5  3                                  layer                                                                              layer                                                                              H.sub.2   200                                                              region                                                                             CH.sub.4  1                                                                    AlCl.sub.3 /He                                                                           0.6                                                                  NO        0.5                                                                  SiF.sub.4 5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.3                                                              4th SiH.sub.4 100   300    15      0.4  30                                     layer                                                                              CH.sub.4  100                                                              region                                                                             PH.sub.3 (against SiH.sub.4)                                                             50 ppm                                                               AlCl.sub.3 /He                                                                           0.1                                                                  NO        0.1                                                                  SiF.sub.4 5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              CH.sub.4  600                                                              region                                                                             AlCl.sub.3 /He                                                                           1                                                                    NO        0.5                                                                  SiF.sub.4 3                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                PH.sub.3 (against SiH.sub.4)                                                             1 ppm                                                                GeH.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.5                                                          __________________________________________________________________________

                                      TABLE 319                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.05                                    NO           5                                                                 H.sub.2      10 → 200*                                                  AlCl.sub.3 /He                                                                              120 → 40**                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5                                                                 C.sub.2 H.sub.2                                                                             2                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           GeH.sub.4    10                                                        Upper                                                                              1st SiH.sub.4    100   250    10      0.5  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          C.sub.2 H.sub.2                                                                             10                                                                H.sub.2      300                                                               NO           3                                                             2nd SiH.sub.4    100   250    10      0.5  3                                   layer                                                                              H.sub.2      300                                                           region                                                                             C.sub.2 H.sub.2                                                                             10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1500 ppm                                                          NO                                                                             (U · 1st LR-side: 2 μm)                                                         3                                                                 (U · 3rd LR-side: 1 μm)                                                         3 → 0**                                                3rd SiH.sub.4    100   250    15      0.5  25                                  layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             H.sub.2      300                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         50 ppm                                                        4th SiH.sub.4    60    250    10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                             60                                                            region                                                                             H.sub.2      50                                                        __________________________________________________________________________

                                      TABLE 320                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    1       0.3  0.02                                    GeH.sub.4    10                                                                H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  C.sub.2 H.sub.2                                                                             5                                                                 NO           5                                                                 PH.sub.3 (against SiH.sub.4)                                                                10 ppm                                                            Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5 → 1**                                            Upper                                                                              1st SiH.sub.4    100   250    10      0.5  1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             C.sub.2 H.sub.2                                                                             10                                                                PH.sub.3 (against SiH.sub.4)                                                                1500 ppm                                                          H.sub.2      300                                                               NO           3                                                             2nd SiH.sub.4    100   250    10      0.5  3                                   layer                                                                              H.sub.2      300                                                           region                                                                             C.sub.2 H.sub.2                                                                             10                                                                PH.sub.3 (against SiH.sub.4)                                                                1500 ppm                                                          NO                                                                             (U · 1st LR-side: 2 μm)                                                         3                                                                 (U · 3rd LR-side: 1 μm)                                                         3 → 0**                                                3rd SiH.sub.4    100   250    15      0.5  20                                  layer                                                                              C.sub.2 H.sub.2                                                                             15                                                            region                                                                             H.sub.2      300                                                               PH.sub.3 (against SiH.sub.4)                                                                40 ppm                                                        4th SiH.sub.4    100   250    15      0.5  3                                   layer                                                                              C.sub.2 H.sub.2                                                                             10                                                            region                                                                             H.sub.2      150                                                           5th SiH.sub.4    60    250    10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                             60                                                            region                                                                             H.sub.2      50                                                        __________________________________________________________________________

                                      TABLE 321                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4     10 → 100*                                                                     300    10      0.4  0.2                                    GeH.sub.4     1 → 10*                                                   CH.sub.4      2 → 25*                                                   H.sub.2       5 → 200*                                                  AlCl.sub.3 /He                                                                 (S-side: 0.15 μm)                                                                         200 → 40**                                                (UL-side: 0.15 μm)                                                                        40 → 10**                                                 SiF.sub.4     0.5                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100 ppm                                                          NO            0.5                                                              H.sub.2 S (against SiH.sub.4)                                                                0.6 ppm                                                          Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                5                                                        Upper                                                                              1st SiH.sub.4     100   300    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4     50                                                           region                                                                             CH.sub.4                                                                       (LL-side: 0.7 μm)                                                                         25                                                               (U · 2nd LR-side: 0.3 μm)                                                        25 → 20**                                                 H.sub.2       100                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                         AlCl.sub.3 /He                                                                               0.4                                                              NO            0.4                                                              H.sub.2 S(against SiH.sub.4)                                                                 0.5 ppm                                                          SiF.sub.4     0.5                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.4                                                          2nd SiH.sub.4     100   300    10      0.4  3                                  layer                                                                              H.sub.2       100                                                          region                                                                             CH.sub.4      20                                                               NO            0.4                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                         SiF.sub.4     0.5                                                              AlCl.sub.3 /He                                                                               0.4                                                              H.sub.2 S (against SiH.sub.4)                                                                0.5 ppm                                                          GeH.sub.4     0.4                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.5                                                      Upper                                                                              3rd SiH.sub.4     300   300    20      0.5  20                             layer                                                                              layer                                                                              CH.sub.4      0.1                                                          region                                                                             H.sub.2       500                                                              NO            0.1                                                              SiF.sub.4     0.3                                                              AlCl.sub.3 /He                                                                               0.1                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          0.1 ppm                                                          H.sub.2 S(against SiH.sub.4)                                                                 0.1 ppm                                                          GeH.sub.4     0.1                                                              Cu(C.sub. 4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                          4th SiH.sub.4     100   300    15      0.4  7                                  layer                                                                              CH.sub.4      600                                                          region                                                                             NO            0.2                                                              PH.sub.3 (against SiH.sub.4)                                                                 3000 ppm                                                         B.sub.2 H.sub.6 (against SiH.sub.4)                                                          0.2 ppm                                                          SiF.sub.4     0.3                                                              AlCl.sub.3 /He                                                                               0.2                                                              H.sub.2 S(against SiH.sub.4)                                                                 0.3 ppm                                                          GeH.sub.4     0.2                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.2                                                          5th SiH.sub.4     40    300    10      0.4  0.1                                layer                                                                              CH.sub.4      600                                                          region                                                                             NO            1                                                                PH.sub.3 (against SiH.sub.4)                                                                 1.5 ppm                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1 ppm                                                            SiF.sub.4     5                                                                AlCl.sub.3 /He                                                                               1                                                                H.sub.2 S(against SiH.sub.4)                                                                 1 ppm                                                            GeH.sub.4     0.8                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                1                                                        __________________________________________________________________________

                                      TABLE 322                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              C.sub.2 H.sub.2                                                                          1                                                                    NO        5                                                                    GeH.sub.4 5                                                                    SiF.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            5                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  NO        10                                                                   SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub. 2 /He                                           0.5                                                              2nd SiF.sub.4 0.5   300    10      0.35 3                                      layer                                                                              SiH.sub.4 100                                                              region                                                                             H.sub.2   150                                                                  C.sub.2 H.sub.2                                                                          0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              GeH.sub.4 0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.5                                                          Upper                                                                              3rd SiF.sub.4 0.3   300    20      0.5  5                                  layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.2 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiH.sub.4 100   300    15      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 5                                                                    NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 0.8                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 323                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              C.sub.2 H.sub.2                                                                          3                                                                    GeH.sub.4 10                                                                   SiF.sub.4 5                                                                    NO        0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10 → 5**                                              Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  SiF.sub.4 1                                                                    GeH.sub.4 0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiF.sub.4 0.5   300    10      0.35 3                                      layer                                                                              SiH.sub.4 100                                                              region                                                                             H.sub.2   150                                                                  C.sub.2 H.sub.2                                                                          0.2                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              GeH.sub.4 0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd SiF.sub.4 0.1   300    20      0.5  7                                  layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  NO        2                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiH.sub.4 100   300    15      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub. 7 N.sub.2 O.sub.2).sub.2 /He                                           0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 5                                                                    NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 324                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.4  0.02                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     Mg(C.sub.5 H.sub.5).sub.2 /He                                                            5                                                                    C.sub.2 H.sub.2                                                                          3                                                                    NO        5                                                                    SiF.sub.4 5                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  NO        10                                                                   SiF.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub. 2 O.sub.2).sub.2 /He                                           0.4                                                              2nd SiF.sub.4 0.5   300    10      0.35 3                                      layer                                                                              SiH.sub.4 100                                                              region                                                                             H.sub.2   150                                                                  C.sub.2 H.sub.2                                                                          0.2                                                                  AlCl.sub.3 /He                                                                           0.2                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd SiF.sub.4 0.1   300    20      0.5  3                                  layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             SiH.sub.4 300                                                                  C.sub.2 H.sub.2                                                                          0.5 → 2*                                                      AlCl.sub.3 /He                                                                           0.1                                                                  NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiH.sub.4 100   300    15      0.4  20                                     layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  SiF.sub.4 0.5                                                                  NO        0.1                                                                  B.sub.2 H.sub. 6 (against SiH.sub.4)                                                     0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.2 H.sub.5).sub.2 /He                                                            0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 5                                                                    NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 325                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                       250    1       0.4  0.2                                      H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     NO        5                                                                    GeH.sub.4 50                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10 → 1**                                              Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 1                                                                    AlCl.sub.3 /He                                                                           0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 1                                                                    AlCl.sub.3 /He                                                                           0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd SiH.sub.4 300     300    20      0.5  8                                layer                                                                              layer                                                                              H.sub.2   300                                                              region                                                                             AlCl.sub.3 /He.sub.4                                                                     0.1                                                                  SiF.sub.4 0.1                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      5 → 0.3 ppm**                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiH.sub.4 100     300    15      0.4  20                                   layer                                                                              C.sub.2 H.sub.2                                                                          15                                                               region                                                                             SiF.sub.4 0.8                                                                  AlCl.sub.3 /He                                                                           0.5                                                                  NO        0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub. 2 /He                                           0.1                                                              5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                GeH.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           3                                                                    SiF.sub.4 3                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 326                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    10 → 100*                                                                     250    1       0.4  0.2                                     GeH.sub.4    1 → 10*                                                    H.sub.2      5 → 200*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                        200 → 40**                                                 (UL-side: 0.15 μm)                                                                       40 → 10**                                                  NO           5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           C.sub.2 H.sub.2                                                                             0.1                                                               SiF.sub.4    0.5                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5                                                         Upper                                                                              1st SiH.sub.4    100   300    10      0.35 1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             H.sub.2      150                                                               NO           10                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             0.4                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.4                                                               Mg(C.sub.5 H.sub. 5).sub.2 /He                                                              0.4                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.4                                                           2nd SiH.sub.4    100   300    10      0.35 3                                   layer                                                                              H.sub.2      150                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           AlCl.sub.3 /He                                                                              0.2                                                               SiF.sub.4    0.5                                                               NO           10                                                                C.sub.2 H.sub.2                                                                             0.2                                                               GeH.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.2                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.2                                                       Upper                                                                              3rd AlCl.sub.3 /He                                                                              0.1   300    20      0.5  5                               layer                                                                              layer                                                                              SiF.sub.4    0.1                                                           region                                                                             SiH.sub.4    300                                                               H.sub.2      300                                                               NO           0.1                                                               C.sub.2 H.sub.2                                                                             0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           GeH.sub.4    0.1                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                           4th SiF.sub.4    0.5   300    15      0.4  20                                  layer                                                                              AlCl.sub.3 /He                                                                              0.1                                                           region                                                                             SiH.sub.4    100                                                               C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 1 μm)                                                         0.1 → 15*                                                  (U · 5th LR-side: 19 μm))                                                       15                                                                NO           0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           GeH.sub.4    0.5                                                               Mg(C.sub.5 H.sub.5).sub.2 /He                                                               0.1                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                           5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                             30                                                            region                                                                             AlCl.sub.3 /He                                                                              1                                                                 SiF.sub.4    5                                                                 NO           1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1 ppm                                                             GeH.sub.4    1                                                                 Mg(C.sub.5 H.sub.5).sub.2 /He                                                               1                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1                                                         __________________________________________________________________________

                                      TABLE 327                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    20    250    1       0.4  0.02                                    H.sub.2      5 → 100*                                                   AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        80 → 15**                                                  (UL-side: 0.01 μm)                                                                       15 → 5**                                                   C.sub.2 H.sub.2                                                                             5                                                                 NO           10                                                                GeF.sub.4    2                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               5                                                         Upper                                                                              1st SiH.sub.4    100   300    10      0.35 1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           C.sub.2 H.sub.2                                                                             0.3                                                               AlCl.sub.3 /He                                                                              0.3                                                               NO           10                                                                SiF.sub.4    0.5                                                               H.sub.2      150                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1                                                             2nd SiH.sub.4    100   300    10      0.35 3                                   layer                                                                              H.sub. 2     150                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           AlCl.sub.3 /He                                                                              0.2                                                               NO           10                                                                C.sub.2 H.sub.2                                                                             0.5                                                               GeF.sub.4    0.2                                                               SiF.sub.4    0.5                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                           3rd SiH.sub.4    300   300    20      0.5  2                                   layer                                                                              H.sub.2      300                                                           region                                                                             NO           0.2                                                               C.sub.2 H.sub.2                                                                             0.3                                                               GeF.sub.4    0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           AlCl.sub.3 /He                                                                              0.1                                                               SiF.sub.4    0.1                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                       Upper                                                                              4th SiH.sub.4    100   300    15      0.4  20                              layer                                                                              layer                                                                              C.sub.2 H.sub.2                                                            region                                                                             (U · 3rd LR-side: 5 μm)                                                         0.1 → 13*                                                  (U · 5th LR-side: 15 μm)                                                        13 → 17*                                                   NO           0.2                                                               GeF.sub.4    0.2                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           SiF.sub.4    0.3                                                               AlCl.sub. 3 /He                                                                             0.1                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                           5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                             30                                                            region                                                                             NO           1                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         2 ppm                                                             SiF.sub.4    3                                                                 AlCl.sub.3 /He                                                                              1                                                                 GeF.sub.4    1                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1                                                         __________________________________________________________________________

                                      TABLE 328                                    __________________________________________________________________________     Order of                                                                               Gases and          Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                           lamination                                                                             their flow rates   temperature                                                                           power   pressure                                                                            thickness                       (layer name)                                                                           (SCCM)             (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                         __________________________________________________________________________     Lower layer                                                                            SiH.sub.4    50    250    5       0.4  0.02                                    H.sub.2      5 → 20*                                                    AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                        200 → 30**                                                 (UL-side: 0.01 μm)                                                                       30 → 10**                                                  NO           5                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                         100 ppm                                                           C.sub.2 H.sub.2                                                                             3                                                                 SiF.sub.4    0.5                                                               GeH.sub.4    5                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               3                                                         Upper                                                                              1st SiH.sub.4    100   300    10      0.35 1                               layer                                                                              layer                                                                              GeH.sub.4    50                                                            region                                                                             C.sub.2 H.sub.2                                                                             5                                                                 H.sub.2      150                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           NO           10                                                                SiF.sub.4    0.5                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.4                                                               AlCl.sub. 3 /He                                                                             0.3                                                           2nd SiH.sub.4    100   300    10      0.35 3                                   layer                                                                              H.sub.2      150                                                           region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         800 ppm                                                           AlCl.sub.3 /He                                                                              0.3                                                               SiF.sub.4    0.5                                                               GeH.sub.4    0.2                                                               NO           10                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.2                                                               C.sub.2 H.sub.2                                                                             0.2                                                       Upper                                                                              3rd SiH.sub.4    300   300    20      0.5  5                               layer                                                                              layer                                                                              H.sub.2      300                                                           region                                                                             NO           0.1                                                               C.sub.2 H.sub.2                                                                             0.1                                                               GeH.sub.4    0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                           SiF.sub.4    0.1                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                               AlCl.sub.3 /He                                                                              0.1                                                           4th SiH.sub.4    300   15     0.4     20                                       layer                                                                              (U · 3rd LR-side: 19 μm)                                       region           100                                                               (U · 5th LR-side: 1 μm)                                                         100 → 50**                                                 GeH.sub.4    0.1                                                               SiF.sub.4    0.5                                                               AlCl.sub.3 /He                                                                              0.1                                                               NO           0.2                                                               C.sub.2 H.sub.2                                                                (U · 3rd LR-side: 19 μm)                                                        15                                                                (U · 5th LR-side: 1 μm)                                                         15 → 30*                                                   Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               0.1                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                         0.3 ppm                                                       5th SiH.sub.4    50    300    10      0.4  0.5                                 layer                                                                              C.sub.2 H.sub.2                                                                             30                                                            region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                         3 ppm                                                             NO           2                                                                 GeH.sub.4    1                                                                 SiF.sub.4    5                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                               1                                                                 AlCl.sub.3 /He                                                                              /                                                         __________________________________________________________________________

                                      TABLE 329                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    5       0.4  0.05                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO        5                                                                    C.sub.2 H.sub.2                                                                          10                                                                   H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                           200 → 20**                                                    GeH.sub.4 5                                                                    SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10 → 5**                                              Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  AlCl.sub.3 He                                                                            0.4                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiH.sub.4 300                                                              region                                                                             SiF.sub.4 0.1                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                          Upper                                                                              4th SiF.sub.4 0.5   300    15      0.4  20                                 layer                                                                              layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               NO        0.1                                                                  GeH.sub.4 0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub. 2                                                                         30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      3 ppm                                                                AlCl.sub.3 /He                                                                           1                                                                    SiF.sub.4 5                                                                    GeH.sub.4 2                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 330                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 20      300    0.3     0.2  0.02                                     NO        2                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     80 → 15**                                                     (UL-side: 0.01 μm)                                                                    15 → 5**                                                      GeH.sub.4 2                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10                                                                   C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 1                                                            Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.3                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1     300    20      0.5  6                                layer                                                                              layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiF.sub.4 0.5     300    15      0.4  20                                   layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      12 → 0.3 ppm**                                                NO        0.1                                                                  GeH.sub.4 0.3                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      3 ppm                                                                SiF.sub.4 5                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 3                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 331                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300    1       0.3  0.02                                       C.sub.2 H.sub.2                                                                          5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2 S(against SiH.sub.4)                                                             10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    NO        5                                                                    SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10                                                           Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          4                                                                    AlCl.sub.3 /He                                                                           0                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                  layer                                                                              layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  20                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub. 2 H.sub.2                                                                         15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             8 ppm                                                                H.sub.2 S (against SiH.sub.4)                                                            1 ppm                                                                NO        0.1                                                                  GeH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      3 ppm                                                                SiF.sub.4 5                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 2                                                                    H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                PH.sub.3 (against SiH.sub.4)                                                             1 ppm                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 332                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50      250    1       0.4  0.02                                     NO        5                                                                    H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10 → 5**                                                      C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                          Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            5 → 0.4**                                                     AlCl.sub. 3 /He                                                                          0.4                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1     300    20      0.5  5                                layer                                                                              layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiF.sub.4 0.5     300    15      0.4  20                                   layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              PH.sub.3 (against SiH.sub.4)                                                             10 → 0.3 ppm**                                                NO        0.1                                                                  GeH.sub.4 0.2                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                NO        2                                                                    SiF.sub.4 5                                                                    GeH.sub.4 2                                                                    AlCl.sub.3 /He                                                                           2                                                                    PH.sub.3 (against SiH.sub.4)                                                             1 ppm                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 333                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    5       0.4  0.02                                       NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 10**                                                    (UL-side: 0.01 μm)                                                                    10                                                                   GeH.sub.4 5                                                                    H.sub.2 S(against SiH.sub.4)                                                             2 ppm                                                                C.sub.2 H.sub.2                                                                          0.5                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3                                                                               0.4                                                                  H.sub.2 S(against SiH.sub.4)                                                             2 ppm                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.2                                                                  H.sub.2 S(against SiH.sub.4)                                                             2 ppm                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                  layer                                                                              layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  H.sub.2 S(against SiH.sub.4)                                                             1 ppm                                                                SiF.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  20                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub. 4)                                                     0.3 ppm                                                              NO        0.1                                                                  H.sub.2 S (against SiH.sub.4)                                                            1 ppm                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    H.sub.2 S(against SiH.sub.4)                                                             3 ppm                                                                GeH.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 334                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    300    1       0.3  0.02                                       NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            8                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  Layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                  layer                                                                              layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  SiF.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  10                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 2                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            2                                                            __________________________________________________________________________

                                      TABLE 335                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    150    0.5                                                     NO        5     ↓                                                                              ↓                                                                               0.3  0.02                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                                              300    1.5                                                     H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.5                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            2                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            3                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100                                                              layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5   300    10      0.35 3                                          NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                                  GeH.sub.4 0.2                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                  layer                                                                              layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  30                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                                  GeH.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.5).sub.2 /He                                                            0.2                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                                    NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      2 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.5).sub.2 /He                                                            2                                                            __________________________________________________________________________

                                      TABLE 336                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiF.sub.4 0.5   250    1       0.4  0.02                                       SiH.sub.4 50                                                                   NO        5                                                                    H.sub.2 S (against SiH.sub.4)                                                            10 ppm                                                               H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     NH.sub.3  0.2                                                                  GeH.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10                                                           Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  NH.sub.3  0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  H.sub.2 S (against SiH.sub.4)                                                            1 ppm                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.3                                                                  H.sub.2 S (against SiH.sub.4)                                                            1 ppm                                                                Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                                  NH.sub.3  0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                  layer                                                                              layer                                                                              SiF.sub.4 0.1                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  H.sub.2 S (against SiH.sub.4)                                                            0.4 ppm                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                                  NH.sub.3  0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  20                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.2                                                                  NO        0.1                                                                  NH.sub.3  100                                                                  H.sub.2 S (against SiH.sub.4)                                                            0.4 ppm                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                                  NH.sub.3  100                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    H.sub.2 S (against SiH.sub.4)                                                            1 ppm                                                                GeH.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            2                                                            __________________________________________________________________________

                                      TABLE 337                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                     250    5       0.4  0.2                                        NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 40**                                                    (UL-side: 0.15 μm)                                                                    40 → 10**                                                     GeH.sub.4 1 → 10*                                                       C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.5                                                          Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.3                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    20      0.5  10                                 layer                                                                              layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  GeH.sub.4 0.05                                                                 B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SiF.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th SiF.sub.4 0.5   300    15      0.4  20                                     layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              N.sub.2   500                                                                  NO        0.1                                                                  GeH.sub.4 0.3                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                NO        1                                                                    SiF.sub.4 2                                                                    GeH.sub.4 1                                                                    AlCl.sub.3 /He                                                                           1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 338                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 25    300    0.5     0.2  0.02                                       NO        3                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 100*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     100 → 15**                                                    (UL-side: 0.01 μm)                                                                    15 → 5**                                                      SnH.sub.4 3                                                                    C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            2                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              SnH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub. 2 /He                                           0.4                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  SnH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                 layer                                                                              layer                                                                              SiH.sub.4 100                                                              region                                                                             NO        0.1                                                                  C.sub.2 H.sub.5                                                                          15                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SnH.sub.4 0.05                                                                 SiF.sub.4 0.2                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th AlCl.sub.3 /He                                                                           0.1   300    20      0.5  5                                      layer                                                                              SiF.sub.4 0.2                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              SnH.sub.4 0.05                                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    SnH.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 339                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    1       0.3  0.02                                       NO        5                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              H.sub.2   5 → 200*                                                      AlCl.sub.3 /He                                                                 (S-side: 0.01 μm)                                                                     200 → 30**                                                    (UL-side: 0.01 μm)                                                                    30 → 10**                                                     GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.5                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            5                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            2                                                            Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.4                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                 layer                                                                              layer                                                                              SiH.sub.4 100                                                              region                                                                             C.sub.2 H.sub.2                                                                          15                                                                   Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      10 ppm                                                               NO        0.1                                                                  GeH.sub.4 0.2                                                                  SiF.sub.4 0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              4th SiF.sub.4 0.1   300    20      0.5  4                                      layer                                                                              SiH.sub.4 300                                                              region                                                                             H.sub.2   300                                                                  AlCl.sub.3 /He                                                                           0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                                  GeH.sub.4 0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              NO        0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            2                                                            __________________________________________________________________________

                                      TABLE 340                                    __________________________________________________________________________     Order of                                                                               Gases and       Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                              lamination                                                                             their flow rates                                                                               temperature                                                                           power   pressure                                                                            thickness                          (layer name)                                                                           (SCCM)          (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                            __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 50    250    5       0.4  0.05                                       NO        5                                                                    H.sub.2   10 → 200*                                                     AlCl.sub.3 /He                                                                           120 → 40**                                                    GeH.sub.4 5                                                                    C.sub.2 H.sub.2                                                                          0.2                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            10                                                                   Mg(C.sub.5 H.sub.7).sub.2 /He                                                            4 → 20*                                               Upper                                                                              1st SiH.sub.4 100   300    10      0.35 1                                  layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                                  SiF.sub.4 0.5                                                                  C.sub.2 H.sub.2                                                                          0.4                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.3                                                              2nd SiH.sub.4 100   300    10      0.35 3                                      layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.3                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.2                                                                  GeH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.3                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1   300    15      0.4  20                                 layer                                                                              layer                                                                              SiF.sub.4 0.2                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   PH.sub.3 (against SiH.sub.4)                                                             8 ppm                                                                NO        0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.3                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.2                                                              4th AlCl.sub.3 /He                                                                           0.1   300    20      0.5  6                                      layer                                                                              SiF.sub.4 0.2                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  PH.sub.3 (against SiH.sub.4)                                                             0.5 ppm                                                              C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                                  Mg(C.sub.5 H.sub.7).sub.2 /He                                                            0.1                                                              5th SiH.sub.4 50    300    10      0.4  0.5                                    layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                PH.sub.3 (against SiH.sub.4)                                                             1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Mg(C.sub.5 H.sub.7).sub.2 /He                                                            2                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            1                                                            __________________________________________________________________________

                                      TABLE 341                                    __________________________________________________________________________     Order of                                                                               Gases and         Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                            lamination                                                                             their flow rates  temperature                                                                           power   pressure                                                                            thickness                        (layer name)                                                                           (SCCM)            (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                          __________________________________________________________________________     Lower layer                                                                            SiH.sub.4 10 → 100*                                                                       300    10      0.4  0.2                                      NO        5 → 20*                                                       H.sub.2   5 → 200*                                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              AlCl.sub.3 /He                                                                 (S-side: 0.05 μm)                                                                     200 → 0**                                                     (UL-side: 0.15 μm)                                                                    40 → 10**                                                     GeH.sub.4 1 → 10*                                                       C.sub.2 H.sub.2                                                                          0.1                                                                  SiF.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            5                                                            Upper                                                                              1st SiH.sub.4 100     300    10      0.35 1                                layer                                                                              layer                                                                              GeH.sub.4 50                                                               region                                                                             H.sub.2   150                                                                  NO        10                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              C.sub.2 H.sub.2                                                                          0.4                                                                  SiF.sub.4 0.5                                                                  AlCl.sub.3 /He                                                                           0.4                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.4                                                              2nd SiH.sub.4 100     300    10      0.35 3                                    layer                                                                              H.sub.2   150                                                              region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              AlCl.sub.3 /He                                                                           0.2                                                                  SiF.sub.4 0.5                                                                  NO        10                                                                   C.sub.2 H.sub.2                                                                          0.3                                                                  GeH.sub.4 0.5                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.2                                                          Upper                                                                              3rd AlCl.sub.3 /He                                                                           0.1     300    15      0.4  20                               layer                                                                              layer                                                                              SiF.sub.4 0.2                                                              region                                                                             SiH.sub.4 100                                                                  C.sub.2 H.sub.2                                                                          15                                                                   GeH.sub.4 0.2                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      12 → 0.3 ppm**                                                NO        0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                            0.1                                                              4th AlCl.sub.3 /He                                                                           0.1     300    20      0.5  3                                    layer                                                                              SiF.sub.4 0.2                                                              region                                                                             SiH.sub.4 300                                                                  H.sub.2   300                                                                  NO        0.1                                                                  C.sub.2 H.sub.2                                                                          0.1                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      0.3 ppm                                                              GeH.sub.4 0.1                                                                  Cu(C.sub.4 H.sub.7 N.sub. 2 O.sub.2).sub.2 /He                                           0.1                                                              5th SiH.sub.4 50      300    10      0.4  0.5                                  layer                                                                              C.sub.2 H.sub.2                                                                          30                                                               region                                                                             NO        1                                                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1 ppm                                                                SiF.sub.4 2                                                                    AlCl.sub.3 /He                                                                           1                                                                    GeH.sub.4 1                                                                    Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2 ).sub.2 /He                                           1                                                            __________________________________________________________________________

                                      TABLE 342                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4     50    300    2       0.3  0.05                                   H.sub.2       5 → 200*                                                  Al(CH.sub.3).sub.3 /He                                                         (S-side: 0.03 μm)                                                                         200 → 50**                                                (UL-side: 0.02 μm)                                                                        50 → 5**                                                  NO            5                                                                CH.sub.4      1                                                                GeH.sub.4     10                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                10                                                               SiF.sub.4     1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100 ppm                                                          Mg(C.sub.5 H.sub.5).sub.2 /He                                                                15                                                       Upper                                                                              1st SiH.sub.4     100   300    10      0.4  1                              layer                                                                              layer                                                                              H.sub.2       300                                                          region                                                                             GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1500 ppm                                                         NO            10                                                               SiF.sub.4     5                                                                CH.sub.4      5                                                                Al(CH.sub.3).sub.3 /He                                                                       0.5                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.3                                                              Mg(C.sub.5 H.sub.5).sub.2 /He                                                                0.3                                                          2nd SiH.sub.4     100   300    10      0.4  10                                 layer                                                                              H.sub.2       300                                                          region                                                                             GeH.sub.4     1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1500 ppm                                                         CH.sub.4      5                                                                SiF.sub.4     5                                                                Al(CH.sub.3).sub.3 /He                                                                       0.3                                                              NO                                                                             (U · 1st LR-side: 9 μm)                                                          5                                                                (U · 3rd LR-side: 1 μm)                                                          5 → 0.1**                                                 Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.3                                                              Mg(C.sub.5 H.sub.5).sub.2 /He                                                                0.3                                                      Upper                                                                              3rd SiH.sub.4     300   300    25      0.5  25                             layer                                                                              layer                                                                              H.sub.2       300                                                          region                                                                             GeH.sub.4     0.5                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          0.5 ppm                                                          CH.sub.4      1                                                                SiF.sub.4     1                                                                Al(CH.sub.3).sub.3 /He                                                                       0.1                                                              NO            0.1                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.1                                                              Mg(C.sub.5 H.sub.5).sub.2 /He                                                                0.1                                                          4th SiH.sub.4     200   300    15      0.4  7                                  layer                                                                              H.sub.2       200                                                          region                                                                             GeH.sub.4     1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          0.1 ppm                                                          PH.sub.3 (against SiH.sub.4)                                                                 1000 ppm                                                         SiF.sub.4     1                                                                NO            0.1                                                              Al(CH.sub.3).sub.3 /He                                                                       0.1                                                              Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2).sub.2 /He                                                0.2                                                              CH.sub.4                                                                       (U · 3rd LR-side: 1 μm)                                                          1 → 600*                                                  (U · 5th LR-side: 4 μm)                                                          600                                                              Mg(C.sub.5 H.sub.5).sub.2 /He                                                                0.2                                                          5th H.sub.2       200   300    10      0.4  0.3                                layer                                                                              GeH.sub.4     2                                                            region                                                                             SiF.sub.4     5                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1 ppm                                                            PH.sub.3 (against SiH.sub.4)                                                                 5 ppm                                                            NO            0.5                                                              Al(CH.sub.3).sub.3 /He                                                                       0.5                                                              CH.sub.4      600                                                              SiH.sub.4                                                                      (U · 4th LR-side: 0.03 μm)                                                       200 → 20**                                                (SF-side: 0.27 μm)                                                                        20                                                               Cu(C.sub.4 H.sub.7 N.sub.2 O.sub.2 ).sub.2 /He                                               0.4                                                              Mg(C.sub.5 H.sub.5).sub.2 /He                                                                1                                                        __________________________________________________________________________

                                      TABLE 343                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4     30    250    1       0.01 0.05                                   H.sub.2       5 → 100*                                                  Ar            100                                                      Upper                                                                              1st SiH.sub.4     100   250    10      0.4  1                              layer                                                                              layer                                                                              GeH.sub.4                                                                  region                                                                             (LL-side: 0.7 μm)                                                                         50                                                               (U · 2nd LR-side: 0.3 μm)                                                        50 → 0**                                                  H.sub.2       100                                                          2nd SiH.sub.4     100   250    10      0.4  3                                  layer                                                                              H.sub.2       100                                                          region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                          800 ppm                                                          NO                                                                             (U · 1st LR-side: 2 μm)                                                          10                                                               (U · 3rd LR-side: 1 μm)                                                          10 → 0**                                              3rd SiH.sub.4     300   250    15      0.5  20                                 layer                                                                              H.sub.2       600                                                          region                                                                         4th SiH.sub.4     50    330    10      0.4  0.5                                layer                                                                              CH.sub.4      500                                                          region                                                                     __________________________________________________________________________

                                      TABLE 344                                    __________________________________________________________________________     Order of                                                                               Gases and           Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                          lamination                                                                             their flow rates    temperature                                                                           power   pressure                                                                            thickness                      (layer name)                                                                           (SCCM)              (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                        __________________________________________________________________________     Lower layer                                                                            SiH.sub.4     5 → 50*                                                                       250    5       0.4  0.05                                   H.sub.2       10 → 200*                                                 Al(CH.sub.3).sub.3 /He                                                                       120 → 40**                                                NaNH.sub.2 /He                                                                               10                                                       Upper                                                                              1st SiH.sub.4     100   250    10      0.4  1                              layer                                                                              layer                                                                              H.sub.2       100                                                          region                                                                             B.sub.2 H.sub.6 /H.sub.2 (against SiH.sub.4)                                                 500 ppm                                                          NO            5                                                                GeH.sub.4                                                                      (LL-side: 0.7 μm)                                                                         50                                                               (U · 2nd LR-side: 0.3 μm)                                                        50 → 0**                                              2nd SiH.sub.4     100   250    10      0.4  3                                  layer                                                                              B.sub.2 H.sub.6 /H.sub.2 (against SiH.sub.4)                               region            800 ppm                                                          NO            10                                                               H.sub.2       100                                                          3rd SiH.sub.4     300   250    15      0.5  20                                 layer                                                                              H.sub.2       300                                                          region                                                                         4th SiH.sub.4     50    250    10      0.4  0.5                                layer                                                                              CH.sub.4      500                                                          region                                                                     __________________________________________________________________________

                                      TABLE 345                                    __________________________________________________________________________              Comparative Example 2                                                                      Example 1                                                                            Example 2                                           __________________________________________________________________________     Al(CH.sub.3).sub.3 /He                                                                  120 → 10**                                                                    120 → 20**                                                                    120 → 40**                                                                    120 → 60**                                                                    120 → 80**                             Flow rate                                                                      (sccm)                                                                         Content of Al                                                                           8     14    21    29    36                                            (atomic %)                                                                     Ratio of film                                                                           23    12    1     0.94  0.91                                          peeling-off                                                                    (Example 1 = 1)                                                                __________________________________________________________________________

                  TABLE 346                                                        ______________________________________                                         Order of lamination                                                            (layer name)    Gases and their flow rates (SCCM)                              ______________________________________                                         Lower layer     SiF.sub.4     3                                                                NO            3                                                                CH.sub.4      2                                                                GeH.sub.4     1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100 ppm                                          Upper 1st layer region                                                                             CH.sub.4      2                                            layer               SiF.sub.4     1                                                                Zn(C.sub.2 H.sub.5).sub.2 /He                                                                1                                                  2nd layer region                                                                             CH.sub.4      2                                                                SiF.sub.4     1                                                                GeH.sub.4     2                                                                Zn(C.sub.2 H.sub.5).sub.2 /He                                                                1                                                  3rd layer region                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                          0.5 ppm                                                          NO            0.1                                                              CH.sub.4      1                                                                SiF.sub.4     0.2                                                              Zn(C.sub.2 H.sub.5).sub.2 /He                                                                0.3                                                              GeH.sub.4     0.2                                                4th layer region                                                                             SiF.sub.4     1                                                                B.sub.2 H.sub.6 (against SiH.sub.4)                                                          2 ppm                                                            NO            0.5                                                              Al(CH.sub.3).sub.3 /He                                                                       0.5                                                              Zn(C.sub.2 H.sub.5).sub.2 /He                                                                1                                                                GeH.sub.4     0.8                                          ______________________________________                                    

                                      TABLE 347                                    __________________________________________________________________________     Order of                                                                               Gases and        Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates temperature                                                                           power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)           (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4  5 → 50*                                                                       300    5       0.4  0.05                                      H.sub.2    10 → 200*                                                    Al(CH.sub.3).sub.3 /He                                                                    120 → 40*                                                    Y(oi-C.sub.3 H.sub.7).sub.3 /He                                                           10                                                          Upper                                                                              1st SiH.sub.4  200   300    30      0.5  1                                 layer                                                                              layer                                                                              H.sub.2    500                                                             region                                                                             B.sub.2 H.sub.6 /H.sub.2 (against SiH.sub.4)                                              500 ppm                                                             C.sub.2 H.sub.2                                                                           20                                                                  GeH.sub.4  40                                                              2nd SiH.sub.4  200   300    30      0.5  5                                     layer                                                                              C.sub.2 H.sub.2                                                                           20                                                              region                                                                             B.sub.2 H.sub.6 /H.sub.2 (against SiH.sub.4)                                              1000 ppm                                                            H.sub.2    500                                                             3rd SiH.sub.4  200   300    30      0.5  20                                    layer                                                                              C.sub.2 H.sub.2                                                                           20                                                              region                                                                             B.sub.2 H.sub.6 /H.sub.2 (against SiH.sub.4)                                              5 ppm                                                               H.sub.2    500                                                             4th SiH.sub.4  300   300    15      0.5  5                                     layer                                                                              H.sub.2    300                                                             region                                                                         5th SiH.sub.4  50    300    10      0.4  0.5                                   layer                                                                              CH.sub.4   500                                                             region                                                                     __________________________________________________________________________

                                      TABLE 348                                    __________________________________________________________________________     Order of                                                                               Gases and        Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                             lamination                                                                             their flow rates temperature                                                                           power   pressure                                                                            thickness                         (layer name)                                                                           (SCCM)           (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                           __________________________________________________________________________     Lower layer                                                                            SiH.sub.4  15 → 150*                                                                     250    0.5     0.6  0.07                                      SiF.sub.4  10 → 20*                                                     H.sub.2    20 → 300*                                                    Al(CH.sub.3).sub.3 /He                                                                    400 → 50**                                                   NaNH.sub.2 /He                                                                            20                                                          Upper                                                                              1st SiH.sub.4  500   250    0.5     0.5  1                                 layer                                                                              layer                                                                              H.sub.2    300                                                             region                                                                             GeH.sub.4  100                                                                 B.sub.2 H.sub.6 /H.sub.2 (against SiH.sub.4)                                              1000 ppm                                                            SiF.sub.4  20                                                                  NO         10                                                              2nd SiH.sub.4  230   250    0.5     0.5  3                                     layer                                                                              SiF.sub.4  20                                                              region                                                                             B.sub.2 H.sub.6 /H.sub.2 (against SiH.sub.4)                                              750 ppm                                                             NO         10                                                                  H.sub.2    150                                                             3rd SiH.sub.4  700   250    0.5     0.5  20                                    layer                                                                              SiF.sub.4  30                                                              region                                                                             H.sub.2    500                                                             4th SiH.sub.4  150   250    0.5     0.3  1                                     layer                                                                              CH.sub.4   500                                                             region                                                                     __________________________________________________________________________

                                      TABLE 349                                    __________________________________________________________________________     Order of                                                                              Gases and                                                                              Substrate                                                                             RF discharging                                                                         Inner                                                                               Layer                                       lamination                                                                            their flow rates                                                                       temperature                                                                           power   pressure                                                                            thickness                                   (layer name)                                                                          (SCCM)  (°C.)                                                                          (mW/cm.sup.3)                                                                          (Torr)                                                                              (μm)                                     __________________________________________________________________________     Lower layer                                                                           SiH.sub.4                                                                         10 → 50*                                                                     250    1       0.01 0.05                                               H.sub.2                                                                           5 → 100*                                                             Ar 200                                                                  __________________________________________________________________________ 

What is claimed is:
 1. A light receiving member having an aluminum support and a multilayered light receiving layer exhibiting photoconductivity formed on said aluminum support, characterized in that said multilayered light receiving layer comprises: (i) a lower layer (a) in contact with said support and (ii) an upper (b) layer having a free surface disposed on said lower layer (a); said lower layer (a) comprising an inorganic material composed of aluminum atoms, silicon atoms, hydrogen atoms and atoms of an element capable of contributing to the control of image quality selected from the group consisting of boron, gallium, indium, thallium, phosphorus, arsenic, antimony, bismuth, sulfur, selenium, tellurium and polonium; said lower layer (a) having a portion in which said aluminum, silicon and hydrogen atoms are unevenly distributed across the layer thickness; said aluminum atoms being contained in said lower layer (a) such that their content decreases across the layer thickness upward from the interface between said lower layer (a) and said aluminum support and wherein said content of said aluminum atoms is lower than 95 atomic % in the vicinity of the interface between said lower layer (a) and said aluminum support and higher than 5 atomic % in the vicinity of the interface between said lower layer (a) and said upper layer (b); and said upper layer (b) comprising a plurality of layer regions, each said region comprising a non-single-crystal material composed of silicon atoms as the matrix, and wherein the layer region adjacent said lower layer (a) comprises (iii) a non-single-crystal material containing silicon atoms as the matrix, (iv) at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, and (v) one kind of atoms selected from the group consisting of germanium atoms and tin atoms.
 2. A light receiving member according to claim 1, wherein the amount of said silicon atoms contained in the lower lyer is from 5 to 95 atomic %.
 3. A light receiving member according to claim 1, wherein the amount of said hydrogen atoms contained in the lower layer is from 0.01 to 70 atomic %.
 4. A light receiving member according to claim 1, the amount of said element atoms capable of contributing to the control of image quality contained in the lower layer is from 1×10⁻³ to 5×10⁴ atomic ppm.
 5. A light receiving member according to claim 1, wherein the lower layer further contains one kind of atoms selected from the group consisting of carbon atoms, nitrogen atoms and oxygen atoms.
 6. A light receiving member according to claim 5, wherein the amount of said one kind of atoms contained in the lower layer is from 1×10³ to 5×10⁵ ppm.
 7. A light receiving member according to claim 1, wherein the lower layer further contains one kind of halogen atoms selected from the group consisting of fluorine atoms, chlorine atoms, bromine atoms and iodine atoms.
 8. A light receiving member according to claim 7, wherein the amount of said one kind of halogen atoms contained in the lower layer is from 1 to 4×10⁵ atomic ppm.
 9. A light receiving member according to claim 5, wherein the lower layer further contains one kind of halogen atoms selected from the group consisting of fluorine atoms, chlorine atoms, bromine atoms and iodine atoms.
 10. A light receiving member according to claim 9, wherein the amount of said one kind of halogen atoms contained in the lower layer is from 1 to 4×10⁵ atomic ppm.
 11. A light receiving member according to claim 1, wherein the lower layer further contains one kind of atoms selected from the group consisting of germanium atoms and tin atoms.
 12. A light receiving member according to claim 11, wherein the amount of said one kind of atoms contained in the lower layer is from 1 to 9×10⁵ atomic ppm.
 13. A light receiving member according to claim 5, wherein the lower layer further contains one kind of atoms selected from the group consisting of germanium atoms and tin atoms.
 14. A light receiving member according to claim 13, wherein the amount of said one kind of atoms contained in the lower layer is from 1 to 9×10⁵ atomic ppm.
 15. A light receiving member according to claim 7, wherein the lower layer further contains one kind of atoms selected from the group consisting of germanium atoms and tin atoms.
 16. A light receiving member according to claim 15, wherein the amount of said one kind of atoms contained in the lower layer is from 1 to 9×10⁵ atomic ppm.
 17. A light receiving member according to claim 1, wherein the lower layer further contains atoms of a metal selected from the group consisting of magnesium, copper, sodium, yttrium, manganese and zinc.
 18. A light receiving member according to claim 17, wherein the amount of said metal atoms contained in the lower layer is from 1 to 2×10⁵ atomic ppm.
 19. A light receiving member according to claim 5, wherein the lower layer further contains atoms of a metal selected from the group consisting of magnesium, copper, sodium, yttrium, manganese and zinc.
 20. A light receiving member according to claim 19, wherein the amount of said metal atoms contained in the lower layer is from 1 to 2×10⁵ atomic ppm.
 21. A light receiving member according to claim 7, wherein the lower layer further contains atoms of a metal selected from the group consisting of magnesium, copper, sodium, yttrium, manganese and zinc.
 22. A light receiving member according to claim 21, wherein the amount of said metal atoms contained in the lower layer is from 1 to 2×10⁵ atomic ppm.
 23. A light receiving member according to claim 11, wherein the lower layer further contains atoms of a metal selected from the group consisting of magnesium, copper, sodium, yttrium, manganese and zinc.
 24. A light receiving member according to claim 23, wherein the amount of said metal atoms contained in the lower layer is from 1 to 2×10⁵ atomic ppm.
 25. A light receiving member according to claim 1, wherein the amount of said one kind of atoms selected from the group consisting of germanium atoms and tin atoms contained in the layer region of the upper layer adjacent the lower layer is from 1 to 9.5×10⁵ atomic ppm.
 26. A light receiving member according to claim 1, wherein the lower layer is 0.03 to 5 μm thick and the upper layer is 1 to 130 μm thick.
 27. An electrophotographic process comprising:(a) applying an electric field to the light receiving member of claim 1; and (b) applying an electromagnetic wave to said light receiving member thereby forming an electrostatic image. 